semi合集-English.pdf - 第4567页

SEMI D30-1101 © SEM I 2001 3 9.6.1.2 Visual observ ation by a floodli ght from front side. 9.6.1.3 Micro scope observation of color filter with transmitted illumination. 9.6.1.4 Micro scope observation of color filter wi…

100%1 / 7923
SEMI D30-1101 © SEMI 2001 2
6.2 Measuring and Inspection Devices
6.2.1 Color Illuminator — This light source shall have chromaticity, color rendering, luminance and intensity
uniformity, diffusion, and a sufficient illumination area for observation of the specimen to be measured (See SEMI
D19).
6.2.2 Floodlight — This light shall have luminance uniformity and an illumination area sufficient for the specimens
to be measured (See SEMI D19).
6.2.3 Microscope — Use a microscope which has either transmitted illumination or reflected illumination, or both,
and has a sufficient magnification ratio (See SEMI D19).
6.2.4 Spectrophotometer — The spectrophotometer shall be in conformance with SEMI D22.
6.2.5 Surface Shape Measurement Device — Use a Stylus-type surface roughness measurement (film thickness
measurement) device, AFM or laser microscope.
7 Test Conditions
7.1 The principle test conditions are described in Table 1. In the case where tests are performed under conditions in
addition to these, clearly state those conditions.
Table 1 Test Conditions
Item Device Test Interval Color Filter
Condition
Evaluation Item Reference
Standard
1 Carbon-arc Fade Meter
100 hrs.
± 5%
2 Sunshine Carbon-arc Fade Meter
100 hrs.
± 5%
3 Xenon-arc Fade Meter
500 hrs.
± 5%
With/Without
ITO
Glass Surface
Irradiation
With UV-cut
Filter
1. External Change
2. Color Difference
∆E*ab or ∆E*uv
3.Transmittance
Change
JIS B7751
ISO 4892
ISO 7724
8 Test Specimen
8.1 Use FPD color filters for specimens. In the test results, note the existence or non-existence of Transparent
Conductive Film (ITO etc.). Specimen used in the test are cut to an appropriate size for the specified holder of the
equipment above, and fastened at the specified distance from the light source. At this time, in order to test in
conditions close to actual use, an UV-cut filter is attached to the glass surface, and light is radiated from UV-cut
filter side.
9 Procedure
9.1 Turn on the light source of the light exposure apparatus and stabilize it.
9.2 Measure the spectral transmittance, chromaticity, and surface shape of each color layer of the specimen. (The
measurement method is described in Sections 9.6 and 9.7.)
9.3 Mount the specimen in the light expose apparatus.
9.4 Radiate light on the specimen for the prescribed length of time. In order to keep the brilliance of the light source
uniform over this period of time, control the light source according to the procedures accompanying your inspection
device.
9.5 Remove the specimen from the light exposure device.
9.6 Inspect the change of the outlook and the profile of the specimen according to the following procedures.
9.6.1 Observe the existence of peculiar changes in exterior appearance before and after each test (e.g. wrinkles,
cracks, color “mura” etc.).
9.6.1.1 Visual observation by a color illuminator from backside.
SEMI D30-1101 © SEMI 20013
9.6.1.2 Visual observation by a floodlight from front
side.
9.6.1.3 Microscope observation of color filter with
transmitted illumination.
9.6.1.4 Microscope observation of color filter with
reflected illumination.
9.6.1.5 Surface roughness measurement using a stylus-
type surface roughness measurement device, AFM or
laser microscope.
9.7 Measure the color changes according to the
following procedures.
9.7.1 Measure the spectral transmittance and
chromaticity of each color layer after the light
resistance test using the method described in SEMI
D22. (Measurements must be taken at the same
location as before the test.)
9.7.2 Before and after the test, calculate the color
difference ∆E*ab or ∆E*uv, in each color layer,
according to ISO 7724, from the chromaticity of each
color layer.
10 Reporting Results
10.1 Report the following items:
10.1.1 report date,
10.1.2 test date,
10.1.3 light exposure apparatus type and conditions of
use,
10.1.4 condition of specimens (with/without
Transparent Conductive Film (ITO etc.), size, etc.),
10.1.5 conditions of test (light source, brilliance, length
of time, etc.),
10.1.6 existence of change in outward appearance,
10.1.7 chromaticity of each color layer before and after
thermal treatment (number of measuring points),
10.1.8 color difference of each color layer before and
after thermal treatment, and
10.1.9 change in spectral transmittance at specified
wavelength (e.g. back-light peak wavelength, etc.).
11 Related Documents
11.1 SEMI Standards
SEMI D13 — Terminology for FPD Color Filter
Assemblies
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI D31-1102 © SEMI 2002 1
SEMI D31-1102
DEFINITION OF MEASUREMENT INDEX (SEMU) FOR LUMINANCE
MURA IN FPD IMAGE QUALITY INSPECTION
This definition was technically approved by the Global Flat Panel Display Committee and is the direct
responsibility of the Japan Flat Panel Display Committee. Current edition approved by the Japan Regional
Standards Committee on July 19, 2002. Initially available at www.semi.org October 2002; to be published
November 2002.
1 Purpose
1.1 This standard will define the index of measurement
for mura in FPD image quality inspection.
1.2 Conventionally, inspection of FPD image quality
has been sensory, mainly conducted via the human eye,
and among the items detected, there has been no
common standard for mura and other associated
defects. For this reason, when panel makers and their
users who conduct business with a fixed quality level
set a mura acceptance level, limit samples are used as
necessary.
1.3 Operational problems with limit samples include:
• Level of mura cannot be determined without
viewing the sample. Due to this, it is not possible
to express the level via written documentation or
telephone.
• The sample settings are subjectively decided by the
setter, and lack objectivity.
• It is difficult to setup and maintain a consistent
sample level at multiple locations.
1.4 Etc. — Above all, in a market complicated by
multiple panel makers and multiple users, where
presently there is no fixed standard for expressing mura
level, we have to say that it is extremely difficult to
ensure a fixed level for panel quality.
1.5 In this standard, using ergonomics approach, we
will investigate the human eye’s sensitivity regarding
mura, and by expressing the relation between mura area
and contrast, propose an index to express the level of
mura.
2 Scope
2.1 This standard is applicable to FPD (Flat Panel
Displays) excluding CRT and HMD (Head Mount
Displays). The display sizes targeted are typically from
Type 8 (8" (20.3 cm) diagonal) to Type 30 (30" (76.2
cm) diagonal).
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Limitations
3.1 In the first edition of this standard, the target of
measurement, mura, is limited as below.
3.1.1 Line defects narrower than 300 µ m and pixel dot
defects are not the subject of this standard.
3.1.2 Mura background display is limited to
monochrome displays/intermediate gray scale level;
RGB, etc. color background and L0/L63 background
are not the subject of this standard.
4 Referenced Standards
None.
5 Terminology
5.1 Definitions
5.1.1 Gray Scale — Gray scale on image display. In
this standard, indicates level 32 out of 64 level gray
scale.
5.1.2 L0 Display — Gradation 0 out of 64. (Pitch
Black)
5.1.3 L63 Display — Gradation 63 out of 64
(Completely white)
5.2 Abbreviations and Acronyms
5.2.1 JND — Abbreviation for Just Noticeable
Difference. Used in the field of Psychophysics; for a
certain stimulus, the smallest change in stimulus
(luminance, for example) where a difference can be
perceived. Specifically, it is often used to indicate a
statistical value where the probability of the difference
being “perceptible” is 50% and the probability of the
difference “not being perceptible” is 50%. Also
expressed using lower case letters, j.n.d.
5.2.2 Semu — Semi Mura, Measurement index for
mura, defined in this standard.