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SEMI E142-0705 © SEMI 2005 13 Table 20 Map Upload Param eter Dictionary Parameter Name Description Format: Possible values MapData The MapData to upload. The MapData may con tain one or more substrat es. Text. Other stan…

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SEMI E142-0705 © SEMI 2005 12
Attribute Name Definition Access Reqd Form
TY The Y coordinate at which the device was placed on the substrate
to which this map applies, according to the values of
SubstrateMap coordinate attributes; SubstrateSide, Orientation,
OriginLocation, and AxisDirection.
RO Y Integer
14 Services
14.1 Table 18 shows the services defined for map data.
Table 17 Map Data Services
Message Service Name Type Description
MapDownload R Download Map Data
MapUpload N Upload Map Data
14.2 Map Download Service
14.2.1 This service may be used to download MapData for a single substrate.
Table 18 Map Download Parameter Dictionary
Parameter Name Description Format: Possible values
SubstrateType The type of substrate to which the MapData applies. Text
Restricted to the values:
‘Wafer’, ‘Frame’, ‘Strip” or ‘Tray”
SubstrateId The identifier of the substrate to which the MapData applies. Text
MapData The MapData for the specified substrate. Text
Other standards that define an
implementation of this service and
reference this standard will define
how the MapData is represented in
text.
Table 19 Map Download Service Definition
Parameter Req/Ind Rsp/Cnf Comment
SubstrateType M - Type of substrate to which download.
SubstrateId M - Identifier of substrate to download.
MapData - M The MapData for the specified substrate.
14.3 Map Upload Service
14.3.1 This service may be used to upload MapData for one ore more substrates.
SEMI E142-0705 © SEMI 2005 13
Table 20 Map Upload Parameter Dictionary
Parameter Name Description Format: Possible values
MapData The MapData to upload.
The MapData may contain one or more substrates.
Text.
Other standards that define an implementation
of this service and reference this standard will
define how the MapData is represented in
text.
Table 21 Map Upload Service Definition
Parameter Req/Ind Comment
MapData M The MapData to be uploaded. The MapData may contain one or more substrates.
SEMI E142-0705 © SEMI 2005 14
APPENDIX 1
WAFER MAP
NOTICE: The material in this appendix is an official part of SEMI E142 and was approved by full letter ballot
procedures on December 10, 2004.
A1-1 This appendix shows how the map data items may be applied to wafers as well as some additional information
specific to this substrate type. See Figures A1-1 through A1-8.
ORIGIN
Column
Row
0
1234
0
1
2
3
4
WAFER
3
3
3
31
1
1
1
NUMBER:BIN DATA
2
2
2
2
2
2
DATA STRUCTURE
Col.
Row.
CHIP
QTY.
Bin Bin
DATA EX.
0002 0001 0003 3 1 3 0001 0002 0004 3
1
Figure A1-1a
Row/Column Format
ORIGIN
Column
Row
01 234
0
1
2
3
4
3
2
3
31
1
1
1
NUMBER:BIN DATA
2
2
2
2
2
2
DATA STRUCTURE
Bin
Bin Bin … Bin Bin Bin
DATA EX.
000000031303
1
COLUM NUMBER=5
00
00
0
00
0
0
0
Row=0
Col=0 Col=1 Col=2 Col=0
Col=1
Col=n
Row=1
Figure A1-1b
Array Format
Row
01234
0
1
2
3
4
1
1
1
1
NUMBER:BIN DATA
2
2
22
2
2
DATA STRUCTURE
Col.
Row. Bin … Col. Row. Bin
DATA EX.
0002 0001 3 0003 0001 1 0004 0001 2
Column
ORIGIN
3
3
2
3
Figure A1-1c
Coordinate Format