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SEMI E125.1-0305 © SEMI 2005 2 Figure 20 StateMachineInstanceType Global complexType .......................................................................... ............. 29 Figure 21 GetExceptionsRe quest Global Elem…

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SEMI E125.1-0305 © SEMI 2005 1
SEMI E125.1-0305
PROVISIONAL SPECIFICATION FOR SOAP BINDING FOR
EQUIPMENT SELF DESCRIPTION (EqSD)
This provisional specification was technically approved by the Global Information and Control Committee
and is the direct responsibility of the North American Information and Control Committee. Current edition
approved by the North American Regional Standards Committee on December 10, 2005. Initially available
at www.semi.org February 2005; to be published March 2005.
Table of Contents
1 Purpose....................................................................................................................................................................4
1.1 SOAP Implementation Mapping.......................................................................................................................4
2 Scope.......................................................................................................................................................................4
2.1 Specification Scope...........................................................................................................................................4
3 Limitations..............................................................................................................................................................4
3.1 Provisional Specification..................................................................................................................................4
4 Referenced Standards..............................................................................................................................................4
4.1 SEMI Standards................................................................................................................................................4
4.2 OMG Standards................................................................................................................................................4
4.3 W3C Standards.................................................................................................................................................4
4.4 Other Specifications .........................................................................................................................................5
5 Terminology............................................................................................................................................................5
5.1 Abbreviations and Acronyms............................................................................................................................5
5.2 Definitions ........................................................................................................................................................5
6 Conventions ............................................................................................................................................................5
6.1 Translating UML to XML Schema....................................................................................................................5
6.2 Documenting XML Schema and WSDL Files...................................................................................................6
6.3 Documenting XML Schema with Diagrams......................................................................................................7
6.4 XML Schema Sample........................................................................................................................................7
6.5 Translating UML to WSDL...............................................................................................................................9
7 Mapping of SEMI E125 UML to XML Schema and WSDL..................................................................................9
7.1 WSDL Organization .........................................................................................................................................9
7.2 EquipmentMetadataManager.........................................................................................................................10
7.3 MetadataClient...............................................................................................................................................42
List of Figures
Figure 1 XML Schema Example Diagram ....................................................................................................................8
Figure 2 XML for Sample .............................................................................................................................................8
Figure 3 XML Schema and WSDL File Organization ................................................................................................10
Figure 4 WSDL and XML Schema Files for SEMI E125...........................................................................................10
Figure 5 Mapping the EquipmentMetadataManager to a WSDL portType.................................................................12
Figure 6 GetUnitsRequest Global Element .................................................................................................................13
Figure 7 GetUnitsResponse Global Element...............................................................................................................13
Figure 8 GetTypeDefinitionsRequest Global Element................................................................................................15
Figure 9 GetTypeDefinitionsResponse Global Element..............................................................................................15
Figure 10 ParameterTypeDefinitionType Global complexType .................................................................................16
Figure 11 VariableTypeType Global complexType....................................................................................................20
Figure 12 ArrayTypeType Global complexType ........................................................................................................21
Figure 13 StructureTypeType Global complexType ...................................................................................................22
Figure 14 EnumeratedTypeType Global complexType...............................................................................................23
Figure 15 GetStateMachinesRequest Global Element.................................................................................................24
Figure 16 GetStateMachinesResponse Global Element ..............................................................................................25
Figure 17 StateMachineType Global complexType....................................................................................................25
Figure 18 GetSEMIObjTypesRequest Global Element...............................................................................................28
Figure 19 GetSEMIObjTypesResponse Global Element.............................................................................................28
SEMI E125.1-0305 © SEMI 2005 2
Figure 20 StateMachineInstanceType Global complexType.......................................................................................29
Figure 21 GetExceptionsRequest Global Element ......................................................................................................31
Figure 22 GetExceptionsResponse Global Element....................................................................................................32
Figure 23 GetEquipmentStructureRequest Global Element........................................................................................33
Figure 24 GetEquipmentStructureResponse Global Element......................................................................................33
Figure 25 GetEquipmentNodeDescriptionsRequest Global Element ..........................................................................35
Figure 26 GetEquipmentNodeDescriptionsResponse Global Element........................................................................35
Figure 27 EquipmentNodeDescriptionType Global complexType .............................................................................36
Figure 28 ParameterType Global complexType..........................................................................................................37
Figure 29 GetLatestRevisionRequest ..........................................................................................................................40
Figure 30 GetLatestRevisionResponse Global Element..............................................................................................40
Figure 31 NotifyOnRevisionsRequest Global Element...............................................................................................41
Figure 32 NotifyOnRevisionsResponse Global Element.............................................................................................42
Figure 33 MetadataRevisedNotification Global Element............................................................................................44
List of Tables
Table 1 Example Translation Table...............................................................................................................................6
Table 2 Example Translation Table for Operation Input/Output Arguments ................................................................6
Table 3 Example Schema/WSDL Document Description Table...................................................................................6
Table 4 Altova XMLSPY Schema Diagram Symbols...................................................................................................7
Table 5 Example Interface WSDL Port Type Table......................................................................................................9
Table 6 Example Interface WSDL Binding Table.........................................................................................................9
Table 7 Example Operation Binding Table ...................................................................................................................9
Table 8 Example PortType Operation Table .................................................................................................................9
Table 9 XML Schema..................................................................................................................................................11
Table 10 EquipmentMetadataManager PortType Definitions.....................................................................................11
Table 11 EquipmentMetadataManager Binding Definitions.......................................................................................11
Table 12 EquipmentMetadataManager Port Type.......................................................................................................12
Table 13 EquipmentMetadataManager Binding..........................................................................................................12
Table 14 GetUnits Operation Binding.........................................................................................................................13
Table 15 GetUnits PortType Operation.......................................................................................................................13
Table 16 EquipmentMetadataManager Binding..........................................................................................................13
Table 17 Translation Table for Output Arguments for the GetUnits Operation..........................................................14
Table 18 E125 Unit UnitType Translation Table ...................................................................................................14
Table 19 GetTypeDefinitions Operation Binding........................................................................................................14
Table 20 GetUnits PortType Operation.......................................................................................................................14
Table 21 EquipmentMetadataManager Binding..........................................................................................................15
Table 22 Translation Table for Output Arguments for the GetUnits Operation..........................................................15
Table 23 SEMI E125 ParameterTypeDefinition ParameterTypeDefinitionType Translation Table......................16
Table 24 SEMI E125 Type Description Mapping Table .............................................................................................17
Table 25 SECS-II Type Description Mapping Table...................................................................................................17
Table 26 E125 StringType StringTypeType Translation Table..............................................................................18
Table 27 SEMI E125 BinaryType Base64BinaryTypeType Translation Table .....................................................18
Table 28 SEMI E125 IntegerType
ByteTypeType Translation Table....................................................................18
Table 29 SEMI E125 UnitConfig UnitConfigArrayType Translation Table..........................................................18
Table 30 SEMI E125 IntegerType ShortTypeType Translation Table...................................................................19
Table 31 SEMI E125 IntegerType IntTypeType Translation Table .......................................................................19
Table 32 E125 IntegerType LongTypeType Translation Table..............................................................................19
Table 33 SEMI E125 RealType FloatTypeType Translation Table .......................................................................20
Table 34 E125 RealType DoubleTypeType Translation Table ..............................................................................20
Table 35 SEMI E125 ArrayType ArrayTypeType Translation Table ....................................................................21
Table 36 SEMI E125 StructureType StructureTypeType Translation Table..........................................................23
Table 37 SEMI E125 Field FieldType Translation Table.......................................................................................23
Table 38 SEMI E125 EnumerationType EnumerationTypeType Translation Table..............................................23
Table 39 SEMI E125 EnumeratedString EnumeratedStringType Translation Table .............................................24
SEMI E125.1-0305 © SEMI 2005 3
Table 40 SEMI E125 EnumeratedInteger EnumeratedIntegerType Translation Table ..........................................24
Table 41 GetStateMachines Operation Binding ..........................................................................................................24
Table 42 GetStateMachines PortType Operation ........................................................................................................24
Table 43 EquipmentMetadataManager Binding..........................................................................................................24
Table 44 Translation Table for Output Arguments for the GetStateMachines Operation ...........................................26
Table 45 SEMI E125 StateMachine StateMachineType Translation Table ...........................................................26
Table 46 SEMI E125 State StateType Translation Table .......................................................................................26
Table 47 SEMI E125 Transition TransitionType Translation Table ......................................................................26
Table 48 SEMI E125 Event EventType Translation Table ....................................................................................27
Table 49 GetSEMIObjTypes Operation Binding ........................................................................................................27
Table 50 GetSEMIObjTypes PortType Operation ......................................................................................................27
Table 51 EquipmentMetadataManager Binding..........................................................................................................27
Table 52 Translation Table for Output Arguments for the GetSEMIObjTypes Operation .........................................28
Table 53 SEMI E125 SEMIObjType SEMIObjTypeType Translation Table........................................................28
Table 54 SEMI E125 StateMachineInstance StateMachineInstanceType Translation Table.................................29
Table 55 Example Parameter References ....................................................................................................................30
Table 56 SEMI E125 EventToParameterMap EventToParameterMapType Translation Table.............................30
Table 57 GetExceptions Operation Binding................................................................................................................31
Table 58 GetExceptions PortType Operation..............................................................................................................31
Table 59 EquipmentMetadataManager Binding..........................................................................................................31
Table 60 Translation Table for Output Arguments for the GetExceptions Operation.................................................32
Table 61 SEMI E125 EventToParameterMap EventToParameterMapType Translation Table.............................32
Table 62 GetEquipmentStructure Operation Binding..................................................................................................33
Table 63 GetEquipmentStructure PortType Operation................................................................................................33
Table 64 EquipmentMetadataManager Binding..........................................................................................................33
Table 65 Translation Table for Output Arguments for the GetEquipmentStructure Operation...................................34
Table 66 GetEquipmentNodeDescriptions Operation Binding....................................................................................34
Table 67 GetEquipmentNodeDescriptions PortType Operation.......................................................................
...........34
Table 68 EquipmentMetadataManager Binding..........................................................................................................34
Table 69 Translation Table for Input Arguments for the GetEquipmentNodeDescriptions Operation .......................35
Table 70 Translation Table for Output Arguments for the GetEquipmentNodeDescriptions Operation ....................36
Table 71 SEMI E125 EquipmentNodeDescription EquipmentNodeDescriptionType Translation Table..............37
Table 72 SEMI E125 Parameter ParameterType Translation Table.......................................................................38
Table 73 SEMI E125 Constraint ConstraintType Translation Table......................................................................38
Table 74 SEMI E125 AssociatedParameter ParameterAssociationType Translation Table...................................38
Table 75 SEMI E125 ParameterClassification ParameterClassificationType Translation Table ...........................39
Table 76 SEMI E125 ReadWrite ReadWriteType Translation Table.....................................................................39
Table 77 GetLatestRevision Operation Binding..........................................................................................................39
Table 78 GetLatestRevision PortType Operation........................................................................................................39
Table 79 EquipmentMetadataManager Binding..........................................................................................................40
Table 80 Translation Table for Output Arguments for the GetLatestRevision Operation...........................................40
Table 81 NotifyOnRevisions Operation Binding ........................................................................................................41
Table 82 NotifyOnRevisions PortType Operation ......................................................................................................41
Table 83 EquipmentMetadataManager Binding..........................................................................................................41
Table 84 Translation Table for Input Arguments for the NotifyOnRevisions Operation............................................42
Table 85 Translation Table for Output Arguments for the GetUnits Operation..........................................................42
Table 86 XML Schema................................................................................................................................................42
Table 87 MetadataClient PortType Definitions...........................................................................................................43
Table 88 EquipmentMetadataManager Binding Definitions.......................................................................................43
Table 89 EquipmentMetadataManager Port Type.......................................................................................................43
Table 90 EquipmentMetadataManager Binding..........................................................................................................43
Table 91 MetadataRevised Operation Binding............................................................................................................44
Table 92 MetadataRevised PortType Operation..........................................................................................................44
Table 93 EquipmentMetadataManager Binding..........................................................................................................44
Table 94 Translation Table for Input Arguments for the NotifyOnRevisions Operation............................................44
Table 95 SEMI E125 RevisionNotice
Revision Translation Table ........................................................................45