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SEMI C3.54-02 00 © SEMI 1997 , 2000 1 SEMI C3.54-0200 GA S PURITY GUID ELINE F OR S ILANE (SiH 4 ) This g uideline w as technically approved by the Global G a ses Com mittee and is the di rect responsibility of the North…

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SEMI C3.6-0701 © SEMI 1981, 20013
4.4 Notes
NOTE 1: Carrier gases should contain less than 0.1 ppm (mol/mol) carbon monoxide and less than 0.1 ppm (mol/mol) carbon
dioxide.
NOTE 2: Carrier gas purity of helium must be 99.9999%.
Figure 1
G.C. Configuration
Figure 2
Column Configuration for H
2
, N
2
, and O
2
+ Ar, AsH
3
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C3.54-0200 © SEMI 1997, 20001
SEMI C3.54-0200
GAS PURITY GUIDELINE FOR SILANE (SiH
4
)
This guideline was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 15, 1999. Initially available at www.semi.org January 2000, to be published
February 2000. Originally published in 1997.
1 Description
1.1 Silane is a pyrophoric, flammable colorless gas.
2 Specifications
Quality: 99.994%
Impurities Maximum Acceptable
Level (ppm)
Arsine (AsH
3
)1 ppb
Carbon Monoxide (CO) 0.1
Carbon Dioxide (CO
2
)0.1
Chlorosilanes (ionizable chlorides)
including HC1, reported as
chloride (C1
-
)
1
Non-methane Hydrocarbons
(C
2
- C
4
)
0.1 total
Hydrogen (H
2
)50
Methane (CH
4
)0.1
Nitrogen (N
2
)1
Phosphine (PH
3
)0.1 ppb
Disiloxane (H
3
SiOSiH
3
)1
Methyl Silane (SiH
3
-CH
3
)1
Disilane (Si
2
H
6
)1
Aluminum (Al) 0.2 ppba (See NOTE 1.)
Antimony (Sb) 0.2 ppba (See NOTE 1.)
Arsenic (As) 0.2 ppba (See NOTE 1.)
Boron (B) 0.02 ppba (See NOTE 1.)
Gallium (Ga) 0.2 ppba (See NOTE 1.)
Phosphorus (P) 0.02 ppba (See NOTE 1.)
Calcium (Ca) + Chromium (Cr) +
Copper (Cu) + Iron (Fe) +
Potassium (K) + Lithium (Li) +
Magnesium (Mg) + Manganese
(Mn) + Molybdenum (Mo) +
Sodium (Na) + Nickel (Ni) + Lead
(Pb) + Zinc (Zn)
1.0 ppba total (See
NOTE 1.)
Water (H
2
0) (vol/vol) 1
Particles (See NOTE 2.)
TOTAL SPECIFIED
IMPURITIES
56.4033
NOTE 1: To be determined between supplier and user.
NOTE 2: ppba is defined to be atoms of impurity per 10
9
atoms of
silicon.
3 Electrical Specification
Resistivity greater than 10,000 ohm-cm (n-type)
4 Physical Constants
Metric Units US Units
Molecular weight 32.112 32.112
Boiling point at 1 atm.
–112°C –169.6°F
Density of gas at 21.1°C (70°F)
and 1 atm.
1.342 kg/m
3
0.0839 lb/ft
3
Specific gravity of gas at
21.1°C and 1 atm. (air = 1)
1.114 1.114
Density of liquid at boiling
point.
711 kg/m
3
44.39 lb/ft
3
5 Procedures (See NOTE 1)
NOTE 1: Standardized test methods are being developed for
all parameters at the purity level indicated. Until standardized
test methods are published, test methodology shall be
determined by user and producer.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user's attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C3.55-0200 © SEMI 20001
SEMI C3.55-0200
STANDARD FOR SILANE (SiH
4
), BULK
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 15, 1999. Initially available at www.semi.org January 2000; to be published
February 2000.
1 Description
1.1 Silane is a pyrophoric, flammable colorless gas.
2 Specifications
QUALITY: 99.994%
Impurities Maximum Acceptable
Level (ppm)
Gas Phase
Carbon Monoxide (CO) 0.1
Carbon Dioxide (CO
2
)0.1
Chlorosilanes (ionizable chlorides)
including HCl, reported as chloride
(Cl
-
)
1
Non-methane Hydrocarbons
(C
2
-C
4
)
0.1 total
Hydrogen (H
2
)50
Methane (CH
4
)0.1
Nitrogen (N
2
)1
Argon (Ar) 1
Disiloxane (H
3
SiOSiH
3
)1
Methyl Silane (SiH
3
-CH
3
)1
Disilane (Si
2
H
6
)1
Water (H
2
O)(vol/vol) 1
Particles (See NOTE 1.)
Total Specified Impurities 57.4
Deposited Layer
Carbon (C) 0.5 ppma
(See NOTE 2.)
Oxygen (O) 1 ppma (See NOTE 2.)
Aluminum (Al) 0.2 ppba (See NOTE 2.)
Antimony (Sb) 0.2 ppba (See NOTE 3.)
Arsenic (As) 0.2 ppba (See NOTE 3.)
Boron (B) 0.2 ppba (See NOTE 3.)
Gallium (Ga) 0.2 ppba (See NOTE 3.)
Phosphorus (P) 0.2 ppba (See NOTE 3.)
Chromium (Cr)+ Copper (Cu)+
Iron (Fe)+ Nickel (Ni)+ Zinc (Zn)
1.0 ppba
total (See NOTE 3.)
NOTE 1: To be determined between supplier and user.
NOTE 2: ppma is defined to be atoms of impurity per 10
6
atoms of
silicon.
NOTE 3: ppba is defined to be atoms of impurity per 10
9
atoms of
silicon.
3 Electrical Specification
Resistivity greater than 2,000 ohm-cm
(n-type)
4 Physical Constants
Metric Units US Units
Molecular weight 32.112 32.112
Boiling point at 1 atm. -112°C -169°F
Density of gas at 21.1°C
(70°F) and 1 atm.
1.342 kg/m
3
0.0839 lb/ft
3
Specific gravity of gas at
21.1°C and 1 atm (air = 1)
1.114 1.114
Density of liquid at boiling
point
711 kg/m
3
44.39 lb/ft
3
5 Analytical Procedures (se e NOTE 1)
5.1 Carbon Monoxide, Carbon Dioxide, Argon,
Nitrogen and Methane — This procedure is for the
determination of of carbon monoxide, carbon dioxide,
argon, nitrogen and methane in silane using a gas
chromatograph with a discharge ionization detector.
5.1.1 Detection Limit — 30 ppb (mole/mole)
5.1.2 Instrument Parameters
5.1.2.1 Column:
HAYESEP D 60/80, 6.5 m (21.3 ft) by 3.2 mm (1/8 in)
OD by 2.2 mm (0.085 in) ID stainless steel; or
equivalent.
5.1.2.2 Carrier Flow — 25 mL/min helium
5.1.2.3 Sample Volume — 1 mL
5.1.2.4 Temperatures:
Detector 140°C
Column Oven 40°C for 4 min., to 120°C
at 10°C/min., hold 120°C
for 8 min.
Injection Temperature 45°C
5.1.3 Calibration Standards — 1 ppm (mole/mole) for
all components to be tested, balance helium.