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SEMI E58-0703 © SEMI 1997, 2003 39 ← ARAMS State Change Event (Report “A”) ← ARAMS Transition Event (Report “B”) R1-4 Operator-Initiated Transition R1-4.1 This scenario illustrates th e events and activities that occur a…

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SEMI E58-0703 © SEMI 1997, 2003
38
Table 17 Table R1-1 Powerup Scenario
Time Action Comment
ARAMSState = “2000”
ARAMSTimestamp = t
-1
PrdState = “1100”
Initial conditions prior to t = t
0
:
Equipment is in STANDBY
PRODUCTION substate is “regular”
t
0
ARAMSTimestamp:= Clock
PrevARAMSState:= ARAMSState
ARAMSState:= PrdState
Requirements for PRODUCTIVE are satisfied.
Equipment transitions automatically.
t
1
= t
0
+ 30 PowerdownTime:= Clock Periodic update of estimated powerdown time.
t
2
= t
1
+ 30 PowerdownTime:= Clock Periodic update of estimated powerdown time.
t
3
= t
2
+ 30 PowerdownTime:= Clock Periodic update of estimated powerdown time.
t
4
= t
3
+ 30 PowerdownTime:= Clock Periodic update of estimated powerdown time.
t
5
= t
4
+ 30 PowerdownTime:= Clock Periodic update of estimated powerdown time.
t
6
= t
5
+ 30 PowerdownTime:= Clock Periodic update of estimated powerdown time.
t
7
Powerdown
t
8
LastPowerdown:= PowerdownTime
PowerdownTime:= Clock
Elapsed time before powerdown =
LastPowerdown –
ARAMSTimestamp (t
6
– t
0
)
ARAMSTimestamp:= LastPowerdown (t
6
)
PrevARAMSState:= ARAMSState (“1100”)
ARAMSState:= “5000” (“UDT”)
PrdTime:= PrdTime + elapsed time (t
6
– t
0
)
Powerup: Transition 1
Equipment system initialization
ARAMS housekeeping
Transition complete.
t
9
← ARAMS State Change Event Report “A”
← ARAMS Transition Event Report “B”
Equipment sends event notification to host.
R1-3 Equipment-Initiated Transition
R1-3.1 This scenario illustrates the events and activities that occur as the result of an equipment-initiated transition
from PRODUCTIVE to UNSCHEDULED DOWNTIME, for equipment supporting the accumulators in Section
11.4.
Table 18 Table R1-2 Equipment-Initiated Transition
Comment Host Equipment Comment
ARAMSState = “1100”
(“PRD/Regular Production”)
Initial conditions.
Equipment detects mechanical fault in wafer
handler.
Equipment suspends processing, transitions to
UNSCHEDULED DOWNTIME, and notifies user.
Elapsed time: = Clock − ARAMS
ARAMSTimestamp:= Clock
PrevARAMSState:= ARAMSState (
“1100”)
ARAMSState:= “5000” (“UDT”)
DowntimeAlarm:= alarm/exception identifier
DowntimeAlarmText := alarm/exception
description
DowntimeData:= additional information
Prdtime:= Prdtime + elapsed time
SEMI E58-0703 © SEMI 1997, 2003 39
← ARAMS State Change Event
(Report “A”)
← ARAMS Transition Event
(Report “B”)
R1-4 Operator-Initiated Transition
R1-4.1 This scenario illustrates the events and activities that occur as the result of an operator-initiated transition
from PRODUCTIVE to UNSCHEDULED DOWNTIME.
Table 19 Table R1-3 Operator-Initiated Transition
Comment Host Equipment Comment
ARAMSState = “1100”
(“PRD/Regular Production”)
Initial conditions.
Operator aborts process. Equipment halts
processing.
PrevARAMSState:=ARAMSState (“1100”)
ARAMSState:= “5000”
ARAMSTimestamp:= Clock
SymptomID:= corresponding
symptom identifier.
SymptomText:= corresponding
symptom description.
Operator selects new ARAMS state of
UNSCHEDULED DOWNTIME (“5000”).
Operator selects description of a symptom.
Elapsed time:= Clock −
ARAMSTimestamp
ARAMSTimestamp:= Clock
ARAMSState:= “5000” (“UDT”)
DowntimeAlarm:= alarm/exception
identifier
DowntimeAlarmText:=
alarm/exception description
DowntimeData:= additional information
PrdTime:= PrdTime + elapsed time
← ARAMS State Change Event
(Report “A”)
← ARAMS Transition Event
(Report “C”)
SEMI E58-0703 © SEMI 1997, 2003
40
R1-5 Host-Initiated Transition
R1-5.1 This scenario illustrates the events and activities that occur as the result of a host-initiated transition from its
current substate of STANDBY to a different substate of STANDBY.
Table 20 Table R1-4 Host-Initiated Transition
Comment Host Equipment Comment
ARAMSState = “2800”
(“SBY/No host”)
Initial conditions.
Host sends new ARAMS
substate code.
ARAMSStateChange.req →
(ARAMSCode = “2400”)
Elapsed time:= Clock Ð
ARAMSTimestamp
PrevARAMSState:=
ARAMSState (“2800”)
ARAMSState:= “2400”
(“SBY”)
NOTE – ARAMSTimestamp is
unchanged.
← ARAMSStateChange.rsp
Equipment acknowledges the
new state change.
← ARAMS State Change
Event
(Report “A”)
← ARAMS Transition Event
(Report “C”)
Equipment notifies host of
ARAMS state change.