semi合集-English.pdf - 第1084页
SEMI E5-1104 © SEMI 1982, 2004 26 Name Format Description Values Where Used OBJSPEC 20 A text string that has an internal format and that is used to point to a specific object instance. The string is formed out of a sequ…
SEMI E5-1104 © SEMI 1982, 2004 25
Name Format Description Values Where Used
MMODE 10 Matrix mode select, 1 byte
1 = Host source mode
Use S7F7 and F8 to define the
process program to be used.
2 = Local source mode
Use the matrix defined by S7F9,
F10, F11 and F13 to define the
process program to be used. The
equipment will initialize to
local source mode at power up.
The equipment will default to
local source mode from host
source mode in the event of loss
of communication with the host.
3 = Host immediate mode
Use the current process program
for all material unless changed
by S7F1-F4. The timing of the
mode change is equipment-
specific.
S7F15
NACDS 32, 52 Not After Command Codes
Vector of all command codes
which defined command may not
succeed within the same block.
S7F22
NBCDS 32, 52 Not Before Command Codes
Vector of all command codes
which defined command may not
precede within the same block.
S7F22
NULBC 20, 51 Null bin code value
This value is the bin code value
that is used for no die at a
location. (For X/Y coordinate
format the ASCII value is a
value with "n" length. For
other map formats, ASCII is a
single byte per bin with "n"
length per item; thus, the total
number of bins is the length,
i.e., length "n" = 10 for ASCII
format is 10 single byte bin
codes.) The format used must be
the same as the one used for
BINLT and BCEQU. Zero length
indicates not used.
S12F1, F3, F4
OBJACK 51 Acknowledge code:
0 = Successful completion of
requested data
1 = Error
>1 Reserved
S14F2, F4, F6,
F8, F10, F12,
F14, F16, F18,
F26, F28
OBJCMD 51 Specifies an action to be
performed by an object:
0 = Reserved
1 = Attach to requestor
2 = Detach from requestor
(requires authorization token)
3 = Reattach to requestor
4 = Set attributes (requires
authorization token)
>4 Reserved
OBJID 20, 5() Identifier for an object
S1F19;
S14F1, F2, F3,
F4
SEMI E5-1104 © SEMI 1982, 2004 26
Name Format Description Values Where Used
OBJSPEC 20 A text string that has an
internal format and that is
used to point to a specific
object instance. The string is
formed out of a sequence of
formatted substrings, each
specifying an object’s type
and identifier. The substring
format has the following four
fields:
object type,
colon character “:”,
object identifier,
greater-than symbol “>“
where the colon character “:”
is used to terminate an object
type and the “greater than”
symbol “>“ is used to
terminate an identifier field.
The object type field may be
omitted where it may be
otherwise determined. The
final “>“ is optional.
S2F49;
S13F11, F13,
F15;
S14F1, F3, F5,
F7, F9, F10,
F11, F13, F15,
F16, F17, F19,
F25, F27;
S15F43, F47
OBJTOKEN 54 Token used for authorization
S14F14, F15;
S15F37, F39,
F41, F43
OBJTYPE 20, 5() Identifier for a group or class
of objects. All objects of the
same type must have the
same set of attributes
available.
S1F19;
S14F1, F3, F6,
F7, F8, F25,
F26, F27
OFLACK 10 Acknowledge code for OFF-
LINE request
0 = OFF-LINE Acknowledge
1-63 Reserved
S1F16
ONLACK 10 Acknowledge code for ON-
LINE request
0 = ON-LINE Accepted
1 = ON-LINE Not Allowed
2 = Equipment Already ON-LINE
3-63 Reserved
S1F18
OPID 5() Operation ID. A unique
integer generated by the
requestor of an operation,
used where multiple
completion confirmations
may occur.
S6F25;
S14F19, F21;
S15F21, F29,
F30, F37, F41,
F44, F46
ORLOC 10 Origin Location
implicit value of (0,0)
0 = Center die of wafer
(Determined by:
row or column count +1
2
truncated)
1 = Upper right
2 = Upper left
3 = Lower left
4 = Lower right
>4 = Error
5-63 Reserved
Zero length indicates not
available
S12F1, F3, F4
SEMI E5-1104 © SEMI 1982, 2004 27
Name Format Description Values Where Used
OUTPTN 10, 51 A specialized version of PTN
indicating the OutPutPort
S3F35
PARAMNAME 20 The name of a parameter in a
request
S3F21, F23
PARAMVAL 1, 10,
11, 20,
3(), 4(),
5()
The value of the parameter
named in PARAMNAME.
Values that are lists are
restricted to lists of single
items of the same format
type.
S3F21, F23
PDFLT 11, 20,
3(), 4(),
5()
Parameter Default Value
Specifies default value and data
type of parameter. If no
defaults are provided, item data
length will be zero. For
numeric or Boolean data, the
default item may be a multi-
varied vector if the parameter
itself can be a vector.
If RQPAR is false:
Position of data in a default
item is significant. When
obtaining a default value to be
used in the Nth position of a
vector parameter, the
value is obtained from the Nth
position of the default item.
If the default item has L
entries, no default value will
be provided for the L+1,...,PMAX
parameter entries.
If RQPAR is true:
The length of the default vector
(L) specifies the minimum number
of
entries which must be entered
for the parameter. If > PMAX,
only PMAX
entries are required.
S7F22
PFCD 10 Predefined form code, 1 byte
S6F9
PGRPACTION 20 The action to be performed
on a port group
S3F23