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SEMI S8-0705 © SEMI 1995, 2005 11 Section Indicator Acceptance Criteria Metric Units (US Customary Units) Actual Conforms/Does N ot Conform/Not Applicable 6.5.2 Pliers handle length (L) minimum 127 mm (5.0 in.) 6.6 Pisto…
SEMI S8-0705 © SEMI 1995, 2005 10
Section Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Actual
Conforms/Does
N
ot Conform/Not
Applicable
3.5 Minimum hand clearance on either side of the
cassette, measured from the side of the cassette
to the nearest adjacent object.
minimum 76 mm (3.0 in.)
4
Work in Process Storage (specific to wafer
cassettes)
4.1 Integral wafer cassette/lot box storage shelf
height (150 and 200 mm wafer cassette/lot
boxes only)
maximum (1 box deep) 1520 mm
(60 in.)
maximum (2 boxes deep) 1220 mm
(48 in.)
minimum 460 mm (18 in.)
5 Manual Wafer Cassette Rotation Device
Design
5.1 Handle height, couple point for hand(s) from
standing surface.
maximum 1206 mm (47.5 in.)
minimum 838 mm (33 in.)
5.2 Hand grip(s) shall allow for a full “power grip”
similar to grabbing a rung on a ladder or
holding a pistol.
Allows for a full power grip in
either pronated (palm facing down)
or neutral (handshake position)
posture.
5.3 Single hand lift force maximum 37.8 N (8.5 lb.) This
value includes a 15% capacity
reduction due to cleanroom glove
use.
Wrist deviation reduces further
strength capacity by 15%.
5.4 Two hand lift force maximum 64.5 N (14.5 lb.) This
value includes a 15% capacity
reduction due to cleanroom glove
use.
Wrist deviation reduces further
strength capacity by 15%.
6
Handle Design (Handle dimensions are correct
for use of bare hand or use of typical cleanroom
gloves)
NOTE: See Appendix 3 for depiction of handle
types.
6.1 Handle surface finish all edges radiused
6.2 Cylindrical handle
6.2.1 Cylindrical handle diameter (D) maximum 38 mm (1.5 in.)
minimum 25 mm (1.0 in.)
6.2.2 Cylindrical handle length (L) minimum 127 mm (5.0 in.)
6.3 Circular or triangular handle
6.3.1 Circular or triangular handle diameter (D) maximum 90 mm (3.5 in.)
minimum 50 mm (2.0 in.)
6.3.2 Circular or triangular handle height (thickness)
(H)
maximum 25 mm (1.0 in.)
minimum 19 mm (0.75 in.)
6.4 Ball handle
6.4.1 Ball handle diameter maximum 63 mm (2.5 in.)
minimum 38 mm (1.5 in.)
6.5 Pliers handle
6.5.1 Pliers handle grip span (S) maximum 89 mm (3.5 in.) open
minimum 38 mm (1.5 in.) closed
SEMI S8-0705 © SEMI 1995, 2005 11
Section Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Actual
Conforms/Does
N
ot Conform/Not
Applicable
6.5.2 Pliers handle length (L) minimum 127 mm (5.0 in.)
6.6 Pistol grip handle
6.6.1 Pistol grip handle diameter (D) maximum 63 mm (2.5 in.)
minimum 38 mm (1.5 in.)
6.6.2 Pistol grip handle length (L) minimum 127 mm (5.0 in.)
6.7 Enclosed handles
NOTE: Handle diameter refers to the surface of
the handle presented to the inside of the curled
fingers. Enclosed handles need not be made
solely from cylindrical stock.
6.7.1 Enclosed handle, full hand power grip (suitcase
handle)
Width (W)
Depth (D)
Diameter (d)
minimum 127 mm (5.0 in.)
minimum 45 mm (1.75 in.)
maximum 25 mm (1.0 in.)
6.7.1.1 Diameter (d), requiring no greater than 71 N (16
lbf) force
minimum 6.3 mm (0.25 in.)
6.7.1.2 Diameter (d), requiring no greater than 89 N (20
lbf) force
minimum 13 mm (0.5 in.)
6.7.1.3 Diameter (d), requiring no greater than 180 N
(40 lbf) force
minimum 19 mm (0.75 in.)
6.7.2 Enclosed handle, three fingers
Width (W)
Depth (D)
Diameter (d)
Force
minimum 90 mm (3.5 in.)
minimum 38 mm (1.5 in.)
minimum 6.3 mm (0.25 in.)
maximum 71 N (16 lbf)
6.7.3 Enclosed handle, two fingers
Width (W)
Depth (D)
Diameter (d)
Force
minimum 60 mm (2.5 in.)
minimum 38 mm (1.5 in.)
minimum 6.3 mm (0.25 in.)
maximum 51 N (11.5 lbf)
6.7.4 Enclosed handle, one finger
Width (W)
Depth (D)
Diameter (d)
Force
minimum 38 mm (1.5 in.)
minimum 38 mm (1.5 in.)
minimum 3.2 mm (0.13 in.)
maximum 27 N (6 lbf)
6.8 Hook grasp handle
6.8.1 Hook grasp handle (four fingers)
Opening length (L)
Opening width (W)
Depth (d)
Lip length (l)
minimum 90 mm (3.5 in.)
minimum 38 mm (1.5 in.)
minimum 50 mm (2.0 in.)
minimum 50 mm (2.0 in.)
6.8.2 Hook grasp handle pull force (four fingers) maximum 80 N (18.0 lbf)
6.9 Finger pull handle
6.9.1 Finger pull handles (four fingers)
Opening length (L)
Opening width (W)
Depth (d)
Lip length (l)
minimum 90 mm (3.5 in.)
minimum 25 mm (1.0 in.)
minimum 19 mm (0.75 in.)
minimum 19 mm (0.75 in.)
SEMI S8-0705 © SEMI 1995, 2005 12
Section Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Actual
Conforms/Does
N
ot Conform/Not
Applicable
6.9.2 Finger pull handles pull force (four fingers) maximum 9.8 N (2.2 lbf)
7 Maintainability and Serviceability
7.1 Minimum lighting level in routine maintenance
areas is required where the operator has to read
information, use a hand tool, or make a
connection. This provision can be met by
providing integral lighting or portable lighting
which can be temporarily attached such that it
does not have to be hand held.
minimum 300 lux (30 fc)
7.2 Full Body Clearance
NOTE: Clearances should be approached from
a task analysis point of view. Clearances should
be provided based on the nature of the tasks
performed in the designated area.
7.2.1 Any posture: upper body clearance (shoulder
width)
minimum 610 mm (24 in.)
7.2.2 Standing:
overhead clearance, measured from the floor
forward horizontal clearance
#3
minimum 1980 mm (78 in.)
minimum 690 mm (27 in.)
7.2.3 Sitting-on-Floor:
overhead clearance, measured from the floor
forward horizontal clearance
#3
working height
minimum 1000 mm (39 in.)
minimum 690 mm (27 in.)
minimum 280 mm (11 in.)
7.2.4 Squatting:
overhead clearance, measured from the floor
forward horizontal clearance
#3
working height
minimum 1220 mm (48 in.)
minimum 790 mm (31 in.)
minimum 460 mm (18.1 in.)
7.2.5 Kneeling:
overhead clearance, measured from the floor
forward horizontal clearance
#3
working height
minimum 1450 mm (57 in.)
minimum 1220 mm (48 in.)
minimum 640 mm (25.2 in.)
7.2.6 Kneeling Crawl:
overhead clearance, measured from the floor
forward horizontal clearance
#3
minimum 740 mm (29 in.)
minimum 1520 mm (60 in.)
7.2.7 Stooping:
overhead clearance, measured from the floor
forward horizontal clearance
#3
working height
minimum 1450 mm (57 in.)
minimum 1020 mm (40 in.)
minimum 640 mm (25.2 in.)
7.2.8 Supine (lying on back):
height
length
minimum 430 mm (17 in.)
minimum 1980 mm (78 in.)
7.2.9 Prone or crawl space:
height
length
minimum 510 mm (20 in.)
minimum 2440 mm (96 in.)
7.3 Hand/Arm Clearance (where appropriate to do
so, dimensions have been adjusted for the use of
cleanroom gloves)