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SEMI S4-0304 © SEMI 1992, 2004 5 RELATED INFORMATION 1 CLASSIFICATIONS OF CHEMICALS NOTICE : This rel ated inform ation is not an official part of SEM I S4 and was derived from task force members' knowledge, S4-92, …
SEMI S4-0304 © 1992, 2004 4
7.2 Containing Different Chemicals in a Cabinet
7.2.1 Except as described below, chemicals should be
contained in different gas cabinets if they do not
possess exactly the same classification symbols.
7.2.2 An inert (I) gas does not have to be separated
from any other chemical.
7.2.3 An irritant (IRR) chemical may be contained in a
gas cabinet with a chemical that is not an irritant, if the
remaining classification symbols are exactly the same.
7.2.4 A toxic (T) chemical may be contained in a gas
cabinet with a highly toxic (HT) chemical, if the
remaining classification symbols are exactly the same.
NOTE 5: Related Information 2 contains additional
information and references on the separation of chemicals, as
practiced or regulated in specific geographical regions.
8 Related Documents
8.1 SEMI Standards
F13 — Guide for Gas Source Control Equipment
F14 — Guide for the Design of Gas Source Equipment
Enclosures
S14 — Safety Guidelines for Fire Risk Assessment and
Mitigation for Semiconductor Manufacturing
Equipment
S18 — Environmental, Health, and Safety Guideline
for Silane Family Gases Handling
8.2 Building Officials and Code Administrators
7
BOCA National Fire Prevention Code
8.3 Compressed Gas Association
8
P-1 — Safe Handling of Compressed Gas in Containers
8.4 International Conference of Building Officials and
Western Fire Chiefs Association
9
Uniform Fire Code
8.5 Southern Building Code Conference International,
Inc
10
SBCCI Standard Fire Prevention Code
8.6 United States Code of Federal Regulations
11
7 Building Officials & Code Administrators International, Inc. , 4051
West Flossmor Road, Country Club Hills, IL 60477
8 Compressed Gas Association, 4221 Walney Road, 5th Floor,
Chantilly VA 20151-2923., Phone: 703-788-2700, Fax: 703-961-
1831, Email:
cga@cganet.com , www.cganet.com
9 International Fire Code Institute, 5360 Workman Mill Road,
Whittier, California 90601-2298, USA, www.ifci.org
10 Southern Building Code Congress International (SBCCI), 900
Montclair Road, Birmingham, AL 35213
29 CFR 1910.1200 — Hazard Communication
49 CFR 172.101 — Hazardous Materials Regulations
and Procedures
8.7 Dangerous Properties of Industrial Materials — N.
Irving Sax, Seventh Edition, 1988.
8.8 Matheson Gas Data Book — 7th Edition
12
NOTICE: SEMI makes no warranties or
representations as to the suitability of the Safety
Guidelines set forth herein for any particular
application. The determination of the suitability of the
Safety Guidelines is solely the responsibility of the
user. Users are cautioned to refer to manufacturer' s
instructions, product labels, product data sheets, and
other relevant literature, respecting any materials or
equipment mentioned herein. These Safety Guidelines
are subject to change without notice.
By publication of this Safety Guideline, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any item
mentioned in this Safety Guideline. Users of this
guideline are expressly advised that determination of
any such patent rights or copyrights, and the risk of
infringement of such rights are entirely their own
responsibility.
11 The Office of the Federal Register, Washington, D.C. 20037
12 Available from www.mathesontrigas.com
SEMI S4-0304 © SEMI 1992, 2004 5
RELATED INFORMATION 1
CLASSIFICATIONS OF CHEMICALS
NOTICE: This related information is not an official part of SEMI S4 and was derived from task force members'
knowledge, S4-92, and various references. This related information was approved for publication by letter ballot on
December 4, 2003.
R1-1 Classifications of chemicals
R1-1.1 Table R1-1 provides the classifications of some
chemicals in common use in the semiconductor and flat
panel industries. This table is sorted alphabetically by
name of the chemical. (See Table 1 for the definitions
of the symbols.)
NOTE 1: The classifications are presented in alphabetical
order for each chemical so that classifications can be
compared, and the second table could be created, more easily.
There is no technical significance to the order in which the
classifications are listed.
R1-1.2 Table R1-2 contains the same information as
Table R1-1, but it is sorted by classification to be a
more convenient way to identify chemicals that may be
contained in the same gas cabinet.
Table R1-1 Classifications, sorted by chemical
name
Chemicals Classifications
Ammonia (NH
3
) CB-F
Argon (Ar) I
Arsenic Pentafluoride (AsF
5
) CA-HT-OHH-
WR
Arsine (AsH
3
) F-HT-OHH
Boron Trichloride (BCl
3
) CA-WR
Boron Trifluoride (BF
3
) CA-T-WR
Carbon Dioxide (CO
2
) I
Carbon Tetrachloride (CCl
4
) OHH
Chlorine (Cl
2
) CA-O-T
Diborane (B
2
H
6
) HT-IRR-P-WR
Dichlorosilane (SiCl
2
H
2
) CA-P-T-WR
Diethyl Telluride ((C
2
H
5
)
2
Te) P-IRR
Diethyl Zinc ((C
2
H
5
)
2
Zn) CA-P-UR-WR
Dimethyl Zinc ((CH
3
)
2
Zn) CA-P-UR-WR
Germane (GeH
4
) F-IRR-T-UR
Halocarbon 11 (trichlorofluoromethane,
CCl
3
F)
I
Halocarbon 115 (chloropentafluoroethane,
C
2
ClF
5
)
I
Halocarbon 116 (hexafluoroethane, C
2
F
6
) I
Halocarbon 12 (dichlorodifluoromethane,
CCl
2
F
2
)
I
Halocarbon 13 (chlorotrifluoromethane,
CClF
3
)
I
Chemicals Classifications
Halocarbon 13B1
(bromotrifluoromethane, CBrF
3
)
I
Halocarbon 14 (tetrafluoromethane, CF
4
) I
Halocarbon 23 (fluoroform, CHF
3
) I
Helium (He) I
Hydrogen (H
2
) F
Hydrogen Chloride (HCl) CA
Hydrogen Fluoride (HF) CA-T
Hydrogen Sulfide (H
2
S) T-F-IRR
Methyl Chloride (CH
3
Cl) F-IRR
Methyl Fluoride (CH
3
F) F-IRR
Nitric Oxide (NO) IRR-O-T
Nitrogen (N
2
) I
Nitrogen Trifluoride (NF
3
) IRR-O
Nitrous Oxide (N
2
O) O
Oxygen (O
2
) O
Perfluoropropane (C
3
F
8
) I
Phosphine (PH
3
) HT-P
Phosphorous Pentafluoride (PF
5
) CA-T-WR
Silane (SiH
4
) P
Silicon Tetrachloride (SiCl
4
) CA-WR
Silicon Tetrafluoride (SiF
4
) CA-T-WR
Sulfur Hexafluoride (SF
6
) I
Trichlorosilane (SiCl
3
H) CA-F-UR
Triethyl Aluminum ((C
2
H
5
)
3
Al) P
Trimethyl Aluminum ((CH
3
)
3
Al) P
Trimethyl Antimony ((CH
3
)
3
Sb) F-T
Trimethyl Arsine ((CH
3
)
3
As) F-T
Trimethyl Gallium ((CH
3
)
3
Ga) P
Trimethyl Indium ((CH
3
)
3
In) P
Trimethyl Phosphine ((CH
3
)
3
P) F-T
Tungsten Hexafluoride (WF
6
) CA-T-WR
Note 1: Additional chemicals may be used at the present time or may
be suggested in the future. Any new chemical should be categorized
in a way that chemicals of similar chemical characteristics are treated.
If detailed chemical data are not available, the chemical should be
considered to present unkown hazards and should be stored with only
inert chemicals.
SEMI S4-0304 © 1992, 2004 6
Table R1-2 Classifications, sorted by
Classifications
Classifications Chemicals
CA Hydrogen Chloride
CA-F-UR Trichlorosilane
CA-HT-OHH-WR Arsenic Pentafluoride
CA-O-T Chlorine
CA-P-T-WR Dichlorosilane
CA-P-UR-WR Diethyl Zinc
CA-P-UR-WR Dimethyl Zinc
CA-T Hydrogen Fluoride
CA-T-WR Boron Trifluoride
CA-T-WR Phosphorous Pentafluoride
CA-T-WR Silicon Tetrafluoride
CA-T-WR Tungsten Hexafluoride
CA-WR Boron Trichloride
CA-WR Silicon Tetrachloride
CB-F Ammonia
F Hydrogen
F-HT-OHH Arsine
F-IRR Methyl Chloride
F-IRR Methyl Fluoride
F-IRR-T-UR Germane
F-T Trimethyl Antimony
F-T Trimethyl Arsine
F-T Trimethyl Phosphine
HT-IRR-P-WR Diborane
HT-P Phosphine
I Argon
I Carbon Dioxide
I Halocarbon 14 (tetrafluoromethane)
Classifications Chemicals
I Halocarbon 116 (hexafluoroethane)
I Helium
I Nitrogen
I Perfluoropropane
I Sulfur Hexafluoride
I Halocarbon 11
(trichlorofluoromethane)
I Halocarbon 12
(dichlorodifluoromethane)
I Halocarbon 13
(chlorotrifluoromethane)
I Halocarbon 13B1
(bromotrifluoromethane)
I Halocarbon 23 (fluoroform)
I Halocarbon 115
(chloropentafluoroethane)
IRR-O Nitrogen Trifluoride
IRR-O-T Nitric Oxide
O Nitrous Oxide
O Oxygen
OHH Carbon Tetrachloride
P Silane
P Triethyl Aluminum
P Trimethyl Aluminum
P Trimethyl Gallium
P Trimethyl Indium
P-IRR Diethyl Telluride
T-F-IRR Hydrogen Sulfide