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SEMI S7-96 © SEMI 199 4, 1996 2 evaluation should include accordan ce wi th the codes, guidelines, and the local regulatio ns of potential users. To assist in this, the sup plier should pro vide the evaluator with a list…

SEMI S7-96 © SEMI 1994, 19961

SEMI S7-96

SAFETY GUIDELINES FOR ENVIRONMENTAL, SAFETY, AND HEALTH

(ESH) EVALUATION OF SEMICONDUCTOR MANUFACTURING

EQUIPMENT

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use. It

is the responsibility of the user of this guideline to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

NOTE: This entire document was revised in 1995.

1 Purpose

1.1 The purpose of this document is to provide

guidance to the equipment manufacturer or supplier, the

evaluator, and the user to define responsibilities and to

ensure the objective evaluation of designs and

equipment.

1.2 Preservation of employee safety and conformance

to environmental regulations are important criteria

when selecting semiconductor manufacturing

equipment. A basic expectation is that the equipment

manufacturer will design and build inherently safe (to

the operator, facility, and environment) equipment and

will provide documentation that the equipment has been

evaluated against a specific set of criteria, verifying

conformance thereto.

1.3 A safety evaluation is important for a variety of

reasons, including: operator safety, equipment

reliability, conformance to regulatory (e.g., OSHA,

EPA, local fire and building codes) and insurance

requirements. These are intended to ensure a safe and

environmentally responsible workplace.

2 Scope

2.1 This document defines the requirements for ESH

evaluation of equipment design and operation.

2.2 These guidelines include:

• Purpose

• Scope

• Referenced Documents

• Terminology

• Codes, Regulations, and Standards

• Requirements for Third Party Evaluators

• Contracting with an Evaluator

• Documentation Provided to the Evaluator by the

Supplier

• Evaluation Methods

• Contents of Reports

• Provision of Reports to Potential Users

2.3 The evaluation program is designed to be used in

addressing the ESH aspects of new, refurbished, or

resold process tools prior to the tool being delivered to

the user.

2.4 The evaluator may be within the supplier’s

organization. As some equipment suppliers do not

maintain a comprehensive ESH equipment evaluation

program in-house, third party contractor(s) may be

used. In either case, the evaluator should meet the

requirements listed in Section 6.

3 Referenced Documents

NOTE: All documents cited shall be the latest published

versions.

3.1 SEMI Document

SEMI S2 — Safety Guidelines for Semiconductor

Manufacturing Equipment

3.2 ANSI Document

Z34.1 — Third Party Certification Program

4 Terminology

4.1 supplier — The party providing the equipment to,

and communicating directly with, the user. It may be

the manufacturer or an equipment representative or

distributor. The supplier has the responsibilities of

obtaining the required information from the

manufacturer or other sources and of providing it to the

evaluator.

4.2 user — The purchaser of semiconductor

manufacturing who will use the equipment.

5 Codes, Regulations, and Standards

5.1 Semiconductor equipment should conform to the

applicable codes, regulations, and standards. The

American National Standards Institute, 1430 Broadway, New York,

NY 10018

SEMI S7-96 © SEMI 1994, 1996 2

evaluation should include accordance with the codes,

guidelines, and the local regulations of potential users.

To assist in this, the supplier should provide the

evaluator with a list of jurisdictions in which the

supplier intends to market the equipment.

6 Requirements for Third Pa rty Evaluators

6.1 The evaluator should have at least five years’

experience in the semiconductor equipment or

fabrication or similar industry and:

a. be established in accordance with ANSI Z34.1,

Third Party Certification Program; or

b. consist of individual(s) who are registered or

certified professional(s) in the discipline(s) in

which the evaluations were performed; or

c. consist of individual(s) with baccalaureate or

higher degrees in related technical discipline(s)

(engineering or science).

NOTE: In the United States, the United Kingdom, and several

other countries, the “baccalaureate” or “bachelor of science”

degree is awarded upon completion of a technical course of

study, typically of four years, at a college or university. It is

the degree prerequisite for professional registration in most

U.S. states and for study towards a master’s degree or

doctorate.

7 Contracting with an Evalu ator

7.1 The supplier initiates the evaluation by providing a

“scope of work” to the evaluator. This scope should

define the services to be provided, including the

standards and guidelines that will be used to evaluate

the equipment and the responsibilities of each party.

7.2 The evaluator is responsible only to the supplier.

7.3 Changes made to the equipment to bring it into

accord with codes, regulations, and guidelines are the

responsibility of the supplier.

8 Documentation Provided to the Evaluator

by the Supplier

8.1 Any previous evaluations of equipment related to

the included documents, with all appropriate

documentation.

8.2 Material Safety Data Sheets (MSDS’s) for all

chemicals used in the maintenance of the equipment

and for those used in baseline and known, user-intended

processes.

8.3 When information is known for user intended or

baseline process(s), the evaluator should be provided

the estimated consumption of raw materials and the

amount(s) of by-products generated as described in

Section 20.2.1 of SEMI S2.

8.4 Copies of the equipment’s installation,

maintenance, and operation manuals.

8.5 Copies of any hazard analysis or safety reviews of

the subject equipment.

8.6 A list of all assemblies and sub-assemblies.

8.7 Design drawings and schematics.

9 Evaluation Methods

9.1 The evaluator should ensure the review of the

supplier's documents (listed above) and the outlining of

deficiencies with corrective and/or improvement

recommendations.

9.2 The ESH testing and evaluation may proceed

concurrently with the document review by agreement of

the parties.

9.3 After the supplier has addressed all deficiencies

noted in the third party report, the supplier should

review the actions taken with the evaluator. If

appropriate, the evaluator may re-evaluate some or all

of the areas addressed.

10 Contents of Reports

10.1 An interim report should be provided to the

supplier after evaluator has performed the agreed

services. It should include an overview of the services

performed, the standards, guidelines, and codes against

which the equipment was evaluated, and the evaluator’s

findings. Items found in conformance with the

documents should be documented as well as those

found to be deficient.

10.2 The evaluator’s final report should be provided

after the supplier and the evaluator have agreed that the

changes made have brought the equipment into

conformance with the applicable documents. This

report should be attached to the supplier's bid to a

potential user.

10.3 If the evaluator and the supplier differ in their

interpretation of requirements of the applicable

documents, the creator of the document in question

should be consulted for an interpretation. If the

difference remains unresolved, the evaluator should

include this and any other unresolved issues in its final

report.

10.4 The final report should be signed by the evaluator

and should contain at least the following sections:

10.4.1 Management Summary — A brief description

of the evaluation, recommendations, and results. A

statement that the equipment does or does not conform

(with noted exceptions) with the ESH specifications,

guidelines, and codes that were used for the evaluation.

10.4.2 System Description — Type of equipment

evaluated and its function.

10.4.3 Analysis and Test Methods — Specific tests

used to determine the compliance with the criteria. This

should include a point-by-point evaluation of

requirements listed in the pertinent specifications.

10.4.4 Environmental, Safety, and Health Assessment

— The detailed results of the evaluation, including the

point-by-point results, using SEMI S2 as an outline. If a

section is not applicable, so state.

10.4.5 Body — The body of the report should describe

the type of ESH evaluations, methods, and test

equipment used, and results achieved. The methods

used may include: fault testing, fault tree analysis, task

analysis, industrial hygiene analysis, chemical mass

balance, and ergonomics assessment.

10.4.6 Recommendations — Listings of

recommendations made by the evaluator and statements

that the recommendations were implemented, rejected,

or otherwise addressed.

10.4.7 Detailed Analysis and Test Worksheets —

Copies of the laboratory and field test data.

10.4.8 Additional Information/Remarks — Any

information that may clarify tests performed,

exceptions not specifically defined in the documents,

precautions for certain applications of the equipment, or

conditions of operation.

11 Provision of Reports to Po tential Users

11.1 Whenever possible, copies of the evaluator’s

final report should be made available to potential users.

If the supplier considers some information in the

evaluator’s report proprietary, the supplier should write

an overview report that includes all environmental,

safety, and health information with all proprietary

information deleted.

11.2 Deficiencies that have been remedied and now

meet the appropriate standards do not need to be listed

in the report available to users.

11.3 This modified report should be signed by the

evaluator.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the safety

guideline set forth herein for any particular application.

The determination of the suitability of this safety

guideline is solely the responsibility of the user. Users

are cautioned to refer to manufacturer’s instructions,

product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein.

This safety guideline is subject to change without

notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.