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SEMI E54.10-0600 © SEMI 2000 11 8.3.1 Sensor Actuator C ontroller Ob j e ct Attributes — T he attributes provided by the Sensor Actuator Controller object are defined in SEMI E54.1 [3]. Table 10 contains the additional a…

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SEMI E54.10-0600 © SEMI 2000 10
# Current State Trigger New State Action Comment
state “Laser Turning
On” and to required
state “Laser On But
Not Stable”. Set the
Laser Status attribute
to the appropriate
values throughout the
transition attempt.
Laser either won’t
turn on properly or
won’t stabilize. Turn
laser back off and
generate Error
response.
won’t stabilize is
manufacturer
specific.
14 LASER ON LASER ON AND
STABLE
Error response Laser is attempting
to turn on.
15 Entry into LASER
NOT OFF
Laser On request Conditional:
LASER NOT
OFF/LASER
TURNING ON or
LASER
ON/LASER ON
AND NOT
STABLE or
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Entry state depends
on device support
for optional states
LASER TURNING
ON and LASER ON
/ LASER ON AND
NOT STABLE or
LASER ON AND
STABLE
16 LASER
TURNING ON
Device detects that the
laser is on.
LASER
ON/LASER ON
AND NOT
STABLE or
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Behavior associated
with determining
that laser is in the
process of turning
on and is
manufacturer
specific.
17 Entry into LASER
ON
Laser On request Conditional:
LASER
ON/LASER ON
AND NOT
STABLE or
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Entry state depends
on device support
for optional states
LASER ON AND
NOT STABLE or
LASER ON AND
STABLE.
18 LASER ON AND
NOT STABLE
Device determines that
the laser is stable.
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Laser is on.
Behavior associated
with determining
that laser will turn
on properly or won’t
stabilize is
manufacturer
specific.
NOTE 1: Note that this matrix augments the Device Manager Behavior State Transition Matrix as defined in SEMI E54.1 [3]. All transitions are
in addition to those specified in SEMI E54.1.
NOTE 2: The “counting” process is defined in Section 8.8.3.1.
8.3 Sensor Actuator Controller Object (SAC) — The Sensor Actuator Controller object is the device component
responsible for coordinating the interaction of the ISPM device with the sensory/actuation/control environment as
specified in SEMI E54.1 [3]. The following sections specify the components of the SAC object that are not specified
in the Common Device model or require further definition than specified in the CDM.
SEMI E54.10-0600 © SEMI 200011
8.3.1 Sensor Actuator Controller Object Attributes — The attributes provided by the Sensor Actuator Controller
object are defined in SEMI E54.1 [3]. Table 10 contains the additional attributes required for the Sensor Actuator
Controller object.
Table 10 SAC Object Attributes
Attribute Name Attribute Identifier Access Network Required Form
Number of Bins SacA65 R* Yes UINT
Count Mode SacA66 RW* Yes Enumerated, USINT
Duration SacA67 R No REAL
NOTE 1: “*” Indicates that the specific attribute is nonvolatile. Nonvolatile requires that the current attribute value be maintained through a
component power cycle.
8.3.1.1 Number of Bins — An attribute that specifies the number of counters in the device. This value represents
the number of Sensor-AI-Counter objects in the device.
8.3.1.2 Count Mode — An attribute that specifies whether all count object values are cleared (to zero) when read.
This attribute is an enumerated USINT that can take on one of the following values:
0 = The particle counter count is not affected by reading the count.
1 = The particle counter count is cleared to zero when the count (“value” attribute of the Counter object) is read
or reported through a service request to or from an Assembly-ISPM object that contains that count.
2 = The particle counter count is cleared to zero when the count (“value” attribute of the Counter object) is read
or reported (regardless of the connection) through a service request to or from either an Assembly-ISPM
object that contains that count (“value” attribute), or the Counter object that contains the count.
3–63 = Reserved
64–255 = Manufacturer Specified
8.3.1.3 Duration (Optional) — An attribute that defines the interval of time during which the particle counts (value
of Value object attribute) are collected and put into the bin assemblies.
8.3.1.4 Initial and Default Values
Table 11 SAC Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Number of Bins Manufacturer Specified Manufacturer Specified
Count Mode LVV 0 Do not clear particle counter value.
Duration Manufacturer Specified Manufacturer Specified
8.3.2 Sensor Actuator Controller Object Services — The services provided by the Sensor Actuator Controller
object are defined in SEMI E54.1 [1]. Table 12 contains the additional services required for the Sensor Actuator
Controller object.
Table 12 SAC Object Services
Service Service Identifier Type Description
Clear Counts S33 R Used to clear the “Value” attribute of all Sensor-AI-Counter
sensor objects.
Reserved S34–S64 — Reserved for future expansion
Manufacturer Specified > S64 — Manufacturer Specific services
8.3.2.1 Clear Counts (Optional) — This service is used to instruct all of the Sensor-AI-Counter object to perform a
one-time clear of their respective Sensor-AI-Counter “Value” attributes by setting the value to zero. There are no
parameters required for this service.
SEMI E54.10-0600 © SEMI 2000 12
8.3.3 Sensor Actuator Controller Object Behavior
8.3.3.1 The behavior exhibited by the Sensor Actuator Controller object is defined in SEMI E54.1 [3]. Additional
behavior is detailed below.
8.3.3.2 The “Value” attribute is cleared (to zero) in each ISPM counter sensor object, after being read, if the “Count
Mode” attribute has a value of 1. It may also be cleared by a “Clear Counts” service of the SAC object or the
“Reset” service issued to the S-Analog Sensor class.
8.4 Sensor-AI Object — The Sensor-AI object is the device component responsible for coordinating the behavior
common to all analog input sensor elements in the ISPM device as specified in SEMI E54.1 [3].
8.4.1 Sensor-AI Object Attributes — The attributes provided by the Sensor-AI object are defined in SEMI E54.1
[1]. There are no additional attributes required for the Sensor-AI object.
8.4.2 Sensor-AI Object Services — The services provided by the Sensor-AI object are defined in SEMI E54.1 [3].
There are no additional services required for the Sensor-AI object.
8.4.3 Sensor-AI Object Behavior — The behavior exhibited by the Sensor-AI object is defined in SEMI E54.1 [3].
There is no additional behavior required for the Sensor-AI object.
8.5 Sensor-AI-LCS Object — The Sensor-AI-LCS (Laser Current Sensor) object inherits the attributes, services,
and behavior of the Sensor-AI as defined in SEMI E54.1 [3]. The Sensor-AI-LCS is the device component
responsible for retrieving a reading from a physical laser current sensor, optionally correcting the reading with a
manufacturer specified algorithm, or algorithms, then making the value available through the “Value” attribute.
8.5.1 Sensor-AI-LCS Object Attributes — The attributes provided by the Sensor-AI object are defined in SEMI
E54.1 [3]. The Sensor-AI object attribute content and its attribute extensions to support the Sensor-AI-LCS object
are listed in Table 13.
Table 13 Sensor-AI and Sensor-AI-LCS Object Attributes
Attribute Name Attribute
Identifier
Access
Network
Required Form
Value SaiA16 R Yes UINT
Gain SaiA65 R Yes REAL
Data Type SaiA66 R Yes USINT
Data Units SaiA67 R Yes Enumerated, UINT
milliAmps only value supported
Reading Valid LcsA1 R Yes Enumerated, Byte
Full Scale LcsA2 R Yes UINT
Alarm Settling Time LcsA3 R Yes UINT
Warning Settling Time LcsA4 R Yes UINT
Reserved LcsA5–LcsA64 — — Reserved for future expansion.
Manufacturer Specified > LcsA64 — — Manufacturer Specific attributes
8.5.1.1 Value — The attribute that maintains the laser current sensor value. This value is always read as milliAmps.
8.5.1.2 Gain — The attribute that specifies the gain of the laser current measuring circuit.
8.5.1.3 Data Type — The attribute which defines the format of the data associated with the “value” attribute.
8.5.1.4 Data Units — The attribute which specifies the units for the “Value” attribute. This attribute is an
enumerated UINT that can take only one value:
MilliAmps (as assigned in Appendix 1 of SEMI E54.1).
8.5.1.5 Reading Valid — An attribute which specifies whether the “Value” attribute contains a valid value. This
attribute is an enumerated byte that can take on one of the following values:
0 = Invalid, or
1 = Valid.