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SEMI E54.11-0301 © SEMI 2 001 12 Table 16 Sensor-BI-TH-EP Beh avior OPERATING Sub-state Description State Description OPERAT ING Endpoi nt is in one of the follow ing enum erate d states as indic ated in the Sens or-BI-T…

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SEMI E54.11-0301 © SEMI 200111
inherited from the Sensor-BI-TH object defined in
SEMI E54.1. Additional specific behavior associated
with the Sensor-BI-TH-EP object is defined below.
8.5.3.1 Sensor-BI-EP OPERATING Application
Process — When in the ENDPOINT ON / ENDPOINT
IN PROCESS state, the ‘Value’ attribute is set to
FALSE and the ‘Reading Value’ attribute is set to
VALID. A reading, or readings, may be retrieved from
the device physical signal processing electronics. This
reading may be filtered, analyzed, and corrected with a
manufacturer-specified algorithm. This corrected
reading becomes the input to the endpoint formula to
generate the ‘Value’ attribute as referenced in SEMI
E54.1. This process is called “endpoint detection” and
is executed only when the Sensor-BI-TH-EP object is in
the OPERATING state as defined in SEMI E54.1.
When an Endpoint event is detected, the ‘Value’
attribute is set to TRUE and the ‘Reading Valid’
attribute is VALID. When not in the OPERATING
state, the value of the ‘Reading Valid’ attribute shall be
set to INVALID. When in one of the sub-states of the
OPERATING state, the validity of the ‘Value’ attribute
shall be manufacturer specific. Required sub-states
within the OPERATING state, descriptions of these
sub-states, and a transition matrix associated with these
sub-states are given in Figure 2, Table 16 and Table 17
respectively.
8.5.3.1.1 Whenever a ‘Sensor Not Detected’ alarm,
‘Endpoint Failure’ alarm or ‘Unexpected Conditions
Detected’ alarm is active, the EPD device shall turn off
the endpoint detection event process and hold the
device in the ENDPOINT OFF state until the alarm
clears (see Section 8.2).
8.5.3.1.2 A device can concurrently monitor and
report many endpoint detection events. The number of
endpoint detection events varies by vendor and device
model.
8.5.3.1.3 The ‘Value’ attributes for all S ensor-BI-TH-
EP objects shall be held at ‘FALSE’ until a valid
endpoint detection event is determined. An endpoint
detection event is initiated when the endpoint service
request ‘Endpoint Start’ or Endpoint On (if the state
ENDPOINT ON / ENDPOINT IDLE is not supported)
is received and the endpoint object can successfully
transition to the ENDPOINT ON / ENDPOINT IN
PROCESS state.
8.5.3.1.4 When attempting to set the “M inimum
Time”, “Maximum Time”, and “Target Time” attribute
to a value above the capability of the endpoint detection
event an error response shall be generated indicating an
invalid operation has been attempted.
8.5.3.1.5 When attempting to set the “Recipe
Identifier” or “Step Identifier” attribute to an identifier
outside the range of the endpoint detection event an
error response shall be generated indicating an invalid
operation has been attempted.
ENDPOINT
FAILURE
ENDPOINTING
OPERATING
ENDPOINT
OFF
ENDPOINT ON
ENDPOINT IN PROCESS
ENDPOINT
SUSPENDED
C
C
1
20
4
2
3
7,8,9,22
5
6
10
21
19
12
18
ENDPOINT
IDLE
15,16
14
13, 17
11
H
Figure 2
Sensor-BI-TH-EP Object Behavior Within the Operating State
SEMI E54.11-0301 © SEMI 2001 12
Table 16 Sensor-BI-TH-EP Behavior OPERATING Sub-state Description
State Description
OPERATING Endpoint is in one of the following enumerated states as indicated in the Sensor-BI-TH-EP State
attribute: ENDPOINT FAILURE (optional), ENDPOINT OFF, ENDPOINT IDLE (optional),
ENDPOINT IN PROCESS, or ENDPOINT SUSPENDED (optional). Endpoint will respond to
Endpoint On and Endpoint Off services as appropriate to move between sub-states within the
ENDPOINTING and ENDPOINT ON states.
ENDPOINTING Endpoint is in one of the following enumerated states as indicated in the Sensor-BI-TH-EP State
attribute: ENDPOINT OFF, ENDPOINT IDLE, ENDPOINT SUSPENDED, and ENDPOINT IN
PROCESS. Endpoint will respond to Endpoint On, Endpoint Off, Endpoint Start, Endpoint Suspend,
and Endpoint Resume services as appropriate to move between sub-states within the
ENDPOINTING state.
ENDPOINT OFF This is a sub-state to ENDPOINTING; Endpoint Off is the status of the Sensor-BI-TH-EP Status
attribute and ENDPOINT OFF is the enumerated state of the Sensor-BI-TH-EP State attribute.
Endpoint object is NOT performing the “endpoint” detection event process. The endpoint object may
be downloaded with new recipe parameters when in this state.
ENDPOINT ON This is a sub-state of ENDPOINTING; Endpoint On is the status of the Sensor-BI-TH-EP Status
attribute and ENDPOINT IDLE, ENDPOINT SUSPENDED or ENDPOINT IN PROCESS is the
enumerated state of the Sensor-BI-TH-EP State attribute. Endpoint object may not be performing
the “endpoint” detection event process.
ENDPOINT IDLE This is a sub-state to ENDPOINT ON. Endpoint On is the status of the SENSOR-BI-TH-EP Status
attribute and ENDPOINT IDLE is the enumerated state of the Sensor-BI-TH-EP State attribute.
Endpoint object is not performing the “endpoint” detection event process. The endpoint object may
be downloaded with new recipe parameters.
ENDPOINT IN
PROCESS
This is a sub-state to ENDPOINT ON. Endpoint On is the status of the Sensor-BI-TH-EP Status
attribute and ENDPOINT IN PROCESS is the enumerated state of the Sensor-BI-TH-EP State
attribute. Endpoint object is performing the “endpoint” detection event process. The endpoint object
may not be downloaded with new recipe parameters when in this state.
ENDPOINT
SUSPENDED
This is a sub-state to ENDPOINT ON; Endpoint On is the status of the Sensor-BI-TH-EP Status
attribute and ENDPOINT SUSPENDED is the enumerated state of the Sensor-BI-TH-EP State
attribute. Endpoint object is NOT performing the “endpoint” detection event process. The endpoint
object may not be downloaded with new recipe parameters when in this state.
ENDPOINT
FAILURE
Endpoint electronics failure; Sensor-BI-TH-EP State attribute is in the enumerated state:
ENDPOINT FAILURE. Endpoint is not performing the “endpoint” detection event process.
Endpoint cannot move to the ENDPOINTING state until the electronics are repaired or replaced. A
Perform Diagnostics or Reset service request to the Device Manager object may be sent to validate
that the failure has been cleared. The endpoint object may not be downloaded with new recipe
parameters when in this state.
Table 17 Sensor-BI-TH-EP Behavior EXECUTING Sub-state Transition Matrix*
# Current State Trigger New State Action Comment
1 Entry into
OPERATING
Power Up Conditional:
ENDPOINTING or
ENDPOINT
FAILURE
(optional)
If the endpoint
electronics are in a
failure condition than
State is ENDPOINT
FAILURE (optional)
or ENDPOINTING. If
endpoint failure
checking is not
supported the state is
ENDPOINTING /
ENDPOINT OFF.
Set Status attribute to
appropriate value.
Entry state depends
on availability of
endpoint electronics
checking.
SEMI E54.11-0301 © SEMI 200113
# Current State Trigger New State Action Comment
2 ENDPOINT
FAILURE
Perform Diagnostics or
Reset service request
received and device
determines that the
failure no longer exists
or the Endpoint device
detects replacement of
electronics that caused
the failure
ENDPOINTING /
ENDPOINT OFF
Set Status attribute to
appropriate value.
Endpoint moves to
ENDPOINT OFF
state.
3 ENDPOINTING Endpoint device detects
an endpoint electronics
failure
Conditional:
ENDPOINT
FAILURE or
ENDPOINTING /
EDNDPOINT OFF
Set State attribute to
appropriate value.
The setting of the
Status attribute is
manufacturer
specific.
4 ENDPOINT
FAILURE
Endpoint Off, Endpoint
On, Endpoint Start,
Endpoint Resume,
Endpoint Suspend,
Download Recipe,
Upload Recipe, and
Calibrate request
ENDPOINT
FAILURE
Error response Object cannot move
to ENDPOINTING /
ENDPOINT OFF
state until the
electronics are
repaired.
5 ENDPOINT
OFF
Endpoint On request Conditional:
ENDPOINT ON /
ENDPOINT IDLE
or
ENDPOINT ON /
ENDPOINT IN
PROCESS
If ENDPOINT IDLE
supported: Take the
object from the
ENDPOINT OFF
state to the
ENDPOINT IDLE
state and wait for an
Endpoint Start
request. Recipe
parameter downloads
are allowed.
If ENDPOINT IDLE
is not supported: Take
the object from the
ENDPOINT OFF
state immediately to
the ENDPOINT IN
PROCESS state and
begin the endpoint
detection event
process. Set the
Status attribute to the
appropriate values
throughout the
transition. Issue an
Endpoint On response.
ENDPOINT IDLE is
an optional
intermediate state
between ENDPOINT
OFF and
ENDPOINT IN
PROCESS.
Endpoint electronics
must not be in
failure. Service
response is not
issued until transition
to ENDPOINT IDLE
or ENDPOINT IN
PROCESS is
completed.
6 ENDPOINT ON Endpoint Off request ENDPOINT OFF Stop the “endpoint”
detection event
process. Issue an
Endpoint Off
response.
This results in the
same state transition
as when a valid
Abort service request
is issued to the
device.
7 ENDPOINT
OFF
Endpoint Off request ENDPOINT OFF Error response Endpoint is already
off.