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SEMI F96-0704 © SEMI 2004 2 5.5 The height difference between the tops of t he ports will be no more than 0.5 mm. 5.6 Additional ports m ay be provided so l ong as they do not interfere with the above specifications. NOT…

SEMI F96-0704 © SEMI 2004 1

SEMI F96-0704

SPECIFICATION FOR PORT CONFIGURATION OF CANISTERS TO

CONTAIN LIQUID CVD PRECURSORS

This specification was technically approved by the Global Gases Committee and is the direct responsibility of

the North American Gases Committee. Current edition approved by the North American Regional Standards

Committee on April 22, 2004. Initially available at www.semi.org June 2004; to be published July 2004.

1 Purpose

1.1 This document specifies the type, size and spacing

of connectors to be used on metal (e.g. stainless steel)

canisters for liquid chemical precursors, solutions and

solvents.

2 Scope

2.1 This document applies to metal (e.g. stainless steel)

canisters to be used for “liquid precursors” (see

definition) including solutions of precursors in solvents.

It also applies to containers for solvents used for in situ

cleaning of delivery system.

2.2 The liquid connection ports (inlet and outlet) are

included, as are pneumatic connections to valves.

2.3 Parameters such as overall canister dimensions are

expected to be specified by other standards.

NOTICE: This document does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the user of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standard

SEMI F66 — Specification for Port Marking and

Symbol of Stainless Steel Vessels for Liquid Chemicals

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 canister — a metal (usually stainless steel)

container in which a liquid precursor is supplied.

Canisters are also known as “ampoules”, “shuttle

drums”, “ tanks”, etc.

4.1.2 liquid precursor — a liquid precursor is a

chemical supplied as a liquid and used in Chemical

Vapor Deposition (CVD). Many liquid precursors are

toxic, reactive and air-sensitive.

5 Ports

5.1 A canister has a gas inlet port and a liquid outlet

port. The outlet port is equipped with a dip-tube,

marked according to SEMI F66. Note that a canister

may be used as a bubbler, by using the dip-tube port as

the gas inlet. In this standard however, liquid delivery

is assumed and the dip-tube port will be referred to as

the “outlet”.

5.2 Canisters up to 100 liters in volume:

5.2.1 The ports will be located with the dip tube at the

3 o’clock position and the gas inlet at the 9 o’clock

position, as illustrated in Figure 1.

Figure 1

Port Configuration

5.2.2 Both ports shall be fitted with ¼” O.D. face-seal

connectors.

5.2.3 The port separation (L in the Figure) shall be

76 mm or 146 mm, + /- 4 mm, the value to be chosen

according to the diameter of the canister.

5.3 For canisters greater than 100 liters in volume, the

outlet port shall be in the center, the port separation 152

+ /- 4 mm, and the port connections ½” O.D. face-seal.

5.4 The connector shall be male on the gas inlet port

and female on the dip tube port.

SEMI F96-0704 © SEMI 2004 2

5.5 The height difference between the tops of the ports

will be no more than 0.5 mm.

5.6 Additional ports may be provided so long as they

do not interfere with the above specifications.

NOTE 1: The user of this standard should evaluate the

consequences of connecting a given precursor to a point

intended for other precursors. The nature of the precursor

itself and of the other precursors expected to be in use at the

same location should be taken into account. Consider

packaging precursors with a non-standard connector on the

canister outlet if necessary to avoid a dangerous situation.

6 Valves

6.1 The inlet and outlet port are each provided with a

valve but the details of those valves are not specified

here. If pneumatic valves are provided, the pneumatic

connection shall be a 1/8” quick-connect type.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F97-0305

SPECIFICATION FOR FACILITY PACKAGE INTEGRATION,

MONITORING AND CONTROL

This specification was technically approved by the Global Facilities Committee and is the direct

responsibility of the European Global Facilities Committee. Current edition approved by the European

Regional Standards Committee on November 10, 2004. Initially available at www.semi.org January 2005; to

be published March 2005.

1 Purpose

1.1 The purpose of this specification is to provide the requirements for the architecture, functionality and interfaces

for Facility Monitoring and Control Systems and the various Facility Package Units to enable a standardized and

integrated communication between them. This specification is appended with related information to provide

application examples.

1.2 Background and Motivation

1.2.1 Today, the suppliers of Facility Package Units (e.g., chemicals, power supply, gases, HVAC) are often using

individual communication concepts. This leads to high efforts to specify the communication structures between

Facility Package Units (FPU) and the Facility Monitoring and Control Systems (FMCS), to evaluate the quoted

solutions and to eventually integrate these units. These individual, not standardized concepts today are not reusable,

bear risks in execution and lead to high maintenance costs.

1.2.2 This specification is a first step to standardize the communication between facility and monitoring

components. Therefore, it focuses in its scope to a small set of requirements which are common to all FPUs. As

this communication concept is adopted by the various FPU suppliers and their customers, more specific standards

describing particular FPUs and their services may evolve.

1.3 Who and what is addressed by this standard.

1.3.1 A standardization of the communication concept between FMCS and FPUs will support Facility Package Unit

manufacturers, general contractors, system integrators, purchasers, and control system manufacturers. It will lead to

substantially reduced costs, more reliable execution times, and optimized maintenance concepts.

2 Scope

2.1 This standard specifies the requirements for the architecture, common services, data, and its semantic meaning

to integrate the FPUs into the FMCS. For this purpose, a basic set of common services (operations) between the

FMCS and the FPUs are specified to exchange FPU status information and data. In addition, the state models for

FPUs are described.

2.2 Out of scope for this standard are:

 Services of FMCS provided to interface to Manufacturing Execution Systems or Enterprise Resource Planning

Systems,

 Specification of functionality of particular FMCS functions (graphical user interface (GUI), data archives,

reporting archives, alarm handling, etc.), and

 The specification of the interface between FPU control level and FPU field level.

2.3 Applicability — This standard applies to the field of facility management and is targeted for FPU suppliers and

FMCS suppliers for systems integration, engineering and commissioning as well as the operation of such systems by

the purchasers.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.