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SEMI T1-95 © SEMI 1993, 2003 4 Table 2 Characteristics of BC-412 Bar Code Encodable Character Set Alphanumeric (except O) with No Non-Numeric o r Non-Alphabetic Characters (see Table 3) Code Type Continuous Symbol Length…

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SEMI T1-95 © SEMI 1993, 2003 3
7.2 The dimensions given in Table 5 are those found
on the finished wafer, regardless of where in the
process the wafer is marked.
7.3 These dimensions are derived with the assumption
that both the bar code and the optional alphanumeric
markings are placed on the wafer without realignment
of the wafer.
7.4 The code field locations are defined by the limits of
the bar code elements and the optional alphanumeric
characters. Character dimensions are from centerline to
centerline of the extreme features of the character.
8 Definition of the Error-Detecting Method
8.1 Define the following symbols:
CD = Check character
i = Position of a data character within
a string from left to right, i ≥1
CV(i) = Character value of i (Table 4)
F
o
= Mod
35
CV(i)
i =odd∑
()
F
e
= Mod
35
CV(i)
i =even∑
()
F = Mod
35
F
o
+ 2F
e
()
8.2 Compute the check character:
8.2.1 Assign the value “0” to the check character
(position #4, second character in string).
8.2.2 Calculate F
o
and F
e
.
8.2.3 Calculate F.
8.2.4 Calculate CD as Mod
35
(17 × F).
8.3 Verification
8.3.1 Recalculate F
e
and F
o
with the value of CD found
in Section 8.2.4 to the second character in the string
(position #4).
8.3.2 Calculate F.
8.3.3 If F = 0, the check character is correct.
8.4 As an example, calculate the check character for
A_Q45670 as follows:
8.4.1 Write the code as A0Q45670.
8.4.2 Calculate F
o
, F
e
, and F:
F
o
=
Mo
d
35
(A(i) + Q(i) + 5(i) + 7(i)) =
F
o
= Mod
35
(7 + 18 + 33 + 21) = Mod
35
(79) = 9
F
o
= Mod
35
(0 + 11 +19 + 0) = Mod
35
(30) = 30
F = Mod
35
(9 + 60) = Mod
35
(69) = 34
8.4.3 Calculate the value for CD:
CD = Mod
35
(17
×
34) = Mod
35
(578) =18
8.4.4 This corresponds to the character, Q, so the
symbol is now AQQ45670.
8.4.5 Verify that the check character in AQQ45670 is
correct as follows:
F
o
=
Mod
35
(A(i) + Q(i) + 5(i) + 7(i))
= Mod
35
(7 +18 + 33 + 21) = Mod
35
(79) = 9
F
e
= Mod
35
(Q(i) + 4(i) + 6(i) + 0(i))
= Mod
35
(18 + 11 + 19 + 0) = Mod
35
(48) =13
F = Mod
35
(F
o
+ 2F
e
)
= Mod
35
(9 + 26) = Mod
35
(35) = 0
Table 1 Character Dimensions (see Figure 1)
Module Height
(dot centerline to dot centerline)
2.000 mm ± 0.025 mm (0.0790" ± 0.0010")
Bar Code Character Spacing
(centerline to centerline, non-cumulative within the Symbol
Length [see Table 2])
1.440 mm ± 0.025 mm (0.0570" ± 0.0010")
Mark Width 0.110 mm ± 0.025 mm (0.0043" ± 0.0010")
Module Spacing
(centerline to centerline, non-cumulative within the Character
Spacing [see above])
0.120 mm ± 0.025 mm (0.0047" ± 0.0010")
Scribing Features: Scribing Features:
Density of dots along module length 11 dots/mm, minimum
Number of dots per module width 1 dot per module width
Character Construction: # of Bars # of Spaces Modules
Data Character 4 8 12
Start Character 1 2 3
Start Character Dimension 0.360 mm ± 0.025 mm (0.0140" ± 0.0010")
Stop Character 2 1 3
Stop Character Dimension 0.360 mm ± 0.025 mm (0.0140" ± 0.0010")
SEMI T1-95 © SEMI 1993, 2003 4
Table 2 Characteristics of BC-412 Bar Code
Encodable Character Set Alphanumeric (except O) with No Non-Numeric or Non-Alphabetic Characters (see Table 3)
Code Type Continuous
Symbol Length Variable: for this application, symbol can be formed from 13.200 mm ± 0.050 mm (0.5760" ±
0.020") including the Quiet Zones, to 29.040 mm ± 0.050 mm (1.1400" ± 0.0020") including the
Quiet Zones.
Bi-Directional Decoding Yes
Number of Check Characters One
Character Self Checking Yes
Character Self Clocking Yes
Character Dimensions See Table 1 and Figure 1.
Non-Data Overhead Six Modules
Table 3 BC 412 Code — Character Construction and Values
Character
Module Sequence
Check Character
Value
Character
Module Sequence
Check Character
Value
0 |-|-|-|----- 00 I |--|-|----|- 27
1 |-|-|--|---- 15 J |--|--|-|--- 16
2 |-|-|---|--- 17 K |--|--|--|-- 24
3 |-|-|----|-- 29 L |--|--|---|- 04
4 |-|-|-----|- 11 M |--|---|-|-- 34
5 |-|--|-|---- 33 N |--|---|--|- 12
6 |-|--|--|--- 19 O
7 |-|--|---|-- 21 P |--|----|-|- 32
8 |-|--|----|- 08 Q |---|-|-|--- 18
9 |-|---|-|--- 02 R |---|-|--|-- 01
A |-|---|--|-- 07 S |---|-|---|- 14
B |-|---|---|- 25 T |---|--|-|-- 13
C |-|----|-|-- 20 U |---|--|--|- 26
D |-|----|--|- 22 V |---|---|-|- 05
E |-|-----|-|- 09 W |----|-|-|-- 31
F |--|-|-|---- 30 X |----|-|--|- 28
G |--|-|--|--- 03 Y |----|--|-|- 23
H |--|-|---|-- 06 Z |-----|-|-|- 10
Start |-- Stop |-|
Legend: |=one bar; -=one module blank (no bar)
SEMI T1-95 © SEMI 1993, 2003 5
Table 4 BC 412 Symbol Content for Wafer Marking
Position Description Modules
1 Leading Quiet Zone 10
2 Start Character 3
3 User Definable 12
4 Check Character 12
5 to (n + 2) User Definable 12/character
(n + 2) + 1 Stop Character 3
(n + 2) + 2 Trailing Quiet Zone 10
Total Modules including Quiet Zones f(n) = (12n) + (6) + (20)
Total Modules within Marking Area Only f(n) = (12n) + (6)
n = Number of characters in the code as defined by the user, including check character, excluding Start and Stop characters.
Table 5 Code Field Location Dimensions (see Figures 3 and 4)
Dimension Flatted Wafer (Figure 3) Flatted Wafer (Figure 3) Notched Wafer (Figure 4) Notched Wafer (Figure 4)
n = 7 n = 18 n = 7 n = 18
A 1.624 mm ± 0.025 mm same 1.624 mm ± 0.025 mm same
B
3
4.666 mm ± 0.500 mm 12.476 mm ± 0.500 mm 4.666 mm ± 0.500 mm 12.476 mm ± 0.500 mm
C
3
9.332 mm ± 0.030 mm 24.952 mm ± 0.050 mm 9.332 mm ± 0.030 mm 24.052 mm ± 0.050 mm
E
1
3.350 mm ± 0.500 mm same 7.400 mm ± 0.050 mm same
F 0.700 mm ref. same 0.700 mm ref. same
G
3
5.400 mm ± 0.500 mm 13.320 mm ± 0.500 mm 5.400 mm ± 0.500 mm 13.320 mm ± 0.500 mm
H
3
10.800 mm ± 0.050 mm 26.640 mm ± 0.050 mm 10.800 mm ± 0.050 mm 26.640 mm ± 0.050 mm
J 2.000 mm ± 0.025 mm same 2.000 mm ± 0.025 mm same
L
3
13.200 mm ± 0.050 mm 29.040 mm ± 0.050 mm 13.200 mm ± 0.050 mm 29.040 mm ± 0.050 mm
M
2
1.260 mm min. same 1.260 mm min. same
1
This dimension is the distance between the centerline of the bottom dot in the bar code and the edge of the finished wafer.
2
This dimension is the distance between the centerline of the first module of the start character (or the last element of the stop character) and the
outer edge of the Quiet Zone.
3
n = 7 and n = 18 values represent the smallest to the largest extremes of the bar code symbology to be used.
The formulas for calculating all other values in between are as follows:
Dimension (B)
(Usin
g SEMI M
12 Sizing)
=
((n
–
1) Character Spacing)
+
(Character Width)
2
=
((n – 1)
×
1.420)
+
0.812
2
±
0.500
mm = ((0.710n – 0.304)
±
0.500)
mm
D
i
mens
i
on
(
C
)
=
(((
n - 1
)
×
1.420
)
+ 0.812
±
0.050
)
mm =
((
1.420n - 0.608
)
±
0.050
)
mm
Dimension (G) =
((12n)
×
0.120) + (6
×
0.120)
2
±
0.500
mm
=
((0.720n - 0.360)
±
0.500)
mm
Dimension
(H) = ((( 12 n)
×
0 . 1 20) + ( 6
×
0 . 120 )
±
0.050)
mm = ((1.440n - 0.720)
±
0.050)
mm
Dimension
(L) = ((( 12 n)
×
0 . 1 20) + ( 6
×
0 . 120 )
±
(20
×
0.120)
±
0.050
mm = ((1.440n - 3.120)
±
0.050)
mm
Tolerance for module spacing is non - cumulative (see Table 1).