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SEMI E109-0305 © SEMI 2001, 2005 29 14.4.2 Reticle State M odel Diagram RETICLE ST ATE RETICLE AT EQUIPM ENT RETICLE NOT PRESENT 3 UNQUALIFIED RETICLE 4 8 RETICLE QUAL IFICATION QUALIFIED RETICLE REJE CTED QUALIFIED IN U…

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provided by the host by either the Bind, PodNotification, ReticleTransferJob, ProceedWithPod, or MoveReticle
Services or if the equipment has means of determining the attribute values. (for example, if the equipment has a
ReticleID reader, the equipment can determine the ContentMap).
14.3.3 ACCESS Column
14.3.3.1 Even though a value may be marked as RO (read only), the initial value for the attribute may be provided
by the host when attached to either the Bind, PodNotification, ReticleTransferJob or ProceedWithPod services. The
only other time the PodCapacityStatus attributes are updated is at the first ProceedWithPod service.
Table 12 Reticle Attribute Definition
Attribute Name Definition Access Reqd Form
ObjType Object type. RO Y Text equal to “Reticle”.
ObjID Object identifier. RO Y Text 1 to 80 characters equal to the ReticleID.
# of Exposures Count of the number of exposures
since the reticle was loaded to the
equipment.
RO Y Non negative integer.
QualificationInterval-
Time
The amount of time (in minutes)
allowed between equipment
inspections of a reticle. If this time
is exceeded, the reticle state must
transition to REJECTED.
RW Y 52
Qualification-
TerminationTime
The actual time if when a qualified
reticle will expire and the reticle
state must transition to rejected.
RO Y 20
ReticleStatus Current state of the Reticle. RO Y Enumerated: RETICLE NOT PRESENT,
WAITING QUALIFICATION, READING
ID, QUALIFIED, IN USE, REJECTED,
RETICLE WAITING FOR HOST,
PARTICLE INSPECTION.
ReticleAllocationStatus The current allocation state of the
reticle by the equipment. The
current substate of the Reticle
Allocation state model.
RO Y Enumerated:
NOT ALLOCATED, ALLOCATED.
ReticleLocationID The specific location of the reticle. RO Y Enumerated:
Equipment dependent text.
Example locations: Inspection position,
ReticleID read position, storage location 1.
Reticle type The type of reticle. RO Y Enumerated:
Equipment dependent text.
Example subtypes: phase shift, binary.
14.4 Reticle State Model
14.4.1 The purpose of the Reticle State Model is to define the host’s view of a reticle. The equipment shall
maintain a separate and independent state model for each reticle.
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14.4.2 Reticle State Model Diagram
RETICLE STATE
RETICLE AT
EQUIPMENT
RETICLE NOT PRESENT
3
UNQUALIFIED RETICLE
4
8
RETICLE QUALIFICATION
QUALIFIED RETICLE
REJECTED
QUALIFIED
IN USE
20
22
1
2
13
WAITING
QUALIFICATION
18 19
11
10
21
6
PARTICLE
INSPECTION
15
RETICLE ID VERIFICATION
9
14
7
5
READING ID
RETICLE
WAITING FOR
HOST
16
17
Figure 7
Reticle State Model Diagram
14.4.3 Reticle State Definition
14.4.3.1 RETICLE NOT PRESENT This is a subset of RETICLE STATE and is active when the reticle is not
present on the Equipment. The reticle has been instantiated with a Bind, PodNotification, ReticleTransferJob, or
MoveReticle service.
14.4.3.2 RETICLE AT EQUIPMENT This is a subset of RETICLE STATE and is active when the reticle is
present. The reticle is physically present on the Equipment. There are two substates, UNQUALIFIED RETICLE
and QUALIFIED RETICLE.
14.4.3.2.1 UNQUALIFIED RETICLE
This is a substate of RETICLE AT EQUIPMENT and is active when the
reticle is physically present but not QUALIFIED. There are three substates, WAITING QUALIFICATION,
RETICLE QUALIFICATION, AND REJECTED.
14.4.3.2.1.1 WAITING QUALIFICATION This is a substate of UNQUALIFED RETICLE and is active when
the reticle is waiting to be selected for qualification. The physical ReticleID is not read in this state.
14.4.3.2.1.2 REJECTED This is a substate of UNQUALIFIED RETICLE and is active when the reticle did not
pass the qualification(s) due to an unexpected ReticleID or poor inspection results. The operator or the host
(depending on the control mode) will have to decide if the reticle must be re-qualified or removed from the
equipment.
14.4.3.2.1.3 RETICLE QUALIFICATION This is a substate of UNQUALIFIED RETICLE and is active when
the reticle is being qualified for production. The ReticleID is being read from the ReticleID and/or a reticle
inspection for particles is being performed. There are two substates: RETICLE ID VERIFICATION and
PARTICLE INSPECTION.
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14.4.3.2.1.3.1 RETICLE ID VERIFICATION — This is a substate of RETICLE QUALIFICATION and is active
when the reticle ID has not been verified. There are two substates, READING ID and RETICLE WAITING FOR
HOST.
14.4.3.2.1.3.1.1 READING ID — This is a substate of RETICLE ID VERIFICATION and is active when the
Reticle ID is being read.
14.4.3.2.1.3.1.2 RETICLE WAITING FOR HOST — This is a substate of RETICLE ID VERIFICATION and is
active when the Reticle ID has been read successfully or unsuccessfully and has not yet been verified by the host.
14.4.3.2.1.3.2 PARTICLE INSPECTION — This is a substate of RETICLE QUALIFICATION and is active when a
reticle is being evaluated for particles.
14.4.3.2.2 QUALIFIED RETICLE
This is a substate of RETICLE AT EQUIPMENT and is active when the
reticle may be used for production. It has two substates QUALIFIED and IN USE.
14.4.3.2.2.1 IN USE This is a substate of QUALIFIED RETICLE and is active when any kind of processing on
the reticle is being done (i.e. the reticle is not at an inventory position).
14.4.3.2.2.2 QUALIFIED This is a substate of QUALIFIED RETICLE and is active when the reticle is at an
inventory position, including either the internal reticle buffer or a reticle pod.
14.4.4 Reticle State Transition Table Table 13 indicates the triggers and the expected behavior of the instantiated
reticle object.
Table 13 Reticle State Transition Definition
# Current State Trigger New (Sub-)State Action Comment
1
This
transition
is not
currently
used.
-
2
This
transition
is not
currently
used.
-
3 (no state) A reticle is instantiated via the Bind,
PodNotification, or
ReticleTransferJob, message in
which the content map is provided,
or the reticle is instantiated via a
MoveReticle service for which the
Reticle Pod has not been received by
the equipment.
RETICLE NOT
PRESENT
Data required to be
available for this event
report:
PodID
4 (no state) A reticle is instantiated after placing
a reticle pod on a load port via a
reticle PodID tag read that provided
the content map or via a
MoveReticle service for which the
Reticle Pod has been received by the
equipment.
WAITING
QUALIFICATION
None. This transition happens
only if the content map
has not been provided
to the equipment prior
to reticle pod load port
receiving a reticle pod.
5 (no state) A reticle is instantiated via a
ReticleID read and a particle
inspection is still required.
PARTICLE
INSPECTION
Data required to be
available for this event
report:
ReticleLocationID