semi合集-English.pdf - 第2375页

SEMI E84-0305 © SEMI 1999, 2005 19 the load port with VS_0 and VS_1 signals and t he definition of ON/OFF of the L_REQ and U_REQ si gnals are different. L_REQ (P->A ) READY (P->A ) CS_0 (A->P ) CS_1 (A->P ) V…

SEMI E84-0305 © SEMI 1999, 2005 18

U_REQ

(P->A)

READY

(P->A)

HO_AVBL

(P->A)

VS_0 or 1

(P->A)

M_AVBL

(A->P)

TR_REQ

(A->P)

BUSY

(A->P)

COMPT

(A->P)

Vehicle

Arrival

Carrier is

Detected

Transfer is

Completed

Release

Vehicle

Transfer

Start

Vehicle

Arrival

report

Either VS_0

or VS_1

is on

TA2

TA3

TP2

TP3

TP4

step numbers

are for reference

only

Figure 15

Signal Time Diagram for Single Handoff (UNLOAD)

(Interbay Passive OHS only)

6.2.5 Simultaneous Handoff Sequence (loading)

6.2.5.1 This specification defines the capability to control simultaneous handoff. Simultaneous handoff is the

handoff operation in which active equipment transfers two carriers to two load ports simultaneously in a single

transfer operation. Some types of AMHS equipment are able to transfer two carriers simultaneously in a transfer

operation. The capability can be applied to increase the performance of the transfer. For example, simultaneous

handoff can be applied to single arm/double hand AMHS equipment capable of transferring two carriers in a single

transfer operation.

6.2.5.2 The time diagram of simultaneous handoff is shown in Figure 16. The figure shows only the load operation;

however, L_REQ may be changed to U_REQ for the unload operation. The sequence of the simultaneous handoff is

the same as that of the single handoff except that the specification of the load port with CS_0 and CS_1 signals and

the definition of ON/OFF of the L_REQ and U_REQ signals are different. The following list describes the sequence

which is different from Figures 12 and 13:

1) The active equipment turns the signals CS_0 and CS_1 ON to inform the passive equipment it is simultaneous

handoff.

2) The active equipment turns the VALID signal ON after the transition of CS_0 and CS_1 is effective.

3) The passive equipment turns the L_REQ (U_REQ) signal ON when both carriers in the specified load ports

(load ports of both CS_0 and CS_1) are ready to be loaded (unloaded).

When both carriers are detected (removed) at the two load ports, the L_REQ (U_REQ) signal is turned OFF.

6.2.5.3 This specification defines the capability to control simultaneous handoff. Simultaneous handoff is the

handoff operation in which active equipment transfers two carriers to two load ports simultaneously in a single

transfer operation. Some types of interbay AMHS equipment (i.e. stockers) are able to transfer two carriers

simultaneously in a transfer operation. The capability can be applied to increase the performance of the transfer. For

example, simultaneous handoff can be applied to single arm/double hand AMHS equipment capable of transferring

two carriers in a single transfer operation.

6.2.5.3.1 The time diagram of simultaneous interbay handoff using a passive OHS vehicle is shown in Figure 15.

The figure shows only the load operation, however L_REQ may be changed to U_REQ for the unload operation.

The sequence of the simultaneous handoff is the same as that of the single handoff except that the specification of

SEMI E84-0305 © SEMI 1999, 2005 19

the load port with VS_0 and VS_1 signals and the definition of ON/OFF of the L_REQ and U_REQ signals are

different.

L_REQ

(P->A)

READY

(P->A)

CS_0

(A->P)

CS_1

(A->P)

VALID

(A->P)

TR_REQ

(A->P)

BUSY

(A->P)

COMPT

(A->P)

HO_AVBL

(P->A)

CS is

Specified

Carrier is

Detected

Transfer is

Completed

Release

CS is

Specified

Transfer

Start

CONT

(A->P)

TP1

TA1

TA2

TP2

TP4

TA3

TP5

TP3

TD0

step numbers

are for

reference

onl

Figure 16

Signal Time Diagram for Simultaneous Handoff (LOAD)

L_REQ

(P->A)

READY

(P->A)

HO_AVBL

(P->A)

VS_0 and 1

(P->A)

M_AVBL

(A->P)

TR_REQ

(A->P)

BUSY

(A->P)

COMPT

(A->P)

Vehicle

Arrival

Carrier is

Detected

Transfer is

Completed

Release

Vehicle

Transfer

Start

Vehicle

Arrival

report

Both VS_0

and VS_1

are on

TA2

TA3

TP2

TP3

TP4

step numbers

are for

reference

only

Figure 17

Signal Time Diagram for Interbay Simultaneous Handoff (LOAD) using a Passive OHS Vehicle

SEMI E84-0305 © SEMI 1999, 2005 20

6.2.6 Continuous Handoff Sequence

6.2.6.1 This specification defines the capability to control continuous handoff. Continuous handoff is the handoff

operation in which the active equipment transfers two or more carriers sequentially and continuously in a carrier

transfer operation. Some types of AMHS equipment are able to handoff more than two carriers in a transfer

operation. This capability can be applied to increase the performance of the transfer.

6.2.6.2 When the passive equipment has a door in front of the load port, the door on passive equipment must be

opened before the carrier handoff starts by the active equipment. It is redundant to open and close the door for a

carrier handoff when two or more carriers are transferred. Therefore, the door shall be kept open during the carrier

transfer operation. Continuous handoff is applied to the transfer operation to avoid redundant operations.

6.2.6.3

Continuous handoff sequence for handoffs at a load port (Unload -> Load): The example time diagram for

continuous handoff is shown in Figure 18. This example shows the sequence of unload and load operations

performed continuously at the load port. Each sequence in the continuous handoff is the combination of the single

handoff sequence. In addition, the CONT signal is used to indicate a continuous handoff. In the sequence shown in

Figure 10, the carrier on the load port is unloaded first, and a new carrier is loaded on the load port. The CONT

signal is turned ON at the time of active equipment BUSY ON of the first handoff to indicate that the handoff is

continuous. In successive load sequences, the same load port number (CS_0 in this example) is specified to use the

same load port. In this example, there are no more carriers that are to be transferred after the second load sequence,

therefore the active equipment turns the CONT signal OFF when the BUSY signal is turned ON in the second

handoff to indicate the continuous handoff is complete.

6.2.6.4

Continuous handoff sequence for handoffs at different load ports (Load -> Load): The example time

diagram for continuous handoff on the different load ports is shown in Figure 19. In this example, the active

equipment first transfers a carrier to the load port corresponding to CS_0, then another carrier is transferred to the

load port corresponding to CS_1. In this example, the sequence is the same as that of the continuous handoff

(handoff at a load port: Unload -> Load) shown in section above except for the specification of the load ports.

L_REQ

(P->A)

READY

(P->A)

HO_AVBL

(P->A)

CS_0

(A->P)

CS_1

(A->P)

VALID

(A->P)

TR_REQ

(A->P)

BUSY

(A->P)

COMPT

(A->P)

CS is

Specified

Carrier is

Detected

Transfer is

Completed

Release CS

is Specified

Transfer

Start

U_REQ

(P->A)

CONT

(A->P)

CS is

Specified

Carrier is

Detected

Transfer is

Com

leted

Release CS

is Specified

Transfer

Start

TD0

TA1

TA2

TA3

TP1TP1

TP2TP2

TP3TP3

TP4

TP5 TP5

step numbers

are for

reference only

TP6 / TD1

Figure 18

Signal Time Diagram for Continuous Handoff (UNLOAD and LOAD)