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SEMI M23-0703 © SEMI 1993, 2003 8 Figures 3A and 3B Both Diagr ams Show an InP Wafer w ith Surf ace Orientati on B and Flat Option Dove-Tai l

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SEMI M23-0703 © SEMI 1993, 2003 7
Figures 2A and 2B
Both Diagrams show an InP Wafer with Surface Orientation A and Flat Option V-Groove
SEMI M23-0703 © SEMI 1993, 2003 8
Figures 3A and 3B
Both Diagrams Show an InP Wafer with Surface Orientation B and Flat Option Dove-Tail
SEMI M23-0703 © SEMI 1993, 2003 9
Figures 4A and 4B
Both Diagrams Show an InP Wafer with Surface Orientation B and Flat Option V-Groove