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SEMI E101-1104 © SEMI 2000, 2004 7 OHT AGV/ RGV/ PGV 1+ Huma n Int er fa ce s ( User In t er fa ce) 1+ EMO Switch 1+ S i gnal Towe r 1+ Operation Co n sole 0,1 Subs t rat e Handler 0, 1+ Substrate Tr an sfer Rob ot Pr oc…

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SEMI E101-1104 © SEMI 2000, 2004 6
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier Handler
Load Port
Group
Internal
Buffer
Internal
Substrate
Port
Substrate
Transpor-
tation
Carrier
Transportation
(Automatic or
Manual)
Operator
Figure 3
Conceptual Structure of Internal Buffer Type EFEM in Equipment When Substrate Handler Is Installed
Outside Process Part
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier Handler
Load Port
Group
Internal
Buffer
Internal
Substrate
Port
Substrate
Transportation
Carrier
Transportation
(Automatic or
Manual)
Operator
Figure 4
Conceptual Structure of Internal Buffer Type EFEM in Equipment When Substrate Handler Is Included
Inside Process Part
SEMI E101-1104 © SEMI 2000, 2004 7
OHT
AGV/
RGV/
PGV
1+ Human Interfaces (User Interface)
1+ EMO Switch1+ Signal Tower 1+ Operation Console
0,1
Substrate
Handler
0, 1+
Substrate
Transfer
Robot
Process
Part
1 Carrier Handler
1+ Load Port Group
1+ Load Port
0,1 Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
0,1 Load Port Door
0,1 PI/O for AGV/RGV/OHT
0,1 Cart to Tool Docking Port Interface
0,1 Carrier ID Reader/Writer
1Load Plate
1 Kinematic Coupling
0,1 Dock Plate
1 Carrier Opener/Loader
0,1 FOUP Opener
1 Open/Close
0,1 Carrier Slot Mapper
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Dock/Undock Mechanism
0,1 [FOUP] Carrier Purge Interface
1 Load Port Unit
0,1
Carrier Opener/Loade
r
Maintenance Panel
0,1 Substrate
ID Reader
0,1 Aligner
Equipment
0,1 Carrier Operation Panel
0,1 Info Pad Sensors
1 Fixed Buffer Type EFEM
0,1 Status Indicators
0,1 Carrier Sensors
Figure 5
Fixed Buffer Type EFEM Functional Structure Model
1 Carrier Handler
1+ Load Port Group
1+Load Port
0,1 Carrier Operation Panel
0,1Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
1Load Plate
0,1 Carrier Sensors
1 Kinematic Coupling
0,1 Carrier ID Reader/Writer
0,1 [OC] Carrier Slot Mapper
0,1 Load Port Door
0,1 PI/O for AGV/RGV
0,1 Cart to Tool Docking Port Interface
1+ Internal Buffer
1 Carrier Transfer
Robot
1+Carrier Storage
1Carrier Sensors
1Kinematic
Coupling
1Load Plate
0,1+ Internal Substrate Port
0,1Dock Plate
1 Kinematic Coupling
1 Load Plate
0,1 Carrier Purge interface
0,1 Dock/ Undock
Mechanism
0,1 FOUP Opener
1 Open/Close
Equipment
1 Load Port Unit
OHT
AGV/
RGV/
PGV
0,1 [FOUP] Carrier Slot
Mapper
1Carrier Opener/Loader
1+Human Interfaces (User Interface)
1+EMO Switch1+Signal Tower 1+ Operation Console
0,1 Carrier Sensors
0,1
Substrate
Handler
0, 1+
Substrate
Transfer
Robot
Process
Part
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Substrate
ID Reader
0,1 Aligner
1 Internal Buffer Type EFEM
0,1 Status Indicators
0,1 Carrier ID Reader/Writer
0,1 Info Pad Sensors
Figure 6
Internal Buffer Type EFEM Functional Structure Model
SEMI E101-1104 © SEMI 2000, 2004 8
APPENDIX 1
NOTICE: The material in this appendix is an official part of SEMI E101 and was approved by full letter ballot
procedures on January 14, 2000 by the Japanese Regional Standards Committee.
OHT
AGV/
RGV/
PGV
1+ Human Interfaces (User Interface)
1+ EMO Switch1+ Signal Tower
1+ Operation Console
0,1
Substrate
Handler
0, 1+
Substrate
Transfer
Robot
Process
Part
1Carrier Handler
1+Load Port
0,1 Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
0,1 Load Port
Door
0,1 E84 PI/O for
AGV/RGV/OHT
0,1 E64 Cart to Tool Docking Port
Interface
0,1Carrier ID Reader/Writer
1 Load Plate
1 E57 Kinematic Coupling
0,1 Dock Plate
1 Carrier Opener/Loader
0,1 FOUP Opener
1 Open/Close
0,1 Carrier Slot Mapper
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Dock/Undock Mechanism
0,1 [FOUP] Carrier Purge Interface
1Load Port Unit
0,1 Carrier Opener/Loader
Maintenance Panel
0,1 Substrate
ID Reader
0,1 Aligner
Equipment
0,1Carrier Operation Panel
0,1 Carrier Sensors
1 Fixed Buffer Type EFEM
0,1 Status Indicators
1+ Load Port Group (E15.1(Option-1 or 3))
0,1 Info Pad Sensors
Figure A1-1
Relation between Fixed Buffer Type EFEM Functional Structure Model and Existing SEMI Standards