semi合集-English.pdf - 第1292页

SEMI E5-1104 © SEMI 1982, 2004 234 Stream,Function Name (Mnemonic) Direction S16,F16 PRJobMultiCreate Acknowledge S, H<-E Description This message acknowledges the request and reports any errors in the creation of a p…

100%1 / 7923
SEMI E5-1104 © SEMI 1982, 2004 233
.
.
j. <SLOTID
j
>
.
.
n. L,2
1. <CARRIERID
n
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
3b. L,n [MF = substrate, n = # of MID]
1. <MID
1
>
.
.
n. <MID
n
>
4. L,3
1. <PRRECIPEMETHOD
p
>
2. <RCPSPEC
p
>
3. L,m [m = # recipe parameters]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
5. <PRPROCESSSTART
p
>
6. <PRPAUSEEVENT
p
>
Exception
The list for specifying material (item 3a and 3b) is empty (L,0 instead of L,n), when no material is specified for the process job.
The form of data item 3(a or b) depends on the value in MF.
SEMI E5-1104 © SEMI 1982, 2004 234
Stream,Function Name (Mnemonic) Direction
S16,F16 PRJobMultiCreate Acknowledge S,H<-E
Description
This message acknowledges the request and reports any errors in the creation of a process job. ERRTEXT contains the identifier
of process jobs that were not created.
Structure
L,2
1. L,m [m = # jobs created]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F17 PRJobDequeue S,H->E,reply
Description
Used to remove process jobs from the equipment for jobs that have not begun processing.
Structure
L,m [m = # jobs to remove]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
Exception
If m = 0, then de-queue all.
SEMI E5-1104 © SEMI 1982, 2004 235
Stream,Function Name (Mnemonic) Direction
S16,F18 PRJobDequeue Acknowledge S,H<-E
Description
Acknowledge the request to de-queue and report any errors. ERRTEXT will contain the identifier of any jobs that were not de-
queued.
Structure
L,2
1. L,m [m = # jobs removed]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F19 PRGetAllJobs S,H->E
Description
Requests the equipment to return a list of process jobs which have not completed. They may be running or waiting to run.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F20 PRGetAllJobs Send S,H<-E
Description
Returns the requested list of process jobs.
Structure
L,m [m = # jobs in the list]
1. L,2
1. <PRJOBID
1
>
2. <PRSTATE
1
>
.
.
m. L,2
1. <PRJOBID
m
>
2. <PRSTATE
m
>
Exception
If m = 0, then no process jobs are running or waiting to run.