semi合集-English.pdf - 第744页
SEMI E100-1104 © SEMI 2000, 2004 7 y1 2 9 75.5 Figure 6 Door Only Top View of 230 mm RSP Figure 7 Section A-A: Internal Fr on t View of 6 inch RSP
SEMI E100-1104 © SEMI 2000, 2003 6
Figure 3
External Front View of 230 mm and 6 inch RSP
Figure 4
Section A-A: Internal Front View of 230 mm RSP
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature
SEMI E100-1104 © SEMI 2000, 2004 7
y129 75.5
Figure 6
Door Only Top View of 230 mm RSP
Figure 7
Section A-A: Internal Front View of 6 inch RSP
SEMI E100-1104 © SEMI 2000, 2003 8
Figure 8
Door Only Top View of 6 inch RSP
Figure 9
Exterior Bottom View of 6 inch and 230 mm RSP