semi合集-English.pdf - 第5685页

SEMI P10-0705 © SEMI 1990, 2005 180 ! PATTERN _GROUP_INSTANCE LOGO S TART_PLACEMENT LG_1 LOCATION 10000, 7500 STEPPING_DISTA NCE 0.0, 0.0 STEPPING_COUNT 1, 1 EN D_PLACEMENT LG_1 END_PATTERN_GROUP_INSTANCE LOGO ! END_CELL…

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SEMI P10-0705 © SEMI 1990, 2005 179
END_PLACEMENT FDP_2
END_PATTERN_GROUP_INSTANCE FLD_2_PG
END_CELL FLD_2
!
CELL_ID MASK_PATTERNS !--This refers to CELL_INSTANCE
!MASK_PATTERNS
END_CELL_OPTIONS MASK_PATTERNS
!
PATTERN_GROUP_INSTANCE BARCODES
START_PLACEMENT BC_1
LOCATION 85500.000, 113350.000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT BC_1
END_PATTERN_GROUP_INSTANCE BARCODES
!
PATTERN_GROUP_INSTANCE BOJ
START_PLACEMENT BJ_1
LOCATION 119000, 88000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT BJ_1
START_PLACEMENT BJ_2
LOCATION 9700, 37000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT BJ_2
END_PATTERN_GROUP_INSTANCE BOJ
!
PATTERN_GROUP_INSTANCE EOJ
START_PLACEMENT EJ_1
LOCATION 119000, 88000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT EJ_1
START_PLACEMENT EJ_2
LOCATION 9800, 3800
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT EJ_2
END_PATTERN_GROUP_INSTANCE EOJ
!
PATTERN_GROUP_INSTANCE FIDUCIAL
START_PLACEMENT FD_1
LOCATION 63500, 63500
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT FD_1
END_PATTERN_GROUP_INSTANCE FIDUCIAL
SEMI P10-0705 © SEMI 1990, 2005 180
!
PATTERN_GROUP_INSTANCE LOGO
START_PLACEMENT LG_1
LOCATION 10000, 7500
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT LG_1
END_PATTERN_GROUP_INSTANCE LOGO
!
END_CELL MASK_PATTERNS
!------------------------------------------
!
! The PATTERN_GROUP_ID section relates patterns to specific groups of Masks. The LEVEL_ID
! value MUST agree with a specific MASK_ID value. When multiple Masks are ordered, there
! will be multiple LEVEL_ID sections within each PATTERN_GROUP_ID section.
!
! The PATTERN_NAME values should agree with those listed in the DATA_MEDIUM section.
!
!----------PATTERN_GROUPS-----------------
! Field 1
PATTERN_GROUP_ID FLD_1_PG !refers to PATTERN_GROUP_INSTANCE FLD_1_PG
END_PATTERN_GROUP_OPTIONS FLD_1_PG
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME01.1$
START_PATTERN_OPTIONS FLD_1_1
PATTERN_ADDRESS_SIZE 0.25
SCALE_FACTOR 1.0
DIGITIZED_DATA_DARK T
UNSCALED_PATTERN_SIZE 15000.0, 15000.0
MIRROR_PATTERN F
END_PATTERN_OPTIONS FLD_1_1
END_PATTERN_DEFINITION 1000001
END_PATTERN_GROUP FLD_1_PG
!
! Field 2
PATTERN_GROUP_ID FLD_2_PG !refers to PATTERN_GROUP_INSTANCE FLD_2_PG
END_PATTERN_GROUP_OPTIONS FLD_2_PG
!
LEVEL_ID 100001
PATTERN_NAME FILENAME01.2$
START_PATTERN_OPTIONS FLD2_2
PATTERN_ADDRESS_SIZE 0.25
SCALE_FACTOR 1.0
DIGITIZED_DATA_DARK F
UNSCALED_PATTERN_SIZE 15000.0, 15000.0
MIRROR_PATTERN F
END_PATTERN_OPTIONS FLD2_2
SEMI P10-0705 © SEMI 1990, 2005 181
END_PATTERN_DEFINITION 1000001
END_PATTERN_GROUP FLD_2_PG
!
! BARCODE Component
PATTERN_GROUP_ID BARCODES
END_PATTERN_GROUP_OPTIONS BARCODES
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME02.1$
START_PATTERN_OPTIONS BC1
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS BC1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP BARCODES
!
! BOJ Component
PATTERN_GROUP_ID BOJ
END_PATTERN_GROUP_OPTIONS BOJ
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME03.50
START_PATTERN_OPTIONS BJ1
PATTERN_ADDRESS_SIZE 0.250
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS BJ1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP BOJ
!
! EOJ Component
PATTERN_GROUP_ID EOJ
END_PATTERN_GROUP_OPTIONS EOJ
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME04.50
START_PATTERN_OPTIONS EJ1
PATTERN_ADDRESS_SIZE 0.250
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS EJ1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP EOJ
!
! Fiducial Component
PATTERN_GROUP_ID FID
END_PATTERN_GROUP_OPTIONS FID