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SEMI E116-0705 © SEMI 2002, 2005 2 2.3 This st andard specifi es the concepts, be havior, and message services t h at enable the ho st computer to obtain the equipment data require d for equi pment perform ance tracking …

SEMI E116-0705 © SEMI 2002, 2005 1

SEMI E116-0705

PROVISIONAL SPECIFICATION FOR EQUIPMENT PERFORMANCE

TRACKING

This specification was technically approved by the global Information & Control Committee. This edition

was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was

available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published July 2002;

previously published November 2004.

1 Purpose

1.1 This document provides specification for implementing basic equipment performance tracking for production

equipment. Provisions in this document enable the host computer to track basic equipment performance in an

automated and consistent matter, without operator or host input. This document provides specification for

equipment suppliers to:

 Track basic equipment states (no operator or host input required).

 Track basic equipment states in a modular manner, for both major modules and the overall equipment.

 Report basic equipment state changes to a host computer, at both module and equipment level.

 Report equipment’s time in state to a host computer, at both module and equipment level.

 Report reasons to a host computer for why equipment is blocked from performing its task, at both module and

equipment level.

1.2 Equipment users require the ability to track equipment performance without dependence on user input to

eliminate inaccuracies due to incorrect or untimely input from the user. The ability to track equipment performance

without user input is essential in 300 mm wafer factories where operational scenarios require minimal manual

interaction. EPT defines concepts, behavior, and message services that enable the host computer to obtain the

equipment data required for equipment performance tracking in an automated and consistent matter without operator

or host input.

1.3 EPT enables factory managers to identify the current states of factory equipment, both at the equipment level

and at the module level (e.g., processing chambers), without dependence on user input. EPT enables factory

engineers to evaluate the time that equipment and modules spent in different states and identify areas for

improvement. EPT enables factory engineers to obtain directly from the equipment the reasons why the equipment

or module is prevented from performing. EPT provides industrial engineers the equipment data which, when

combined with external data from the Manufacturing Execution System (MES), will enable accurate calculation of

SEMI E10 states and SEMI E79 metrics at the equipment-level and the module-level. EPT enables automation

engineers to develop reusable host interfaces by using a standardized collection event and data variables to collect

equipment state data.

2 Scope

2.1 The Scope of this standard is to define equipment behavior states and the data required to track basic equipment

performance for production equipment. These requirements are intended to facilitate equipment-level and module-

level state tracking and to communicate state information to the host for simple equipment performance tracking,

without requiring host or operator input.

2.2 Specifically, this document provides:

 An Equipment Performance Tracking (EPT) state model that defines triggers for state changes.

 Specification of data variables required to communicate basic equipment performance data to the host

computer.

 Specification of event messages used to communicate basic equipment performance data to the host computer.

 Requirements for EPT compliance.

SEMI E116-0705 © SEMI 2002, 2005 2

2.3 This standard specifies the concepts, behavior, and message services that enable the host computer to obtain the

equipment data required for equipment performance tracking in an automated and consistent manner, without

operator or host input. It does not specify the report of SEMI E10 states from the equipment to a host computer, as

this information requires user input and is already specified by SEMI E58.

2.4 This standard does not conflict with SEMI E58 nor does it inhibit the equipment’s ability to report out SEMI

E10 states via SEMI E58.

2.5 This standard is a building block towards SEMI E10 and SEMI E79 by providing accurate equipment

information required for SEMI E10 and SEMI E79 metrics, without dependence on operator or host input,

eliminating inaccuracies due to incorrect or untimely input from the user. EPT assists both SEMI E10 and SEMI

E79 by providing a modular approach to equipment performance tracking, allowing the state of the equipment to be

determined by the states of its major modules. EPT assists SEMI E79 by providing task-level detail of the

equipment or module’s current activity, allowing performance metrics to be tracked at the task level.

2.6 This is a provisional standard. In order to have the provisional status removed, the following areas must be

completed:

 Equipment Interlock Information

 Equipment Process Monitoring Information

 Equipment Maintenance Trigger Information

 Application of EPT State Model to load ports and internal buffers

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 This standard applies to semiconductor production equipment. Other types of equipment have not been

examined. However, it may be used for other types of equipment when applicable.

4 Referenced Standards and Documents

4.1 SEMI Standards

SEMI E10  Specification for Definition and Measurement of Equipment Reliability, Availability, and

Maintainability (RAM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E30  Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E58  Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior,

and Services

SEMI E79  Standard for Definition and Measurement of Equipment Productivity

SEMI E90  Specification for Substrate Tracking

SEMI E98  Provisional Standard for the Object-Based Equipment Model (OBEM)

SEMI 101  Provisional Guide for EFEM Functional Structure Model

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

SEMI E116-0705 © SEMI 2002, 2005 3

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 EFEM — Equipment Front End Module

5.1.2 EPT — Equipment Performance Tracking

5.1.3 GEM — Generic Equipment Model [SEMI E30]

5.2 Definitions

5.2.1 EPT module — a major component of the equipment that affects processing or throughput.

5.2.1.1 For purposes of simplification, an EPT module executes one and only one task at a time. Each EPT Module

has an EPT state model that is maintained by the equipment.

5.2.2 EPT state — the state of IDLE, BUSY, or BLOCKED within EPT state model.

5.2.3 event report — a message the equipment sends to the host on the occurrence of a collection event.

5.2.4 fault — an exception.

5.2.5 host — the factory computer system or an intermediate system that represents the factory and the operator to

the equipment.

5.2.6 intended function — a manufacturing function that the equipment was built to perform. This includes

transport functions for transport equipment, measurement functions for metrology equipment, as well as process

functions such as physical vapor deposition and wire bonding. Complete equipment may have more than one

intended function. [SEMI E58]

5.2.7 material — the basic unit of process. For the purposes of this standard, material is a set of one or more

substrates.

5.2.8 module — a major component of equipment that contains at least one material location and performs some

task on material. Equipment modules may be aggregates of equipment subsystems, I/O devices, and other modules.

[SEMI E98]

5.2.9 substrate — the basic unit of material on which work is performed to create a product. Examples include

wafers, die, plates used for masks, flat panels, circuit boards, and leadframes. [SEMI E90]

5.2.10 task — a planned and repeatable activity with an expected duration and a definite beginning and end (e.g.,

Move wafer from cassette to stage, Pre-align wafer, Align reticle, Preheat chamber, Increase vacuum). NOTE:

Actual durations may vary.

5.2.11 trigger — an event that causes a change in the state of the equipment. Examples are changes in sensor

readings, alarms, and messages received from the host, and operator commands.

5.2.12 unit 

any wafer, die, packaged device, or piece thereof (included product and non-product units). [SEMI

E10]

5.2.13 user — any entity interacting with the equipment, either locally as an operator or remotely via the host.

From the equipment’s viewpoint, both the operator and the host represent the user. [SEMI E58]

6 Requirements

6.1 An EPT compliant implementation requires provision of certain capabilities defined by other standards:

accessibility to status information, event reporting, alarm management, and provision of an internal time-and-date

clock. These requirements may be satisfied through compliance to SEMI E30 for the following sets of

requirements:

 Clock Services

 Event Notification

 Status Data Collection