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SEMI F12-0998 © SEMI 199 3, 1998 4 A P PENDIX 1 NOT E: This a ppendix w as approve d as a n off icial part of SEMI F12 by full letter ballot procedure. Table 1 Nitrogen Press ure for Each Test Temperature Tube Size (Diam…

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SEMI F12-0998 © SEMI 1993, 19983
9.3 Submerge each test specimen as shown in Figure
2, and subject it to the specified pressure for the 23°C
(73°F) column based on tube size as shown in Table 1.
(See Appendix 1.) Observe the fitting connection for
leakage for a minimum of one minute. Record the
leakage results in the Proof Test area of the Test Data
Sheet. (See Related Information 1.) This is a proof test
to determine the integrity of the fitting connection
before it is subjected to a heat cycle.
9.3.1 If excessive leakage (more than can be humanly
counted) occurs, stop the test, and record as excessive
leakage on the Test Data Sheet. (See Related
Information 1.)
9.4 Condition the specimens to 75°C (167°F) by
placing the specimens into the oven (see Figure 1)
while subjecting them to the specified pressure for that
temperature and tube size as shown in Table 1. (See
Appendix 1.)
NOTE: More than one specimen may be conditioned
simultaneously. Only fittings with the same test pressure and
temperature should be conditioned simultaneously. Specimens
must be leak tested individually.
9.4.1 The specimens shall remain in the oven 15
minutes after it has stabilized to the specified
temperature.
9.4.2 Release nitrogen pressure from the specimens,
remove from the oven, and allow to cool to room
temperature 23° ± 2.8°C (73° ± 5°F). Do not disturb the
specimens while cooling.
9.4.3 After the temperature of the specimens has
reached room temperature, allow the specimens to
remain undisturbed for 15 additional minutes before
leak testing.
9.5 Submerge each specimen as shown in Figure 2,
and pressurize to the specified pressure for the 23°C
(73°F) temperature. Observe the fitting connection for
leakage for a minimum of one minute.
9.6 Release the pressure in the specimen, and record
the results on the Test Data Sheet. (See Related
Information 1.)
NOTE: The release of pressure from the specimen when
removing from the oven and from the submersion tank is for
safety reasons, and compliance is strongly recommended.
9.6.1 Unit of measure for leakage is the number of
nitrogen bubbles per minute.
9.6.2 Leakage from the seal cap is beyond the scope of
this document and is not required to be measured or
recorded.
9.7 After completion of leakage measurement, repeat
Sections 9.4 through 9.6 ten times (cycles) at the same
pressure and temperature level with the same
specimens.
9.7.1 If excessive leakage (more than can be humanly
counted) occurs, stop the test, and record as excessive
leakage on the Test Data Sheet. (See Related
Information 1.)
9.8 After completion of ten cycles, repeat the test with
new specimens starting at Section 9.2, but substituting
for the temperature in Section 9.4, 100°C (212°F) and
125°C (257°F) as shown in Table 1. (See Appendix 1.)
10 Data Accuracy
10.1 Pressure — ± 2%
10.2 Temperature — ± 1°C (± 2°F)
11 Test Data Sheet
The test data sheet shall include the following
information:
11.1 Date tested.
11.2 Operator and test facility.
11.3 Description of items tested, including:
Tubing — Manufacturer, O.D., wall thickness, part
number, and material.
Fitting — Manufacturer, type, size, part number, and
material.
11.4 All of the data described in Section 9.
NOTE: A sample test data sheet is included as Related
Information 1.
SEMI F12-0998 © SEMI 1993, 1998 4
APPENDIX 1
NOTE: This appendix was approved as an official part of SEMI F12 by full letter ballot procedure.
Table 1 Nitrogen Pressure for Each Test Temperature
Tube Size
(Diameter × Thickness in
mm (in) Test Temperature: °C (°F)
23 (73) 75 (167) 100 (212) 125 (257)
Test: Pressure kPa (psi)
Ø3 × 0.5 (0.020 in) 570 (82) 320 (46) 230 (33) 200 (29)
Ø 3.18 (1/8 in) × 5 540 (78) 320 (46) 230 (33) 200 (29)
Ø 4 × 0.5 420 (60) 240 (35) 170 (25) 140 (20)
Ø 6 × 1 570 (82) 320 (46) 230 (33) 200 (29)
Ø 6.35 (1/4 in) × 0.5 270 (39) 150 (22) 110 (16) 90 (13)
Ø 6.35 (1/4 in) × 1.2
(0.050 in)
650 (94) 370 (54) 260 (38) 220 (32)
Ø8 × 1 430 (62) 240 (35) 170 (25) 140 (20)
Ø8 × 1.2 510 (73) 290 (42) 210 (30) 170 (25)
Ø8.53 (3/8 in) × 0.8
(0.031 in)
320 (46) 200 (29) 150 (22) 120 (17)
Ø8.53 (3/8 in) × 1.6
(0.063 in)
650 (94) 320 (46) 230 (33) 200 (29)
Ø10 × 1 340 (49) 190 (28) 140 (20) 120 (17)
Ø10 × 1.6 530 (79) 320 (46) 230 (33) 200 (29)
Ø12 × 1 280 (40) 180 (26) 120 (17) 100 (15)
Ø12 × 1.6 460 (66) 260 (38) 190 (28) 160 (23)
Ø12.7 (1/2 in) × 1.6 520 (75) 250 (36) 180 (26) 150 (22)
Ø19.06 (3/4 in) × 1.6 290 (42) 160 (23) 120 (17) 100 (15)
Ø25 × 1.5 210 (30) 120 (17) 80 (12) 70 (10)
Ø25 × 2 270 (39) 160 (23) 120 (17) 100 (15)
Ø25.4 (1 in) × 1.6 210 (30) 120 (17) 80 (12) 70 (10)
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
SEMI F12-0998 © SEMI 1993, 19985
RELATED INFORMATION 1
SAMPLE TEST DATA SHEET
NOTE: This related information is not an official part of SEMI F12 and is not intended to modify or supercede the official test
method. It has been derived from industry specifications. Publication was authorized by full letter ballot procedures.
Determination of the suitability of the material is solely the responsibility of the user.
Test Date: Operator: Test Facility:
Tube Manufacturer: Fitting Manufacturer:
Tube O.D.: Fitting Type:
Tube Wall Thickness: Fitting Size:
Tube P/N: Fitting P/N:
Tube Material: Fitting Material:
Amount of Leakage: Bubbles per Minute
Test Temperature 75°C 100°C 125°C
Test Sample 123123123
Proof Test
Heat Cycle xxxx xxx xxxx xxx xxxx xxx xxxx xxx xxxx
1st time
2nd time
3rd time
4th time
5th time
6th time
7th time
8th time
9th time
10th time
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
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