semi合集-English.pdf - 第3050页

SEMI E122.1-0703 © SEMI 2003 5 Service SECS-II Field Values Req. Descriptio n CPVAL 1 L, n 1. U4 2. U4 : n. U4 N Provides single execution override of test-sites enabled/disabled by remote commands ENABLE-SITE and DISABL…

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SEMI E122.1-0703 © SEMI 2003 4
Service SECS-II Field Values Req. Description
CPVAL
4
L, c
1. L, 3
1. U4
2. U4
3. U4
…
c. L, 3
1. U4
2. U4
3. U4
N Specifies datalog options for specific test ids.
L, c (c = # of (TestId, TestStatus) pairs being
assigned reports.)
1. L, 3
1. TestID
1
2. TestStatus
1
3. ReportID
1
…
c. L, 3
1. TestID
c
2. TestStatus
c
3. ReportID
c
CPNAME
5
“DATALOGOPTION” N DATALOGOPTION parameter.
CPVAL
5
U4 N Turns datalog on/off.
(0:No Log, 1:Log Pass, 2:Log Failures, 3: Log
All)
RCMD “DISABLE-SITE” Y
CPNAME
1
“DISABLESITELIST” Y DISABLESITELIST parameter.
DISABLE-SITE
CPVAL
1
L, n (n = # of sites selected)
1. U4
2. U4
:
n. U4
Y Sites value. List of test sites to disable. Zero-
length list indicates all sites.
L, n (n = number of sites selected.)
1. ID of 1
st
site
2. ID of 2
nd
site
…
n. ID of nth site
RMCD “ENABLE-SITE” Y
CPNAME
1
“ENABLESITELIST” Y ENABLESITELIST parameter.
ENABLE-SITE
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
Y Sites value. List of sites to enable. Zero-
length list indicates all sites.
PAUSE RCMD “PAUSE” Y
RCMD “PP-SELECT” Y
CPNAME
1
“PPID” Y PROCESSPROGRAMID parameter.
CPVAL
1
A[80] Y The ID of the program to be loaded.
CPNAME
2
“DEFINEDSITELIST” N DEFINEDSITELIST parameter.
CPVAL
2
U4 N DefinedSiteList value. Establish the initial
default set of test-sites.
CPNAME
3
“PROCESSPARAMETER” N PROCESSPARAMETER parameter.
PP-SELECT
CPVAL
3
A[1..40] N ProcessParameter value. This is an optional
parameter that has implementation specific
meanings.
RCMD “RESUME” Y
CPNAME
3
“PROCESSPARAMETER” N PROCESSPARAMETER parameter.
RESUME
CPVAL
3
A[1..40] N ProcessParameter value. This is an optional
parameter that has implementation specific
meanings.
RCMD “START” Y START
CPNAME
1
“SELECTEDSITELIST” N SELECTEDSITELIST parameter.
SEMI E122.1-0703 © SEMI 2003 5
Service SECS-II Field Values Req. Description
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
N Provides single execution override of test-sites
enabled/disabled by remote commands
ENABLE-SITE and DISABLE-SITE.
CPNAME
2
“DATALOGDATASETS” N DATALOGDATASETS parameter.
CPVAL
2
L, n (n - # of datasets)
1. L, 2
1. A[80]
2. List, p
1. U4
…
p. U4
n. L, 2
1. A[80]
2. L, q
1. U4
…
q. U4
N Datalog output can be directed to separate
datasets on a per-test-site basis.
L, n (n - # of datasets)
1. L, 2
1. Dataset Name
1
2. L, p (Zero-length list = all test-sites)
1. SiteID
11
…
p. SiteID
1p
n. L, 2
1. Dataset Name
n
2. L, q (Zero-length list = all test-sites)
1. SiteID
n1
…
q. SiteID
nq
CPNAME
3
“DATALOGBYTESTTYPE” N DATALOGBYTESTTYPE parameter.
CPVAL
3
L, b
1. L, 3
1. U4
2. U4
3. U4
…
b. L, 3
1. U4
2. U4
3. U4
N Specifies datalog options by general TestType.
L, b (b = # of (TestType, TestStatus) pairs
being assigned reports.)
1. L, 3
1. TestType
1
2. TestStatus
1
3. ReportID
1
(If omitted, the default report
is assigned.)
…
b. L, 3
1. TestType
b
2. TestStatus
b
3. ReportID
b
CPNAME
4
“DATALOGBYTESTID” N
SEMI E122.1-0703 © SEMI 2003 6
Service SECS-II Field Values Req. Description
CPVAL
4
L, c
1. L, 3
1. U4
2. U4
3. U4
…
c. L, 3
1. U4
2. U4
3. U4
N Specifies datalog options for specific test ids.
L, c (c = # of (TestId, TestStatus) pairs being
assigned reports.)
1. L, 3
1. TestID
1
2. TestStatus
1
3. ReportID
1
…
c. L, 3
1. TestID
c
2. TestStatus
c
3. ReportID
c
CPNAME
5
“DATALOGOPTION” N DATALOGOPTION parameter.
CPVAL
5
U4 N Turns datalog on/off.
(0:No Log, 1:Log Pass, 2:Log Failures, 3: Log
All)
CPNAME
6
“DATALOGPLANNAME” N DATALOGPLANNAME parameter.
CPVAL
6
A[80] N Turns on datalogging according to a
predefined plan. This parameter overrides all
other individual datalog setting options in a
START command.
START-EXEC RCMD “START-EXEC” Y
STOP RCMD “STOP” Y
STOP-EXEC RCMD “STOP-EXEC” Y
6 Variable Data Item Mapping
6.1 The purpose of this section is to define the list of variable items required by the TSEM. Values of these
variables will be available to the host through collection event reports and host status queries.
6.2 Requirements
6.2.1 All generic variable items defined in SEMI E30 are required by all TSEM equipment.
6.2.2 Any supplier-defined variables shall be documented in the same format used by this document. The following
minimum information is required:
<variable name> Class: <ECV, SV, or DVVAL> Format: <SML>
Description: <If class = DVVAL, description must contain statement of when data is valid.>
<If format = ASCII, then a length is required. It is assumed to be left-justified unless otherwise noted.>
6.3 Data Types
6.3.1 Equipment Constants (ECVs) can be changed by the host using S2,F15. The operator may be able to change
some values, but the equipment does not change the values on its own. The value of an equipment constant may be
queried by the host at any time, using the S2,F13/14 transaction. They reside in non-volatile memory of the
equipment. Equipment constants remain in effect until they are overwritten either by manual entry or by a S2,F15
(NEW EQUIPMENT CONSTANT SEND).
6.3.2 Equipment constants have various uses in TSEM, including the following:
• Equipment offsets that match the performance of several pieces of equipment that would otherwise perform
differently due to inherent manufacturing differences. Examples are home values and motion axis scaling
factors.