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SEMI P41-0304 E © SEMI 2004 7 Item Element or Attribute Mandatory or Optional Data Type Description ImagePixelSize Element Mandatory - Element of pixel size on image d ata. unit Attribute Mandatory String Unit system. Im…

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SEMI P41-0304
E
© SEMI 2004 6
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
ToolOriginPosition_Y Element Mandatory Float Y coordinate value of tool origin position.
ToolStageCorrectionInformation Element Mandatory - Top element of tool work stage correction
information.
ToolStageCorrection Element Mandatory - Element of correction information.
unit Attribute Mandatory String Unit system.
ToolStageCorrection_X Element Mandatory Float Correction information of X coordinates.
ToolStageCorrection_Y Element Mandatory Float Correction information of Y coordinates.
ToolStageSkew Element Mandatory - Element of skew correction information.
unit Attribute Mandatory String Unit system.
ToolStageSkewCorrection Element Mandatory Float Skew correction information.
MaskOriginPointInformation Element Mandatory - Top element of mask origin position.
MaskOriginPoint Element Mandatory String Mask origin point information.
MaskOriginPosition Element Mandatory - Element of mask origin position.
unit Attribute Mandatory String Unit system.
MaskOriginPosition_X Element Mandatory Float X coordinate value of mask origin position.
MaskOriginPosition_Y Element Mandatory Float Y coordinate value of mask origin position.
ToolOffset Element Mandatory - Element of relative position information on tool
origin and mask origin.
unit Attribute Mandatory String Unit system.
ToolOffset_X Element Mandatory Float X offset value of relative position of tool origin
and mask origin.
ToolOffset_Y Element Mandatory Float Y offset value of relative position of tool origin
and mask origin.
ToolStageAccuracy Element Optional - Tool work stage positioning accuracy
information.
unit Attribute Optional String Unit system.
Table 6 Description of Mask Direction Information Section
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
ReferenceMark Element Mandatory String Information on the reference mark for expressing
direction of mask.
MarkRotation Element Mandatory String Information of rotation direction on mask.
MaskMirror Element Mandatory String Information of mirror direction information on
mask.
MaskFlip Element Mandatory String Information of flip direction information on
mask.
Table 7 Description of Image Data Section
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
ImageReferenceAddress Element Optional String Reference address information of image data.
ImageInformation Element Mandatory - Element of image data information.
ImageFormat Element Mandatory String Image data format information.
ImageMagnification Element Mandatory Float Image data magnification information.
ImagePixelNumber_X Element Mandatory Integer Number of pixels in X.
ImagePixelNumber_Y Element Mandatory Integer Number of pixels in Y.
SEMI P41-0304
E
© SEMI 2004 7
Item
Element or
Attribute
Mandatory or
Optional
Data Type Description
ImagePixelSize Element Mandatory - Element of pixel size on image data.
unit Attribute Mandatory String Unit system.
ImagePixelSize_X Element Mandatory Float Size of one pixel in X.
ImagePixelSize_Y Element Mandatory Float Size of one pixel in Y.
ImageGrayLevel Element Mandatory String Gray level information of image data.
ImageIllumination Element Mandatory String Illumination information of image data.
ImageRotation Element Mandatory String Rotation information of image data.
ImageMirror Element Mandatory String Mirrorring information of image data.
ImageFlip Element Mandatory String Flipping information of image data.
ImageConvertInformation Element Optional - Element of image conversion information from
original/raw data.
ImageContrast Element Mandatory String Image contrast information.
ImageBrightness Element Mandatory String Image brightness information.
ImageConversionParameter Element Mandatory String Image conversion parameter information.
ImageReference Element Mandatory - Top element of image origin point. Refer to
Figure 11.
origin Attribute Mandatory String Origin point name of this reference position.
ImageReferencePoint Element Mandatory String Image reference point information.
ImageReferencePosition Element Mandatory - Element of image reference position coordinate
value.
unit Attribute Mandatory String Unit system.
ImageReferencePosition_X Element Mandatory Float X coordinates value of image reference position.
ImageReferencePosition_Y Element Mandatory Float Y coordinates value of image reference position.
ImageTarget Element Mandatory - Element of image target.
origin Attribute Mandatory String Origin point name of this reference position.
ImageTargetPosition Element Mandatory - Element of target position on image data. Refer
to Figure 12.
unit Attribute Mandatory String Unit system.
ImageTargetPosition_X Element Mandatory Float X coordinate value of image target position.
ImageTargetPosition_Y Element Mandatory Float Y coordinate value of image target position.
ExpressionMark Element Mandatory String Expression of target point on image data.
MDML (data_no,date_stamp)
BasicInformation
Element name
Attribute name
Top element
Under element
InspectionResult
+ Defect(defect_type,data_stamp)
Repeatable mark
Figure 1
Explanation of Figures 2–7
SEMI P41-0304
E
© SEMI 2004 8
MDML (data_no,date_stamp)
BasicInformation
MaskSize (unit,shape)
MaskSize_X
MaskSize_Y
MaskThickness
MaskAbsorber
DefectInspection (preparation_data)
InspectionTool (tool_name,tool_no)
ToolCoordinateInformation
InspectionMethod
PreparationOperator
ReferenceAreaDB
Subsequent structures are in Figure 5.
DirectionInformation
AreaInformation
LensDistance (unit)
InspectionArea (unit)
InspectionArea_X
InspectionArea_Y
InspectionAreaChip_X
InspectionAreaChip_Y
ChipSize_X
ChipSize_Y
InspectionChipNumber
InspectionChipNumber_X
InspectionChipNumber_Y
+ Reference (origin)
ReferencePointName
ReferencePosition (unit)
ReferencePosition_X
ReferencePosition_Y
+ ImageData
InspectionStartPosition (origin,unit)
InspectionStartPosition_Y
InspectionStartPosition_X
MaskMaterialInformation
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 7.
Subsequent structures are in Figure 3.
Figure 2
Structure of Basic Information Section