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SEMI S14-0704 © SEMI 2000, 2004 11 RELATED INFORMATION 1 TEST PROTOCOL FOR WET BENCH MATERIALS PROCESS COMPATIBILITY NOTICE : This related information is not an official part of SEMI S14 and is not intended to modi fy or…

SEMI S14-0704 © SEMI 2000, 2004 10

APPENDIX 2

ASSESSMENT OF THE FIRE PROPERTIES OF MATERIALS

NOTICE: The material in this appendix is an official part of SEMI S14 and was approved by full letter ballot procedures on

September 3, 1999 by the North American Regional Standards Committee.

A2-1 This Appendix describes the qualitative criteria

for evaluating some of the relevant fire properties of

materials. It also provides references to several

standards which may be used in these evaluations.

Each of the standards listed defines test methods and

provides quantitative criteria for consideration.

A2-2 Preferable Materials:

A2-2.1 Require higher heat fluxes to be ignited.

A2-2.2 Once ignited may burn locally in the ignition

area, but they will not propagate a fire beyond the

ignition zone.

A2-2.3 Generate lower quantities of smoke and

corrosive products or generate smoke and corrosive

products that are less damaging.

A2-3 The following standards provide means of

assessing the fire properties of materials. Each of these

standards specifies the types of materials and uses of

materials to which it applies and the fire properties that

its application assesses. Therefore, each must not be

used outside of the scope for which it was written. It

may be appropriate to use different standards for

assessing the materials used in different components in

the equipment.

NOTE A2-1: There are many other standard methods

available for characterizing the fire properties of materials and

it is not the intent of the document to exclude methods other

than those listed here, as long as the methods are applied

appropriately.

A2-3.1 Factory Mutual Research Corp.

Standard 4910,

Clean Room Materials Flammability Test Protocol

A2-3.2 Underwriters Laboratory Standard 94, Tests for

Flammability of Plastic Materials for Parts in Devices

and Appliances

A2-3.3 Underwriters Laboratories Standard 746A,

Polymeric Materials - Short Term Property Evaluations

A2-3.4 Underwriters Laboratories Standard 746B,

Polymeric Materials - Long Term Property Evaluations

A2-3.5 Underwriters Laboratories Standard 746C,

Polymeric Materials - Use in Electrical Equipment

Evaluations

A2-3.6 Underwriters Laboratories Standard 900,

Standard for Safety for Air Filter Units

A2-3.7 Underwriters Laboratories Standard 2360,

Standard for Test Methods for Determining the

Combustability Characteristics of Plastics Used in

Semiconductor Tool Construction

NOTE A2-2: Although the list includes, for some materials,

more than one document that could be applied, the intent is to

provide alternatives, not to suggest that testing to more than

one standard be performed.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the guideline set

forth herein for any particular application. The

determination of the suitability of the guideline is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. This

guideline is subject to change without notice.

The user’s attention is called to the possibility that

compliance with this guideline may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this guideline, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this guideline. Users of this guideline

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

SEMI S14-0704 © SEMI 2000, 2004 11

RELATED INFORMATION 1

TEST PROTOCOL FOR WET BENCH MATERIALS PROCESS

COMPATIBILITY

NOTICE: This related information is not an official part of SEMI S14 and is not intended to modify or supersede the official

guideline. It has been derived from the cited work. Publication is authorized by vote of the responsible committee. Determination

of the suitability of this material is solely the responsibility of the user.

R1-1 SEMATECH has published the results of a study

on testing of polymeric materials for use in wet

benches. The Abstract and citation are provided as

Related Information 1 to SEMI S14, Safety Guidelines

for Fire Risk Assessment and Mitigation for

Semiconductor Manufacturing Equipment as the

responsible committee believes the information in this

document may be of use in identifying materials that

are appropriate for the described applications and

consistent with appropriate management of fire risks.

R1-2 The report, SEMATECH Document ID #:

98123623A-ENG, entitled Process Compatibility

Parameters for Wet Bench Plastic Materials, was

written by Archibald Tewarson, Avtar S. Jassal, Latif

Ahmed, and Mark Camenzind and published 30

December 1998.

R1-3 SEMATECH retains the copyright to the

document, but has granted SEMI permission to include

the Abstract and citation in this Safety Guideline. The

complete document (90 pages) is available from

SEMATECH' s web site:

http://www.sematech.org/public/docubase/abstract/tech

-5.htm.

R1-4 Abstract

R1-4.1 This report presents a test protocol of accepted

analytical procedures to determine the process

compatibility parameters for commonly used wet bench

plastic materials (PP, FRPP, and PVC) and proposed

plastic materials (CPVC, ECTFE, and PVDF) that may

be used for wet bench construction. Three industry

standard test methods were used to determine the

outgassing, leaching, and extraction parameters, defined

in combination as the process compatibility parameters.

To supplement them, the presence of critical elements

at the surface of the materials and the condition of the

surface were examined before and after exposure to

water and chemicals. Changes in the mass of plastic

materials as a result of outgassing, leaching, and

extraction were also used to supplement the parameters.

The report includes details of the test procedures, data

analysis, surface topography of the plastic materials,

before and after exposure to water and chemicals, and

discussion of the results.

SEMI S14-0704 © SEMI 2000, 2004 12

RELATED INFORMATION 2

SMOKE MANAGEMENT IN CLEANROOMS

NOTICE: This related information is not an official part of SEMI S14 and was derived from the work of a member

of the Fire Protection Task Force of the North American Environmental, Health, and Safety Committee. This

related information was approved for publication by 2/3 committee vote on July 17, 2003.

R2-1 Introduction

R2-1.1 Semiconductor cleanrooms are operationally

sensitive to products of a fire. A fire will result in

smoke and corrosive particle contamination to the

cleanroom, process equipment, and work in process. A

properly designed, installed, and maintained smoke

detection and control system will not prevent

contamination, but will limit the spread and

concentration of the contaminant. The basis of the

smoke control system design should be aligned with the

organization’s risk management objectives.

R2-1.2 This Related Information deals with smoke

management systems for cleanrooms themselves, not

for equipment. Smoke removal from a cleanroom may

be performed by ventilation systems that are in place

for other purposes (e.g., process exhaust systems of

equipment) or by equipment designed and installed

specifically to remove smoke from the room. These

may both be parts of the protection for a cleanroom and

may differ in how they are activated.

R2-2 Actuation

R2-2.1 Automatic actuation of dedicated smoke control

systems is preferable; however, many facilities prefer

manual activation. If the system is manually activated,

the following should be done.

R2-2.1.1 The smoke detection system should be

monitored by qualified personnel 24 hours per day.

R2-2.1.2 Emergency response teams (ERT) or other

personnel authorized to actuate the manual smoke

control system should be capable of prompt

notification.

R2-2.1.3 Detailed smoke control emergency

procedures should be documented and practiced. These

procedures can include hazardous gas shutdowns and

shutdowns of appropriate air recirculation fans as well

as activating the smoke control exhaust fans.

R2-2.2 A secondary means of manual actuation of the

smoke/contaminant control system should be provided

in a clearly marked and accessible area outside the

cleanroom.

R2-3 Capacity

R2-3.1 The smoke control system capacity needed is

directly related to the design fire size which depends

upon the type, amount and arrangement of combustible

materials in the cleanroom. In order to achieve a

system that is economically feasible, the maximum

design fire size should be limited to the fire size at

sprinkler operation. For a typical cleanroom

configuration, the fire size at sprinkler operation is in

the range of 600 to 800 kilowatts.

R2-3.2 Smoke removal system capacity can be

designed based on an integrated system approach. The

total capacity can include the fume exhaust system

capacity and dedicated smoke removal system capacity.

R2-4 Design Considerations

R2-4.1 When the fume exhaust system is used for

smoke removal, the following design parameters should

be followed.

R2-4.1.1 The fume exhaust system ductwork should be

of non-combustible construction or should be

listed/approved for smoke removal and not incorporate

the use of fire dampers or interrupters.

R2-4.1.2 It should be confirmed that sufficient fume

exhaust system intake points exist throughout the clean

room. If not, additional intake points should be

provided and incorporate the use of normally closed

dampers. These dampers should be opened either

automatically by activation of the smoke detection

system or by manual means.

R2-4.1.3 When the fume exhaust system is used for

smoke removal, it can incorporate the use of variable

speed fan(s). During the smoke removal mode, fire

dampers on supplemental intake points will open and

the fan speed will be increased. The design capture

velocity at the tool(s) could be affected, and this should

be reviewed. Necessary balancing changes should be

made to ensure the design capture velocity is

maintained.

R2-4.2 The ventilation system make-up air fans should

be sized such that under full smoke and process

exhaust, the fabrication area maintains a positive

pressure relative the adjacent areas.