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SEMI E30-1103 © SEMI 1992, 2003 82 Table 8.4 SML Notation SECS-II Format Code Item Format Binary Octal SML Item Format Mnemonic LIST 000000 00 L [length] Binary 001000 10 B Boolean 001001 11 BOOLEAN ASCII 010000 20 A [le…

SEMI E30-1103 © SEMI 1992, 2003

8.4.3 The equipment supplier may provide documentation on the format of required data items (see Section 5)

using SECS Message Language Notation (SML



). The SML formats are provided in Table 8.4.

Table 8.3 GEM Compliance Statement

GEM COMPLIANCE STATEMENT

FUNDAMENTAL GEM REQUIREMENTS IMPLEMENTED GEM-COMPLIANT

State Models

❐ Yes ❐ No

Equipment Processing States

❐ Yes ❐ No

Host-Initiated S1= F13/F14 Scenario

❐ Yes ❐ No

Event Notification

❐ Yes ❐ No

On-Line Identification

❐ Yes ❐ No

Error Messages

❐ Yes ❐ No

Documentation

❐ Yes ❐ No

Control (Operator Initiated)

❐ Yes ❐ No

❐ Yes (See NOTE 1.)

❐ No

ADDITIONAL CAPABILITIES IMPLEMENTED GEM-COMPLIANT (See NOTE 2.)

Establish Communications

❐ Yes ❐ No ❐ Yes ❐ No

Dynamic Event Report Configuration

❐ Yes ❐ No ❐ Yes ❐ No

Variable Data Collection

❐ Yes ❐ No ❐ Yes ❐ No

Trace Data Collection

❐ Yes ❐ No ❐ Yes ❐ No

Status Data Collection

❐ Yes ❐ No ❐ Yes ❐ No

Alarm Management

❐ Yes ❐ No ❐ Yes ❐ No

Remote Control

❐ Yes ❐ No ❐ Yes ❐ No

Equipment Constants

❐ Yes ❐ No ❐ Yes ❐ No

Process Program Management

❐ Yes ❐ No ❐ Yes ❐ No

Material Movement

❐ Yes ❐ No ❐ Yes ❐ No

Equipment Terminal Services

❐ Yes ❐ No ❐ Yes ❐ No

Clock

❐ Yes ❐ No ❐ Yes ❐ No

Limits Monitoring

❐ Yes ❐ No ❐ Yes ❐ No

Spooling

❐ Yes ❐ No ❐ Yes ❐ No

Control (Host-Initiated)

❐ Yes ❐ No ❐ Yes ❐ No

NOTE 1: Do not mark YES unless all fundamental GEM requirements are implemented and GEM-compliant.

NOTE 2: Additional capabilities may not be marked GEM-compliant unless the fundamental GEM requirements are GEM-compliant.

SEMI E30-1103 © SEMI 1992, 2003

Table 8.4 SML Notation

SECS-II Format Code

Item Format

Binary Octal

SML Item Format Mnemonic

LIST 000000 00 L [length]

Binary 001000 10 B

Boolean 001001 11 BOOLEAN

ASCII 010000 20 A [length] or A [min., max.]

JIS-8 010001 21 J [length] or J [min., max.]

8-byte integer (signed) 011000 30 I8

1-byte integer (signed) 011001 31 I1

2-byte integer (signed) 011010 32 I2

4-byte integer (signed) 011100 34 I4

8-byte floating point 100000 40 F8

4-byte floating point 100100 44 F4

8-byte integer (unsigned) 101000 50 U8

1-byte integer (unsigned) 101001 51 U1

2-byte integer (unsigned) 101010 52 U2

4-byte integer (unsigned) 101100 54 U4

SEMI E30-1103 © SEMI 1992, 2003

A. Application Notes

NOTE: The material contained in these Application

Notes is not an official part of this SEMI standard and

is not intended to modify or supersede the official

standard. Rather, these notes are auxiliary information

describing possible methods for implementing the

protocol described by the standard and are included as

reference material. The standard should be referred to

in all cases. SEMI makes no warranties or

representations as to the suitability of the material set

forth herein for any particular application. The

determination of the suitability of the materialis solely

the responsibility of the user.

A.1 Factory Operational Script

An Operational Script is a series of capabilities

arranged in a typical factory operation sequence. The

intent of having an Operational Script is to help put the

SECS-II message Scenarios into a context. Although

this context will vary, it represents a typical operational

sequence found in most semiconductor device

manufacturers’ applications.

— System Initialization

— Synchronization

— Machine Setup

— Production Setup

— Processing

— Post-Processing

— Shutdown

The following script is not intended to be complete, but

to serve as an example to be further developed on an

implementation basis.

A1.1 Anytime Capabilities  All capabilities can

generally occur at anytime during the operational script

sequence.

A1.2 System Initialization and Synchronization 

Upon system initialization, the default setting for

communication (enabled or disabled) becomes

effective, as well as any equipment constants or other

information retained in non-volatile storage. The initial

communication status is displayed at the equipment.

Assuming the communication state is enabled, the

equipment will attempt to establish communication

with a host computer. See Section 4.1 for a description

of the scenario for establishing communications.

Upon receiving an indication that the equipment was

previously not communicating, the host would typically

perform synchronization activities including setting the

equipment’s clock and requesting selected status

information. Note that synchronization activity is host

application-dependent and may be implemented using

various scenarios.

A1.3 Production Set-Up  The host typically has the

following information:

— what material

— what process step

— what process program to use (PPID)

— current equipment status, VID’s, SVID’s

— data collection requirements (trace data & event

data)

— VID’s needed

— Equipment constants (ECID’s)

Based upon the above information, the host will

perform setup activities as required. It must be verified

that the correct process program is available and

selected at the equipment.

A1.3.1 Auxiliary Material and Manual Set-Up 

Auxiliary material can be checked and verified at this

point. If status variables exist for auxiliary material,

they may be requested by the host.

Any other manual, non-process, and/or non-product

specific set-up also may take place at this point. The

operator may interact with the equipment and the host.

If the operator interacts with the equipment, the

equipment communications link with the host should

stay operational.

The operator and the host may exchange information

via equipment terminal services.

A1.3.2 Product/Process Set-Up  Specific product

and/or process information is communicated to the

equipment prior to processing material.

A1.3.3 Material Load  The host may instruct an

operator or a material handling system to deliver

material to the equipment.

Once the material has arrived at the equipment, the

equipment or the operator will notify the host.

A1.3.4 Production Data Collection Set-Up  The host

instructs the equipment to collect event-based data.

Reports are defined and linked to events. Event reports

can be enabled or disabled.

The host instructs the equipment to collect data from

the equipment based on time intervals.