semi合集-English.pdf - 第419页
SEMI E56-1104 © SEMI 1996, 2004 8 Input % Set Point (sccm) Indicated Flow (sccm) Actual Flow (sccm) 70 80 90 100 90 80 70 60 50 40 30 20 10 5 Minimum #1 5 10 20 30 40 50 60 70 80 90 100 90 80 70 60 50 40 30 20 10 5 Minim…
SEMI E56-1104 © SEMI 1996, 2004 7
12.6.2 The reference operating conditions shall be as
follows if the downstream pressure is at vacuum:
Ambient temperature 23 ± 2°C
Gas temperature Same as actual ambient
Ambient pressure 101.32 kPa. (+ 4.7 or – 15.3 kPa)
Gas pressure P1, Inlet 172 ± 34 kPa
Gas pressure P3, Outlet < 0.13 kPa
Relative humidity 40% ± 10%, noncondensing
Magnetic field 50 µT
Electromagnetic field < 100 µ V/m
Vibration < 0.5 m/s
Shock 3 g
12.7 Power Supply Conditions
12.7.1 The reference power supply conditions used
shall be the reference values specified by the
manufacturer. For those instances when a range of
values is specified rather than a reference value, the
midpoint of the range shall be taken to be the reference
value.
12.7.2 The reference power supply must be sufficiently
rated for the DUT. In addition, the following supply
conditions and tolerances shall apply:
DC supply reference voltage ± 0.1% of operating
voltage
Noise and ripple of DC
supply
0.1% rms
13 Procedure
13.1 Zero Offset — Close the gas shut-off valve
upstream of the DUT and apply a 100% setpoint to the
DUT to equilibrate the pressure across the MFC. Wait
for the flow to stabilize at a value near zero; then close
the downstream shut-off valve. Deactivate the MFC’s
control valve (open for (NO) valves, closed for (NC)
valves), and allow the MFC to auto-zero if the an auto-
zero option is available. After the electrical output
signal has stabilized for at least three minutes, record
the MFC zero offset in Table 1. (Consult the
manufacturer’s specifications for the stabilization time
and report this time on Table 2.)
Table 1 Data Tabulation
Input % Set Point (sccm) Indicated Flow (sccm) Actual Flow (sccm)
40 Wait 5 minutes. Record no data.
50
60
70
80
90
100
90
80
70
60
50
40
30
20
10
5
Minimum
#1
5
10
20
30
40
50
60
SEMI E56-1104 © SEMI 1996, 2004 8
Input % Set Point (sccm) Indicated Flow (sccm) Actual Flow (sccm)
70
80
90
100
90
80
70
60
50
40
30
20
10
5
Minimum
#1
5
10
20
30
40
50
60
70
80
90
100
90
80
70
60
50
40
30
20
10
5
Minimum
#1
5
10
20
30
40
50
#1
Per Section 13.5.4.1
#2
Test for accuracy, linearity, repeatability, short-term reproducibility, and hysteresis.
SEMI E56-1104 © SEMI 1996, 2004 9
Table 2 Test Data Cover Sheet
MFC
Manufacturer Model Serial Number Attitude
Nameplate Gas Seal Material Valve Seat Material Full Scale Range
Environment
Ambient Temp. (°C) Ambient Press. (kPa) Humidity (%)
Test Gas Inlet Gas Press. (Kpa) Outlet Gas Press.
(kPa)
Gas Temp. (°C)
Test Facility
Name City/State Telephone ( ) Fax ( )
Standard Used Standard Accuracy Facility Bias Certification Date
Other Equipment Accuracy Certification Date
Other Equipment Accuracy Certification Date
Other Equipment Accuracy Certification Date
Other Equipment Accuracy Certification Date
Comments or Special Instructions:_____________
_
_____________________________________________________________
_______________________________________________________________________________________________________
_______________________________________________________________________________________________________
_______________________________________________________________________________________________________
_______________________________________________________________________________________________________
_______________________________________________________________________________________________________
_____________________________________________________________________________ Technical:________________
_____________________________________________________________________________ Date:____________________
13.2 Use the cardinal setpoints and any other setpoints
of specific interest. These setpoints will be used to
determine the accuracy of the MFC. The setpoint
increments should exceed the expected deadband of the
DUT.
13.3 At each setpoint under test, maintain the input
signal until the output of the DUT becomes stabilized at
its apparent final value. Observe and record the output
values in Table 1 for each input value.
13.4 Record five readings at each setpoint during
testing. The time between readings shall be between 1
and 100 times the settling time of the DUT.
NOTE 2: If the data points show a trend in one direction,
either up or down, the DUT is not stable enough for the test to
proceed to the next setpoint. Record another five readings at
this setpoint. If the results continue to show a trend, repeat
the measurements at the previous setpoint. If the results are
not satisfactory at this setpoint, stop the test for this MFC. If
the results are not satisfactory, halt the test and verify the
performance of the testing apparatus.
13.5 Test for Accuracy, Linearity, Repeatability, Short-
Term Reproducibilty, and Hysteresis
NOTE 3: Record data in Table 1.
13.5.1 Provide a setpoint to the DUT of 40% and hold
it there for 5 minutes. Do not collect any data at this
point. Apply a 50% setpoint to the MFC and record
data.
13.5.2 Begin collecting data at the midpoint of the
span. Use data tabulation table in Table 1.
13.5.3 Step the MFC’s setpoint to the upper setpoint
limit in the increments previously chosen; record data at
each setpoint.
13.5.4 After data is recorded at the upper setpoint limit,
step the setpoint to the lowest setpoint chosen, again
taking data at each of the intermediate setpoints.
13.5.4.1 If the lowest setpoint chosen is greater than
the lower setpoint limit, apply the lower setpoint limit
to the device and wait for five minutes. This allows
hysteresis to be calculated at the lowest setpoint chosen.
13.5.5 Continue collecting data, increasing the setpoint
until the midpoint of the span is reached again.
13.5.6 Perform the cycle described in Sections 13.5.1–
13.5.4 a total of three times.
13.6 Test for Deadband
13.6.1 Begin collecting data at the lowest setpoint
chosen. Record on Table 3.