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SEMI E90-0705 © SEMI 1999, 2005 18 Substrate Attribute Name Use as AttrSettin g in Create Service SubstType O SubstUsage O 12.1.4 Use of attribute settings for the Delete servi ce are optional and specifi c to the applic…

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11.5 Batch Location Object Attributes
11.5.1 Table 7 defines attributes for batch location objects. These attributes can be accessed by using GetAttr and
SetAttr messages as defined in SEMI E39 (OSS).
Table 7 Batch Location Object Attribute Table
Attribute Name Definition Access Reqmt Format
ObjID Object Identifier. RO N Text equal to the Batch Location ID
ObjType Object type. RO N Text = “BatchLoc”
BatchLocState Batch Location state. RO N Enumerated:
UNOCCUPIED, OCCUPIED
BatchSubstIDMap Ordered list of substrate identifiers
corresponding to the positions in a batch
(e.g., slot positions of a batch container or
a process carrier).
RO N Ordered list of SubstID
(Ordered list indicates position in the
batch and SubstID can be actual
substrate identifier, blank “” when
location is empty or “filler” when
such substrate is used.)
This attribute is updated each time a
substrate is moved into or out of the
batch or as soon as the equipment
has the information.
DisableEvents When set to TRUE, the transitions for this
substrate location do not generate events
to the host.
RW Y Boolean
TRUE = Disable
FALSE = Enable
12 Substrate Tracking Services
12.1 Creating and Deleting Substrate Objects
12.1.1 Equipment may create substrate objects as appropriate during equipment operation. On some equipment (at
the option of the equipment designer), substrate objects may also be registered (created) at the equipment through
the host-initiated Create service defined in SEMI E39. Equipment is not required to provide host-initiated Register
(Create) Substrate or Remove Substrate services for fundamental compliance to STS. Table 8 defines the attribute
settings that may be initialized through this service.
12.1.2 In general, it depends on the application whether or not attributes are initialized by the user of the create
service. In some situation, it may be necessary to match the new substrate with a location, for example, while in
other situations it would be unnecessary. Each application must specify its own requirements.
12.1.3 ObjType is a required argument of the Create service and should not be reset by including it as an attribute
setting. In the table, M indicates Mandatory, O indicates Optional, and R specifies Restricted (shall be ignored if
used).
Table 8 Substrate Attributes Settable through Create
Substrate Attribute Name Use as AttrSetting in Create Service
LotID O
MaterialStatus O
ObjID M
ObjType R
SubstDestination O
SubstHistory O
SubstLocID O
SubstProcState O
SubstSource O
SubstState O
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Substrate Attribute Name Use as AttrSetting in Create Service
SubstType O
SubstUsage O
12.1.4 Use of attribute settings for the Delete service are optional and specific to the application.
12.2 Table 9 defines services required for substrate tracking. These services must be supported with substrate
object.
Table 9 Substrate Tracking Service Message Definition Table
Message Service Name Type Description
CancelSubstrate R Request to the equipment to skip the substrate and move into its source location or
destination location. Equipment instantiated substrate ID is required by this service. This
service is only required when the equipment provides capabilities for reading substrate
identifiers.
Change substrate state R Request to change substrate state. This message can be used to inform the equipment that
external intervention has occurred and the state of the substrate (SubstState) must be
corrected. For example, changing from AT DESTINATION state to AT SOURCE state.
ProceedWithSubstrate R Request to the equipment to accept the substrate. Equipment instantiated substrate ID is
required by this service. This service is only required when the equipment provides
capabilities for reading substrate identifiers.
UpdateSubstrateObject R Request to create a substrate object or to continue updating existent substrate object
attributes for the specified substrate identifier with the substrate information provided with
the service. If the substrate object was previously instantiated, the attribute(s) of the
substrate are updated as specified with this service. If transfer is not completed or substrate
is not at the equipment the service request fails. This service is used when substrates are
moved directly between linked equipment without the use of a carrier. This is an optional
service.
12.3 Substrate Tracking Service Parameter Dictionary
Table 10 Substrate Tracking Service Parameter
Dictionary Parameter Form Description
ErrorCode Enumerated Contains the code for the specific error found.
ErrorText Text Text in support of the error code.
STAcknowledge Enumerated Acknowledge of request.
Status A list of ErrorCode/ErrorText pairs Report any errors found.
STStatus A structure consisting of STAcknowledge
and Status
Return information for a service.
SubstID Text Identifier of a substrate.
SubstLocID Text Identifier of substrate location.
SubProcState Enumerated Processing State of a substrate.
SubstState Enumerated Transport State of a substrate.
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Dictionary Parameter Form Description
(List of)
SubstrateObjectAttributes
List of structure:
Attribute name
Attribute Value
List of substrate attributes. Each substrate
attributes is an attribute name/value pair. The
UpdateSubstrateObject service requires some
substrate object attributes to be specified. For
example, SubstrateID, SubstType, and at least
one of the following must be included:
SubstState, SubstProcState. All other substrate
object properties are optional as is in the case of
LotID, SubstSource, SubstUsage, SubstHistory,
etc. Supplier may define attributes to be
included in the service that are equipment
dependent as in the case of linked litho tools.
ObjSpec See SEMI E39. Specifier of the object owner.
ObjectActionStatus Structure
ServiceAcknowledge
Status
(List of)
ObjectActionParameterResult
List of structure:
Attribute name
Attribute Value
List of return parameters regarding the result of
the request as name/value pairs.
ObjectAction Text “UpdateSubstrateObject”
OperationID Unsigned Integer Identifies a specific request. See SEMI E39.
ObjectLinkID Unsigned Integer Set to non-zero if and only if additional
completion reports will be sent.
ServiceAcknowledge Enumerated 0 - Acknowledge performed successful
1 - Service does not exist
2 - Cannot perform now
3 - At least one parameter is invalid
4 - Service will be performed later with
notification
5 - Service is not completed or prohibited
6 - Not used
7-63 - Reserved
Status List of structure
Errorcode
Errortext
Table 11 Change Substrate State Message Pararmeter Table
Parameter Req/Ind Rsp/Conf Description
(list of) SubstID M =
(list of) SubstState C
(See NOTE 1.)
— The order of SubstStates corresponds to the order of SubstID list.
(list of) SubstProcState C
(See NOTE 1.)
— The order of SubstStates corresponds to the order of SubstID list.
Status — M Information about the results.
Table 12 UpdateSubstrateObject Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M — “UpdateSubstrateObject”
ObjSpec C — The object specifier of the object owner. See SEMI E39.