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SEMI D28-1101 © SEM I 2001 5 RELATED INFORM A TI ON 1 A SSUM ED DIMENSI ONS FOR SUBSTRATE EDGE AND CA SSETTE SIZE NOTE: T his related in formation is not an o fficial part of SEMI D28 and was derived from work of t he or…

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SEMI D28-1101 © SEMI 2001 4
Table 1 Substrate Edge Length, Interface Dimensions, and Tolerances
Interface Dimensions and Tolerances[mm]
Substrate Edge
Length [mm]
X1
max.
X2
max.
X3
max.
Y1
max.
Y2
max.
Y3
max.
Z1
± 2 mm
Z2
max.
Z4
max.
Z5
max.
550 × 650
925 450 600 500 440 130 900, 950 1000 150 250
600 × 720
980 500 600 535 475 130 900, 1000 1000 150 250
680 × 880
1100 560 600 615 565 130
1000,
1100
1000 150 300
730 × 920
1150 600 600 630 590 130
1000,
1100
1000 150 300
800 × 950
1200 660 600 650 605 130
1000,
1100
1000 150 300
NOTE 1: Two values are specified for Z1, either value can be chosen.
8 Related Documents
8.1 SEMI Standards
SEMI D5 — Standard Size for Flat Panel Display
Substrates
SEMI D11 — Specification for Flat Panel Display
Glass Substrate Cassettes
SEMI D16 — Specification for Mechanical Interface
Between Flat Panel Display Material Handling System
and Tool Port
8.2 Semiconductor Equipment Association of Japan
(SEAJ)
Semiconductor Equipment Association of Japan (SEAJ)
Liquid Crystal Display Manufacturing Equipment
Standardization Guideline – for Glass Substrate Size
800 × 950 (SEAJ/P-S3005-98, SEAJ/P-S3006-98), June
1998
1
8.3 SEMI PCS-FPD
SEMI PCS-FPD — Production Cost Saving (PCS)
Forum – FPD Phase III Report, June 1999
2
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
1 Semiconductor Equipment Association of Japan, 7-10, Shinjuku 1-
chome, Shunjuku-ku, Tokyo, 160-0022 Japan, tel:+81-3-3353-7589,
fax:+81-3-3353-7970, http://www.seaj.or.jp
2 SEMI PCS-FPD Production Cost Saving (PCS) Forum – FPD
Phase III Report, June 1999, Semiconductor Equipment and
Materials International, 3081 Zanker Road , San Jose, CA 95134-
2127 U.S.A.tel.+1-408-943-6900 fax:+1-408-428-9600
http://www.semi.org
product data sheets, and other relevant literature with
respect to any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyright material or of an invention covered by patent
rights. With publication of this standard, SEMI takes no
position in respect to the validity of any patent rights or
copyrights asserted in connection with any item
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk or infringement of
such rights, are entirely their own responsibility.
SEMI D28-1101 © SEMI 20015
RELATED INFORMATION 1
ASSUMED DIMENSIONS FOR SUBSTRATE EDGE AND CASSETTE
SIZE
NOTE: This related information is not an official part of SEMI D28 and was derived from work of the originating
committee. This related information was approved for publication by full letter ballot procedures on August 3,
2001.
Table R1-1 Cassette Size
Substrate Edge
length [mm]
Cassette size [mm]
Width×Length×Height
550 × 650
600 × 720
680 × 880
730 × 920
800 × 950
591 × 682 × 524
642 × 755 × 695
736 × 923 × 706
792 × 978 × 770
870 × 1010 × 810
NOTE 1: 550 × 650, 600 × 720, 680 × 880, and 730 × 920 are the
sizes which are actually adopted at the manufacturing sites. As for
800 × 950, please refer to SEMI PCS-FPD-Phase III Report.
NOTE 2: Cassette sizes in Table R1-1 were used only hypothetically
as assumption to prescribe dimensions in Table 1.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI D29-1101 © SEMI 20011
SEMI D29-1101
TEST METHOD FOR HEAT RESISTANCE IN FLAT PANEL DISPLAY
(FPD) COLOR FILTERS
This test method was technically approved by the Global Flat Panel Display Materials and Components
Committee and is the direct responsibility of the Japanese Flat Panel Display Materials and Components
Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001.
Initially available at www.semi.org September 2001; to be published November 2001.
1 Purpose
1.1 The purpose of this document is to standardize the
method for measurement of heat resistance in color
filters used for flat panel displays (FPD).
2 Scope
2.1 This method is to be used by suppliers and users of
FPD color filters to measure quality in products as well
as items under development.
2.2 This method is used in general FPD production to
test the resistance of color filters to heat.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determines
the applicability of regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI D19 — Test Method for the Determination of
Chemical Resistance of Flat Panel Display Color Filter
SEMI D22 — Test Method for the Determination of
Color, Transmittance of Flat Panel Display Color Filter
Assemblies
3.2 ISO Standards
1
ISO 7724
2
,
3
— Paints and varnishes -- Colorimetry
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
1 International Organization for Standards(ISO), 1, rue de Varembe,
Case, postale 56 CH-1211 Geneva 20, Switzerland. Tel: +41-22-749-
01-11, E-mail: central@iso.ch, http://www.iso.ch
2 Available in Japanese as JIS Z8730 — Method for Specification of
Color Differences for Opaque Material. Japanese Standards
Association, 1-24, Akasaka 4 Chome, Minato-ku, Tokyo, 107-8440
Japan. Tel: +81-3-3583-8000, E-mail:
webmaster@jsa.or.jp,
http://www.jsa.or.jp
3 The expression method of its color differences is equal to the
method defined in Publication of CIE No. 87 (1990) Parametric
Effects in Color – Difference Evaluation. Commission Internationale
de l’Eclairage, Kegelgasse 27, A-1030 Vienna, Austria. Tel: +43-1-
714-31-87-0
4 Terminology
4.1 atomic force microscope (AFM) — a device which
precisely measures surface shape by gauging the
reciprocal active force between atoms through use of a
probe.
4.2 clean oven — a device that heats a specimen
through circulation of heated air through an air filter.
4.3 confocal scanning laser microscope — a
microscope which is able to create an image of just the
focal point by concentrating light on a specimen using a
confocal laser. This device can also measure surface
shape by recording height information, which matches
the focal point of each scans line image.
5 Summary of Method
5.1 Measure spectral transmittance, chromaticity, and
surface shape of specimen.
5.2 Place specimen in heating device and leave at
specified temperature for specified length of time.
5.3 Remove specimen from heating device and cool
them.
5.4 Observe visually and by microscope to see if any
exterior changes have occurred in the specimen.
5.5 Measure spectral transmittance, chromaticity, and
surface shape of specimen.
6 Apparatus
6.1 Heating Device and Holders
6.1.1 Heating Device — Use a clean oven. The
heating device being used must have the accuracy of
temperature verified. Also, the device should have
enough capacity to be able to heat the specimen evenly
to the target temperature promptly. For example, there
are devices where it is necessary to place a metal block
inside to increase the heating capacity to the specimen.
6.1.2 Holder — First the holder should be raised to the
specified temperature and then the specimen should be
set in the holder.