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SEMI E81-0600 © 1999, 2 000 27 It does not bury j ob control into material management functions for driving process flows, nor d oes it bury job cont rol into machi ne mana geme nt funct ions for d rivin g process operat…

DocumentRevision

(from Document Mgt)

MaintenanceSpecification

FactorySupervisor

(from Factory Operations Comp)

ResourceTrackingSupervisor

JobSupervisor

(from Job Supervisor AIG)

SupportResource

Person

(from Person Mgt Comp)

Job

(from Job Supervisor AIG)

stored

0..*

compares with

maintenance interval

informs

maintenance

activity due

0..*

defines

0..*0..*

0..*

assigned to

0..*0..*

supervises

NamedEntity

OwnedEntity

Capability

Resource

0..*

possible

0..*

assigned

0..*

MaintenanceJob

0..*

assigned to

Resource Abstract

Interface Group

(part)

Figure 10

Resource Tracking and Maintenance Architecture

7.3.4.2 Job Architecture Concepts

7.3.4.2.1 A job represents a unit of work requested of

and performed (or facilitated) by a factory entity that

results in some change to the overall factory state.

There are several important aspects of a job within the

CIM Framework:

• A job typically takes a non-zero time to perform

and has a non-zero chance of refusal or failure.

• A job may encapsulate a decomposition into a

combination of jobs/tasks/activities.

• There is a notion of higher-level jobs and lower-

level jobs. Coordination of lower-level jobs are

delegated to other job supervisors to ensure that the

higher-level job is completed.

• There is a job requestor.

7.3.4.2.2 The CIM Framework specifies a number of

structures for job control. The complexity and

variability of the factory requires some organizational

structure and separation of manufacturing tasks.

Breaking up a complex task into a coordinated

interoperation of simpler tasks enables practical

solutions to complex problems (the principle of “divide

and conquer”). This results in a key organizational

structure based on the factory resource hierarchy of

Figure 7 and Figure 8 , with the separation of tasks

summarized in Section 7.3.3.3. The job control

architecture defines how tasks are assigned and

coordinated across the hierarchy of factory resources.

7.3.4.2.3 Another key job structure is the relationship

between manufacturing tasks and the material and

resources used to carry out the task. For example,

Factory Operations is responsible for efficiently

allocating machine resources with the required

processing capability to the material work-in-progress

to drive the material through its process flow. A job is a

combination of a requested task and the material and

resources needed to execute that task (see Figure 13).

The relationship between task, material and resource,

combined with a hierarchical job structure (based on a

hierarchical resource structure) results in complex

relationships between tasks, material, and resources at

multiple levels.

7.3.4.2.4 Given the complexity, scope and variability

(chance of failure or partial success) of jobs, the CIM

Framework separates job control into explicit functions.

It does not bury job control into material management

functions for driving process flows, nor does it bury job

control into machine management functions for driving

process operations. The CIM Framework makes job

control explicit, providing an architectural structure to

attach decision support logic (such as scheduling

utilities), business processes (workflow) and business

rules that enforce operational policy. Further, the CIM

Framework distributes and coordinates job control

among factory jobs, production machine jobs, transport

jobs, and maintenance jobs. This allows job control to

manage “local” complexity while coordinating factory-

wide operations toward “global” objectives.

7.3.4.3 Hierarchical Task Structure

7.3.4.3.1 At the lowest level of the factory hierarchy

(the resource level in Figure 7), the tasks are single

process or metrology operations or material

movements. Through a complex, context-dependent

combination of single tasks, products are manufactured

and delivered to customers. This complex combination

of single tasks is a task structure as shown in Figure 11.

In manufacturing operations, these structures are pre-

defined as task procedures, work flows, process

specifications, etc. To accommodate manufacturing

variability and exceptions, though, the structures must

also be adjusted and modified as they are executed. For

example, as factory operations selects specific machine

resources to perform process steps, it may insert

machine-dependent setup tasks and operation

sequences, it may modify step specifications (recipes)

with machine-dependents settings, or it may insert

transport steps to get the material to the machine.

7.3.4.3.2 Notice in Figure 11 that tasks of a higher

level are decomposed into combinations of tasks for

lower level resources. Each manufacturing resource has

a thread of tasks that must be coordinated with the tasks

of other resources. The higher level task is completed

when the combination of lower level tasks is completed.

Figure 11 illustrates this with the coordination of

material movement and processing operations and with

the coordination of operations within the processing

equipment. Resource maintenance, advanced process

control calculations and other tasks must also be

coordinated with material processing, inspection and

movement tasks. The role of job control is to

decompose, coordinate, monitor, adjust, and report on

this hierarchical structure of tasks.

Task: Fill Order

Task: Produce Lot 1

Task: Produce Lot 2 Task: Produce Lot 4

Task: Produce Lot 3

Process

. . .

Move Move

Process

Operations

Time

Level

. . .

Resource

Process

Transport Machine

activity thread

Production Machine

activity thread

Machine Resource

activity thread

Figure 11

Hierarchical Task Structure

Task

Start

Event

End

Event

Sub-Task Sub-Task Sub-Task

Start

Event

End

Event

Start

Event

End

Event

Start

Event

End

Event

Request

Sub-RequestSub-

Request

Sub-

Request

ID: w

Spec: x

Inputs: y

Results: z

ID: q

Spec: r

Inputs: s

Results: t

ID:

Spec:

Inputs:

Results:

Task

Specification

ID: a

Spec: b

Inputs: c

Results: d

time: now

Job History

Time

Level

Now

n+1

n-1

Figure 12

Elements of a Hierarchical Task

7.3.4.4 Elements of a Task

7.3.4.4.1 The Hierarchical Task Structure of Figure 11

defines the requirements for a multi-level task model.

Figure 12 shows the elements of a hierarchical task,

indicating some of the additional data for an overall job

control structure. A task is requested from a superior

level. Along with the request is a task specification,

which is often a template or procedure for how to carry

out the task, including a combination of subtasks and

monitor and adjustment checkpoints along the way.

7.3.4.4.2 As each task is started, completed, modified

or aborted, the job control for the task publishes

appropriate events or other notifications. The task

endpoints illustrated in Figure 12 as triangles represent

factory states or some specific aspect of a factory state.

When a task is completed, the factory state is changed

in the specified way. For example, after a wafer

deposition task, the product state is changed, with a

layer of oxide deposited on all the wafers in a lot. When

a movement task is completed, the product location

state is changed to the load port for a machine to

perform the next process operation. These intended

factory states often have side effects on other factory

states. For example, after a process operation, the

equipment state changes to reflect its utilization,

consumables consumption, etc. Job control achieves

orderly, coordinated, efficient changes to factory state

that result in products, that is, that efficiently turn raw

wafers into product wafers.

7.3.4.4.3 As the job control executes the task, task

results are collected in a job history that includes a job

identifier, the (modified) specification used, and

recorded inputs and results. Higher level job results

could be a roll-up, an abstraction, or simply pointers to

lower level job results.

7.3.4.5 Job Structure

7.3.4.5.1 A job is a relationship between all the

elements necessary to perform a task with specific

control functionality to carry out the task in light of

manufacturing variability. A job implements a specified

task on specified material using specific resources. The

job structure of Figure 13 is the relationship mechanism

for controlling and changing factory material and

resource states and recording job results in associated

job histories. That is, the job instantiates and manages

the relationships in the structure of Figure 13.

Resources Materials

Job Control

Job Requestor

Requested

Task

Material HistoryJob Control

History

Resource History

Job

Figure 13

Job Structure