semi合集-English.pdf - 第5516页

SEMI P10-0705 © SEMI 1990, 2005 11 END_REGISTR <cd_group> = START_CD [< cd_definition >] [NUMBER_OF_CDS] { [ CD_SITE_ID ] CD_LOCATION } [ CD_MATRIX_FILE_NAME ] END_CD <cd_definition> = [ CD_QUALITY_ID ]…

SEMI P10-0705 © SEMI 1990, 2005 10

[TRANSMISSION_MARK_DRAWING] ]

[PHASE_ANGLE_TARGET

[PHASE_ANGLE_REFERENCE_ONLY]

[PHASE_ANGLE_TOLERANCE]

[PHASE_ANGLE_RANGE] [PHASE_ANGLE_ERROR]

{PHASE_ANGLE_EQUIP_REQD [PHASE_ANGLE_MODE_REQD] }

{ [

PHASE_ANGLE_SITE_ID] PHASE_ANGLE_MARK_LOCATION }

[

PHASE_ANGLE_MARK_FEATURE]

[

PHASE_ANGLE_MARK_LOCATION_DRAWING]

[

PHASE_ANGLE_MARK_DRAWING] ]

[ETCH_DEPTH_TARGET

[ETCH_DEPTH_REFERENCE_ONLY]

[ETCH_DEPTH_TOLERANCE]

[ETCH_DEPTH_RANGE] [ETCH_DEPTH_ERROR]

{ETCH_DEPTH_EQUIP_REQD [ETCH_DEPTH_MODE_REQD] }

{ [

ETCH_DEPTH_SITE_ID] ETCH_DEPTH_MARK_LOCATION }

[

ETCH_DEPTH_MARK_FEATURE]

[

ETCH_DEPTH_MARK_LOCATION_DRAWING]

[ETCH_DEPTH_MARK_DRAWING] ]

END_PHASE_SHIFT

<registration> = START_REGISTR [

REGISTR_QUALITY_ID]

[REGISTR_ERROR] [REGISTR_SCALE [REGISTR_SCALE_REFERENCE_ONLY] ]

[REGISTR_RESIDUAL [REGISTR_RESIDUAL_REFERENCE_ONLY] ]

[REGISTR_THREE_SIGMA [REGISTR_THREE_SIGMA_REFERENCE_ONLY] ]

[REGISTR_RESIDUAL_THREE_SIGMA

[REGISTR_RESIDUAL_THREE_SIGMA_REFERENCE_ONLY] ]

[REGISTR_TOLERANCE]

[REGISTR_ORTHO [REGISTR_ORTHO_REFERENCE_ONLY] ]

[REGISTR_RELATIVE [REGISTR_RELATIVE_REFERENCE_ONLY] ]

{REGISTR_REF_MASK_ID REGISTR_REF_MASK_SET_ID}

{REGISTR_REF_MASK_NAME REGISTR_REF_MASK_SET_NAME

[REGISTR_REF_MASK_SET_VERSION] }

{REGISTR_EQUIP_REQD} {EQUIP_SITE_REQD}

[REGISTR_STD_GRID] {REGISTR_REF_METHOD_REQD}

[REGISTR_ALGORITHM] [REGISTR_COMPENSATION_TEMPERATURE]

{ [REGISTR_MARK_ID] [MASK_REGISTR_MARK] [

CELL_REGISTR_MARK]

[MEASURE_FILE_NAME]

[

REGISTR_MARK_FEATURE]

[

REGISTR_MARK_LOCATION_DRAWING] [REGISTR_MARK_DRAWING]

[REGISTR_MARK_SEPARATION REGISTR_MARK_COUNT] }

SEMI P10-0705 © SEMI 1990, 2005 11

END_REGISTR

<cd_group> = START_CD

cd_definition>]

[NUMBER_OF_CDS]

{ [

CD_SITE_ID] CD_LOCATION } [CD_MATRIX_FILE_NAME]

END_CD

<cd_definition> = [

CD_QUALITY_ID] [CD_DATA] [CD_DIGITIZED] [CD_TONE_CLEAR]

[

CD_MORPHOGRAPHY]

[

CD_PERCENT_CLEAR] [CD_PERCENT_CLEAR_WINDOW]

[CD_TARGET] [CD_ORIENTATION] [

CD_PITCH]

[

CD_FEATURE] [CD_LOCATION_DRAWING] [CD_DRAWING]

[CD_REFERENCE_ONLY]

[CD_TOLERANCE]

[CD_RANGE] [CD_THREE_SIGMA]

[CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]

[CD_STD] [CD_CORRELATION_ID]

{CD_EQUIP_REQD} {EQUIP_SITE_REQD}

<cd_set> = START_CD_SET

{

CD_GROUP_NAME}

[

CD_REFERENCE_ONLY]

[

CD_QUALITY_ID]

[

CD_TOLERANCE] [CD_RANGE] [CD_THREE_SIGMA]

[

CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]

[

CD_STD] [CD_CORRELATION_ID]

END_CD_SET

<cd_xy_definition> = START_CD_XY_DEFINITION

{CD_X_GROUP} {CD_Y_GROUP}

cd_xy_site>}

[

CD_XY_TOLERANCE] [CD_XY_DEVIATION]

[

CD_XY_REFERENCE_ONLY]

END_CD_XY_DEFINITION

<cd_xy_site> = START_CD_XY_SITE

{ [

CD_HORIZONTAL_ID] CD_HORIZONTAL_LOCATION

[

CD_VERTICAL_ID] CD_VERTICAL_LOCATION }

END_CD_XY_SITE

<cd_iso_dense_definition> = START_CD_ISO_DENSE

{

CD_ISO_GROUP} {CD_DENSE_GROUP}

[

CD_ISO_DENSE_TOLERANCE]

[

CD_ISO_DENSE_REFERENCE_ONLY]

END_CD_ISO_DENSE

<opc_definition> = START_OPC

[OPC_TYPE [OPC_MINIMUM_FEATURE_SIZE] [OPC_MINIMUM_GAP]

[OPC_PATTERN_SEPARATE] [OPC_PATTERN_MODIFIABLE] ]

END_OPC

<defect_definition> = START_DEFECT_DEFINITION [DEFECT_QUALITY_ID]

[VISUAL_INSPECTION_OK] [VISUAL_INSPECTION_REQD]

{VISUAL_INSP_CRITERIA}

[AUTO_INSPECTION_REQD] [DIE_TO_DIE_INSPECTION]

[DEFECT_SIZE] [DEFECT_SIZE_CL] [DEFECT_SIZE_DK]

[DEFECT_SIZE_CL_ADJ] [DEFECT_SIZE_CL_ADJ_REP]

[DEFECT_SIZE_DK_ADJ] [DEFECT_SIZE_DK_ADJ_REP]

[DEFECT_SIZE_CL_ISO] [DEFECT_SIZE_CL_ISO_REP]

[DEFECT_SIZE_DK_ISO] [DEFECT_SIZE_DK_ISO_REP]

[DEFECT_DENSITY] [DEFECT_COUNT] [DEFECT_COUNT_REP]

[DEFECTIVE_DIE_DENSITY] [DEFECTIVE_DIE_COUNT]

[DEFECTIVE_DIE_COUNT_REP]

[PERCENT_DEFECTIVE_DIE]

[EDGE_ROUGHNESS]

{INSPECTION_AREA} {INSPECTION_AREA_EXCLUDE}

{SCRATCH_SIZE_FRONT {SCRATCH_INSP_AREA {SCRATCH_INSP_EXCLUDE }}}

{SCRATCH_SIZE_BACK {SCRATCH_INSP_AREA {SCRATCH_INSP_EXCLUDE }}}

[GOOD_FIELDS]

{DEFECT_EQUIP_REQD {EQUIP_SITE_REQD}

[DEFECT_INSP_MODE_REQD]

[DEFECT_INSP_PIXEL_SIZE_REQD]

{ DEFECT_TYPE DEFECT_INSP_SENSITIVITY_REQD

{ BIN_SIZE SEVERITY_CRITERION_REQD } }

[ DEFECT_SETUP_FILE_NAME_REQD] }

database_inspection>]

[<repair_definition>]

END_DEFECT_DEFINITION

<database_inspection> = DATABASE_INSPECTION [PRICE]

[DATABASE_SOURCE]

[DATABASE_TOP_CELL DATABASE_LAYER]

[DATABASE_FILE_NAME]

[DATABASE_UNIT] [USER_UNIT]

[DATABASE_WITH_JOB [DATABASE_JOB_NAME DATABASE_JOB_LEVEL] ]

{DATABASE_AREA}

<repair_definition> = START_REPAIR_DEFINITION

{ REPAIR_EQUIP_REQD {EQUIP_SITE_REQD} }

END_REPAIR_DEFINITION