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SEMI E122-0703 © SEMI 2003 16 Report Label Description Availability Upon completion of a Parametric Test. Description Result of a Parametric test. PARAMETRIC-TEST-RESULT Format List, 6 1. SiteID 2. TestID 3. TestInstance…

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SEMI E122-0703 © SEMI 2003 15
Report Label Description
Must be valid On process state transition 3.
In READY, EXECUTING and PAUSE states.
Description The ClassID is a numeric value which identifies a group of hard-bins.
ClassID
CLASS-LIST
Parameters
ClassName
Must be valid On process state transition 3.
In READY, EXECUTING and PAUSE states.
Description A report of hard-bins defined and used by the process program.
HardBinID
HardBinName
HARDBIN-LIST
Parameters
ClassID
Must be valid On process state transition 3.
In READY, EXECUTING and PAUSE states.
Description A report of soft-bins defined and used by the process program.
SoftBinID
SoftBinName
HardBinID
SOFTBIN-LIST
Parameters
ClassID
10.5 Datalog Reports — The following reports are required as preconfigured datalog reports. The format for the
report shall be as defined in this table.
Table 7 Datalog Reports
Report Label Description
Availability Upon completion of a Functional Test.
Description Results for a Functional test.
FUNCTIONAL-TEST-RESULT
Format List, 6
1. SiteID
2. TestID
3. TestInstance
4. Pass
5. TestTime
6. List, n (n = # of results reported)
1. List, 4
1. PatternName
1
2. Address
1
3. Cycle
1
4. FunctionalResult
1
…
n. List, 4
1. PatternName
n
2. Address
n
3. Cycle
n
4. FunctionalResult
n
SEMI E122-0703 © SEMI 2003 16
Report Label Description
Availability Upon completion of a Parametric Test.
Description Result of a Parametric test.
PARAMETRIC-TEST-RESULT
Format List, 6
1. SiteID
2. TestID
3. TestInstance
4. Pass
5. TestTime
6. List, n (n = # of results reported)
1. List, 3
1. PinId
1
2. RealResult
1
3. Range
1
…
n. List, 3
1. PinId
n
2. RealResult
n
3. Range
n
Availability Upon completion of a Text Test.
Description Result of a Text test.
TEXT-TEST-RESULT
Format List, 6
1. SiteID
2. TestID
3. TestInstance
4. Pass
5. TestTime
6. List, n (n = # of results reported)
1. TextResult
1
2. TextResult
2
…
n. TextResult
n
Availability Upon completion of any kind of Test.
Description Generalized test result.
BRIEF-RESULT
Format List, 5
1. SiteID
2. TestID
3. TestInstance
4. Pass
5. TestTime
SEMI E122-0703 © SEMI 2003 17
Report Label Description
Availability End of Test
Description Unit level result. One report is linked to the End of Test
event. This one report contains information for all test-sites
tested.
DEVICE-RESULT
Format List, c (c = # of SiteIDs)
1. List, 4
1. SiteID
1
2. Pass
1
3. SoftBinID
1
…
c. List, 4
1. SiteID
c
2. Pass
c
3. SoftBinID
c
11 Process Program Management
11.1 Process Program Requirements
11.1.1 The GEM requirements for process program
management must be fully supported for this class of
equipment. The following is also required. The
process program must have a structure that enables the
user to build process programs with default conditions
that can be overridden at run time via parameters
specified in the PP-SELECT remote command.
• When a process program is downloaded to the
equipment by the host, the process program syntax
shall be verified by the equipment.
• The downloaded process parameters shall be
checked for type and range before execution. An
error message must be generated from the tester if
the process program parameters are outside the
range of the machine capability.
• The contents of the downloaded process program
body (PPBODY) may contain the explicit para-
meters and data necessary for the runtime process
program, or the body may contain reference
information (i.e., PATH location) on where the
explicit data is stored. In the latter case, it is
required that the equipment combines or compiles
the reference data prior to the verification step.
11.2 Diagnostic and calibration routines are considered
process programs and must be verified and validated
the same as a typical process program.
12 Alarm Management
12.1 Alarm Definition
12.1.1 The TSEM requires a broader definition of
alarms than is provided by SEMI E30. The alarm
definitions provided by SEMI E5 provide this broader
definition. SEMI E5 provides for eight (8) categories
of alarms:
1. personal safety — Condition may be dangerous to
people.
2. equipment safety — Condition may harm
equipment.
3. parameter control warning — Parameter variation
outside of preset limits — may harm product.
4. parameter control error — Parameter variation
outside of reasonable control limits — may
indicate an equipment malfunction.
5. irrecoverable error — Intervention required before
normal use of equipment can resume.
6. equipment status warning — An unexpected
condition has occurred, but operation can continue.
7. attention flags — A signal from a process program
indicating that a particular step has been reached.
8. data integrity — A condition that may cause loss
of data.
12.1.2 It will be the equipment’s responsibility to
categorize the alarm. Some alarm conditions may
cause more than one type of alarm to be issued. For
example, a parameter control error for over voltage may
also trip a protective device that makes the alarm
irrecoverable without some intervention.
12.2 Relationship to ALARM PAUSED Process State
12.2.1 The relationship between an alarm condition
and the ALARM PAUSED process state should be
defined by the equipment manufacturer on a case-by-
case basis along these guidelines.