semi合集-English.pdf - 第825页

SEMI E112-0305 © SEMI 2001, 2005 7       RFID PLACEM ENT ZONE Figure 3 External Rear View of M RSP150          Figure 4 Internal Front View of MRSP150

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SEMI E112-0305 © SEMI 2001, 2005 6
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RFID PLACEMENT ZONE
Figure 1
External Top View of MRSP150
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Figure 2
Detail A: External Top View of Side Handling Flange Alignment Notch
SEMI E112-0305 © SEMI 2001, 2005 7
RFID PLACEMENT ZONE
Figure 3
External Rear View of MRSP150
Figure 4
Internal Front View of MRSP150
SEMI E112-0305 © SEMI 2001, 2005 8
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature
1.5
Figure 6
Detail C: Reticle Seating and Capture Detail