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SEMI E121-0305 © SEMI 2003, 2005 2 4 Referenced Standards 4.1 Other References 4.1.1 Extensible Ma rkup Language (XML) 1.0 ( S econd Editi on) — W3C Recomm endation, 6 October 2000 (http://www.w3.org/TR/2000/REC-xml-2000…

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SEMI E121-0305 © SEMI 2003, 2005 1
SEMI E121-0305
GUIDE FOR STYLE & USAGE OF XML FOR SEMICONDUCTOR
MANUFACTURING APPLICATIONS
This guide was technically approved by the Global Information and Control Committee and is the direct
responsibility of the North American Information and Control Committee. Current edition approved by the
North American Regional Standards Committee on November 4, 2004 and December 10, 2004. Initially
available at www.semi.org February 2005; to be published March 2005. Originally published March 2003;
last published March 2004.
1 Purpose
1.1 The inclusion of XML (Extensible Markup Language) notation within current SEMI standards reflects the
industry’s growing interest in XML technology. This guide is the first step to prepare for XML protocols in SEMI
standards and to establish consistency in XML style and usage. Recommendations given in this document are
intended for the definition and conformance of XML based standards. This document also attempts to highlight
those areas where standardization and further work may be required.
2 Scope
2.1 This guide is intended to promote interoperable application of XML in a variety of semiconductor
manufacturing usage contexts. It addresses an approach for the usage and definition of XML specifications within
the semiconductor industry with the focus on the use of XML in future SEMI standards. These guidelines should be
applied to any XML document or schema generated as part of a SEMI standard for communication between
software entities. This guide includes the following:
2.1.1 Overview of XML Resources, Organizations, and Standards,
2.1.2 XML Three Tier Model Architecture, and
2.1.3 General and specific recommendations of XML style and usage.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Because of the rapid development of new standards in the XML arena at the time of the writing of this
document, it was found that there are areas in XML where standards are still in the development stage. Some
examples of emerging XML technologies are: XMI (XML Metadata Interchange), SOAP (Simple Object Access
Protocol), and Web Services Routing. Therefore, this guide does not include recommendations in those areas until
the governing bodies approve these specifications. A list of some of the areas where guidance may be necessary is
provided below:
3.1.1 (UML) (Unified Modeling Language) models with derived schema definition
3.1.2 XMI (XML Metadata Interchange) usage and recommendations
3.1.3 XML Namespace definitions
3.1.4 XSLT (Extensible Stylesheet Language Transformations) usage and conversion rules
3.1.5 WSDL (Web Service Definition Language) usage and recommendations
3.1.6 SOAP (Simple Object Access Protocol) and transport recommendations
SEMI E121-0305 © SEMI 2003, 2005 2
4 Referenced Standards
4.1 Other References
4.1.1 Extensible Markup Language (XML) 1.0 (Second Edition) — W3C Recommendation, 6 October 2000
(http://www.w3.org/TR/2000/REC-xml-20001006/)
4.1.2 XML Schema Part 1: Structures — W3C Recommendation, 2 May 2001 (http://www/w3/org/TR/xmlschema-
1/)
4.1.3 XML Schema Part 2: Datatypes — W3C Recommendation, 2 May 2001 (http://www/w3/org/TR/xmlschema-
2/)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 DTD — Document Type Definition
5.1.2 HTTP — Hypertext Transfer Protocol
5.1.3 SGML — Standard Generalized Markup Language
5.1.4 SOAP — Simple Object Access Protocol
5.1.5 W3C — World Wide Web Consortium
5.1.6 WSDL — Web Services Definition Language
5.1.7 WWW — World Wide Web
5.1.8 XMI — XML Metadata Interchange
5.1.9 XML — Extensible Markup Language
5.1.10 XPATH — XML Path Language
5.1.11 XSL — Extensible Stylesheet Language
5.1.12 XSLT — Extensible Stylesheet Language Transformations
6 Overview of XML Resources, Organizations, and Standards
6.1 There are a large number of resources in the area of XML. Most of the information is readily available from
organizations such as OMG, W3C, RosettaNet, ebXML, OASIS, Sun Micro Systems, IBM and other through their
web sites. There has been an extensive amount work in standardizing dictionaries and vocabularies for several
industries. These documents can be used until further standards and guides specific to this industry are created.
6.2 Resources
6.2.1 Extensible Markup Language (XML) 1.0 (Second Edition) — W3C, 6 October 2000
(http://www.w3.org/TR/2000/REC-xml-20001006/)
6.2.2 Namespaces in XML —
W3C, 14 January 1999 (http://www.w3.org/TR/1999/REC-xml-names-19990114/)
6.2.3 XML Schema Part 0: Primer — W3C, 2 May 2001 (http://www/w3/org/TR/xmlschema-0/)
6.2.4 XML Schema Part 1: Structures — W3C, 2 May 2001 (http://www/w3/org/TR/xmlschema-1/)
6.2.5 XML Schema Part 2: Datatypes — W3C, 2 May 2001 (http://www/w3/org/TR/xmlschema-2/)
6.2.6 XML Path Language (Xpath) — W3C, 16 November 1999 (http://www/w3/org/TR/xpath/)
6.2.7 RFC 2396 Uniform Resource Identifiers (URI): Generic Syntax. T. Berners-Lee, R. Fielding, L. Masinter.
August 1998.
6.2.8 Hyper Text Transfer Protocol 1.1 (HTTP, http://www.w3.org/Protocols/rfc2616/rfc2616.html)
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6.2.9 Simple Object Access Protocol 1.1 — W3C Note, 8 May 2000 (SOAP, http://www.w3.org/TR/SOAP)
6.2.10 Web Service Definition Language 1.1 — W3C Note, 15 March 2001 (WSDL, http://www.w3.org/TR/wsdl)
6.2.11 ISO/IEC 11179 (1-6) Information Technology — Standardization and Specification of Data Elements
7 XML Three Tier Model Architecture
7.1 The following three-tier schema model is recommended:
Primary Schemas (common SEMI models)
Secondary Schemas (individual SEMI models)
Tertiary Schemas (non SEMI models)
7.1.1 Primary Schemas — Primary Schemas are schemas that have been defined by SEMI. These schemas usually
cover a particular area such as equipment, transport system, scheduler/dispatcher, maintenance, etc.
7.1.2 Secondary Schemas — Secondary Schemas are schemas that have been defined by SEMI. These schemas are
for a particular functionality required by the application such as carrier management, process job, data collection,
etc. Secondary Schemas may derive from Primary Schemas as a base by extension or restriction.
7.1.3 Tertiary Schemas — Tertiary Schemas are defined by the supplier of the tool or application. These Schemas
may derive from either Primary or Secondary Schemas as a base by extension or restriction.
8 XML Recommendations
8.1 XML Document Compliance
8.1.1 All XML documents, by definition, must comply with the W3C Recommendation, XML version 1.0 (see
http://www.w3.org/TR/REC-xml for more detail on the specification). The purpose of this compliance is to assure
that all XML documents are “well-formed” and “valid”. A “well-formed” document means that there is exactly one
root element, all sub-elements (and recursive sub-elements) have delimiting start- and end-tags, and that they are
properly nested within each other. A “well-formed” document also conforms to the XML syntax specification and
does not include external references unless a schema reference is provided. An XML document is “valid” if it has
an associated schema and complies with the constraints expressed in the schema. “Valid” XML data is also “well-
formed”.
8.2 Use of XML Schema versus DTD
8.2.1 All XML documents should conform to a specified set of production rules. These production rules should be
specified as XML Schemas. XML Schemas are the preferable way to define XML documents. XML Schemas are
modular in structure and can be built from multiple components (files) by including or importing the components.
8.3 Using Elements versus Attributes
8.3.1 When defining attributes from an object model, it is preferable to define them as XML elements such that they
can be easily extended by other applications.
8.3.2 Use elements if the information is hierarchical, contains a content model, or could potentially become more
complex or hierarchical in the future.
8.3.3 Use attributes when the information is metadata about the element.
8.4 Naming Conventions
8.4.1
The following list is a compendium of recommended practices to be used when naming attributes and simple
or complex elements.
8.4.1.1 Use the UpperCamelCase convention for elements and the lowerCamelCase convention for attributes.
8.4.1.2 Do not use any punctuation in the element name; i.e. underscores, dashes, etc. Use only alphanumeric
characters.