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SEMI E58-0703 © SEMI 1997, 2003 3 17.1.6 ARAMS State Model 17.1.7 ARAMS State Transi tion N otification 17.1.8 ARAMS Substate Codes 17.1.9 ARAMS Status Data 17.1.10 ARA MS Constant Data 17.1.11 ARAMS Event Report Data 17…

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SEMI E58-0703 © SEMI 1997, 2003
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10.4 ARAMS Symptom Table
11 ARAMS Data
11.2 Status Information
11.2.3 ARAMSInfo
11.2.4 ARAMSState
11.2.5 ARAMSText
11.2.6 Clock
11.2.7 CycleCtr
11.2.8 DowntimeAlarm
11.2.9 DowntimeAlarmText
11.2.10 DowntimeData
11.2.11 LastPowerdown
11.2.12 PowerdownTime
11.2.13 PrdState
11.2.14 PrevARAMSState
11.2.15 SymptomID
11.2.16 SymptomText
11.3 Constant Data
11.3.1 EqpModel
11.3.2 EqpSerialNum
11.4 User-Configurable Data
11.4.1 EngInterrupt (optional)
11.4.2 EngRecovery (optional)
11.4.3 EqpName (required)
11.4.4 PowerupState (optional)
11.4.5 PrdRecovery (optional)
11.4.6 SbyRecovery (optional)
11.4.7 SubstateSelect (optional)
11.5 Accumulators
11.5.2 ARAMSAccumReset
11.5.3 ARAMSTimestamp
11.5.4 EngTime
11.5.5 InterruptionPrd
11.5.6 InterruptionTotal
11.5.7 NSTime
11.5.8 PrdTime
11.5.9 SbyTime
11.5.10 SDTime
11.5.11 UDTime
12 Events and Pre-Defined Event Reports
13 Object Services Compliance
13.1 Equipment Object
13.2 Table Objects
14 Human Interface Requirements
14.1 Data Access
14.2 Selection of an ARAMS State/Substate
14.3 User-Defined ARAMS Symptom Tables
14.4 Table Access
14.5 Color Codes
15 Services
15.2 Services Parameter Dictionary
15.3 TableSend
15.4 TableRequest
15.5 ARAMSStateChange
15.6 ResetAccumulators
16 ARAMS Behavioral Requirements
16.1 ARAMS State Transitions
16.2 Powerup Entry
16.3 Powerup and Powerdown States
16.3.2 PowerupState
16.4 User-Initiated State Change Requests
16.5 Production and Standby Substates
16.6 Equipment-Selected Substates
16.7 Equipment-Detected Exceptions
16.7.4 Fault Detection in ENGINEERING
16.8 Equipment-Initiated Recovery
16.8.2 Automatic Recovery
17 Requirements for Compliance
17.1 Fundamental Requirements
17.1.1 Event Notification
17.1.2 Clock Services
17.1.3 Read-Only Data Access
17.1.4 User-Configurable Data Access
17.1.5 Alarm/Exception Management
SEMI E58-0703 © SEMI 1997, 2003 3
17.1.6 ARAMS State Model
17.1.7 ARAMS State Transition Notification
17.1.8 ARAMS Substate Codes
17.1.9 ARAMS Status Data
17.1.10 ARAMS Constant Data
17.1.11 ARAMS Event Report Data
17.1.12 Host State Change Request
17.1.13 Estimation of Powerdown Time
17.1.14 ARAMS Behavioral Requirements
17.2 Additional Capabilities
17.2.1 User-Configurable Powerup State
17.2.2 User-Configurable Fault Recovery to
Manufacturing
17.2.3 Accumulator Data
17.2.4 User-Generated ARAMS Substate
Table(s)
17.2.5 Equipment-Generated ARAMS
Substate Table(s)
17.2.6 User-Generated Symptom Table(s)
17.2.7 Human Interface Requirements
17.2.8 Equipment-Selected Substates
17.2.9 User-Configurable Fault Detection in
ENGINEERING
17.2.10 User-Configurable Fault Recovery to
ENGINEERING
17.2.11 Human Interface Requirements
17.3 Requirements for Compliance
18 ARAMS States for Multi-Module Equipment
Related Information 1
R1-1 Estimating Powerdown Time
R1-1.2 UpdatePeriod
R1-2 Powerup Scenario
R1-3 Equipment-Initiated Transition
R1-4 Operator-Initiated Transition
R1-5 Host-Initiated Transition
Related Information 2
R2-1 User-Initiated Transitions to
UNSCHEDULED DOWNTIME
SEMI E58-0703 © SEMI 1997, 2003
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SEMI E58-0703
AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY
STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on October 19, 2000. Initially available at www.semi.org
January 2001; to be published March 2001. Originally published June 1997.
NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of
SEMI E58.1.
1 Purpose
1.1 This document provides standards for
implementing and collecting SEMI E10 state changes at
the equipment level per SEMI E10.
1.1.1 SEMI E10 defines various terms and equipment
states but was not written specifically for application by
automated equipment. This document is intended to
provide a consistent interpretation of these equipment
states through formal state model methodology.
1.1.2 ARAMS defines concepts, behavior, and
message services to support the integration of
automated systems within a semiconductor factory.
1.1 Background and Motivations — To implement the
integration of SEMI E10 states on automated
equipment, integration of definitions and requirements
must be detailed and precise to ensure interpretations
are consistent across equipment suppliers. This
provides an opportunity to automatically retain
information at the equipment itself.
1.1.3 Both equipment supplier and equipment user
benefit from the automation of SEMI E10 data
collection at the equipment through application of a
consistent state model.
1.1.4 SEMI E10 defines specific states but does not
address transitions between states. The ARAMS
standard specifies the triggers for state transitions made
by automated equipment. Extensions to SEMI E10
described in this document apply to decisions made by
automated equipment only.
2 Scope
1.2 This standard is applicable to the following
relationships: traditional host/equipment,
operator/equipment, and cluster tool controller/attached
module. The scope of this document is to define
standards which facilitate equipment-level capture and
communication of SEMI E10 related data. Specifically,
this document provides the following:
• An equipment state model that defines the rules for
equipment state changes,
• A set of standard equipment codes for representing
substates of the six basic equipment states defined
in SEMI E10,
• Definition of equipment-generated data,
• Concepts and messages required to exchange
information, and
• Requirements for fundamental compliance to
ARAMS
• Additional optional specifications.
1.3 This standard is intended as a supplement to SEMI
E10 to be used for equipment support of SEMI E10.
Formal definitions of all terms common to both
documents are provided solely by SEMI E10.
1.4 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E10 — Standard for Definition and Measurement
of Equipment Reliability, Availability, and
Maintainability (RAM)
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E38 — Cluster Tool Module Communications
(CTMC)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts,
Behavior, and Message Services
SEMI E53 — Event Reporting