semi合集-English.pdf - 第1648页
SEMI E38-1296 © SEMI 1995 , 1996 37 10. CC TO PM 1 SEND WAFER The CC informs PM1 that a w afer is to be transferred to the TM. CC PM1 >>------------------------------------->> TRJobCreate.Req(MID="Wafer1…
SEMI E38-1296 © SEMI 1995, 1996 36
When the putting of the wafer has been successful, the
PM informs the transport module with a verify
sequence.
PM1 TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="PM1")
PM1 TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="PM1",
Status=OK)
CC PM1
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob3,
TimeStamp)
The TM then informs the cluster controller that the
putting phase of the transfer is complete and then that
the requested transfer job is complete.
CC TM
<<-------------------------------------<<
TRJobComplete.Req(JobID=TMJob1,
TimeStamp,Status=OK)
8. PM1 JOB PROCESSING
The process module informs the cluster controller, now
that is has received the material and having previously
entered the setup state, that it is ready to initiate
processing on the wafer. When actual processing is
initiated, the PM informs the cluster controller of its
current status.
CC PM1
<<-------------------------------------<<
PRJobProcessing.Req(JobID=PM1Job1,TimeSta
mp)
A data collection is enabled to allow parameters to be
sent from the PM to the cluster controller while the
wafer processing is taking place. A previously defined
event is enabled and the report structure is established.
CC PM1
>>------------------------------------->>
Set.Req(EREvent,EventID=Event1,
Enabled=TRUE)
CC PM1
<<-------------------------------------<<
Set.Rsp(EREvent,EventID=Event1,Status=OK)
Two variables for time and temperature will be reported
based on Event1 occurring.
CC PM1
<<-------------------------------------<<
ERReport.Req(EventID=Event1,ReportID=Rpt1
, ValueList={time,temp})
When wafer processing is complete on the PM, the
cluster controller is informed of the current status.
CC PM1
<<-------------------------------------<<
PRJobProcessingComplete.Req(JobID=PM1Job1
, TimeStamp,Status=OK)
Data collection is then disabled.
CC PM1
>>------------------------------------->>
Set.Req(EREvent,EventID=Event1,
Enabled=FALSE)
CC PM1
<<-------------------------------------<<
Set.Rsp(EREvent,EventID=Event1,Status=OK)
9. PM1 to PM2 TRANSFER JOB SETUP
The CC informs the TM that a wafer transfer is required
from the PM1 to PM2.
CC TM
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",
TRSourceAmID="PM1",
TRDestinationAmID="PM2")
The transport module assigns an identifier for this
particular transfer job. The transfer job is then started
by the transport module.
CC TM
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=TMJob2,Status= OK)
CC TM
<<-------------------------------------<<
TRJobStarted.Req(JobID=TMJob2, TimeStamp)
SEMI E38-1296 © SEMI 1995, 199637
10. CC TO PM1 SEND WAFER
The CC informs PM1 that a wafer is to be transferred to
the TM.
CC PM1
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",Port=
"Port1", Dir=Send)
CC PM1
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=IOJob4,Status=OK)
CC PM1
<<-------------------------------------<<
TRJobStarted.Rsp(JobID=IOJob4, TimeStamp)
When the process module is ready, it directly
communicates with the transport module to indicate its
readiness for wafer handoff.
TM PM1
<<-------------------------------------<<
HOReady.Req(PortID="Port1",AmID="CM",
HODir=GET,MID="Wafer1")
11. CC TO PM2 PROCESSING JOB SETUP
The CC informs PM2 that a wafer will be delivered
(requires a TRJob) and is to be processed (requires that
a process job be established). This involves creating the
jobs and transferring the appropriate recipes to the
process module as required. At some point in this
process, the PM will inform the transport module that it
is ready to receive the wafer with the isssuing of the
HOReady Request.
CC PM2
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",Port="Port1"
, Dir=Receive)
CC PM2
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=IOJob5,Status=OK)
CC PM2
<<-------------------------------------<<
TRJobStarted.Req(JobID=IOJob5, TimeStamp)
CC PM2
>>------------------------------------->>
PRJobCreate.Req(RecID="PP2",MID="Wafer1",
ManualStart)
CC PM2
<<-------------------------------------<<
PRJobCreate.Rsp(JobID=PM2Job1,Status=OK)
CC PM2
<<-------------------------------------<<
PRJobSetup.Req(JobID=PM2Job1)
The process module requests that all sections (headers
and the body) of the recipe be downloaded.
CC PM2
<<-------------------------------------<<
RCRequest.Req(RecID="PP2",RCTransfer=all)
CC PM2
>>------------------------------------->>
RCRequest.Rsp(RecID="PP2",LinkedID=0,{Bod
y: "TEMP 250 TIME 40"})
CC PM2
>>------------------------------------->>
RCSend.Req(RecID="PP1",<Headers & Body>)
CC PM2
<<-------------------------------------<<
RCSend.Rsp(RecID="PP1",Status=OK)
SEMI E38-1296 © SEMI 1995, 1996 38
The process module then informs the transport module
to proceed with the putting of the wafer.
TM PM2
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM2",HODir=P
UT,MID="Wafer1")
12. PM1 TO TM WAFER HANDOFF
The PM1 transfers the wafer to the TM through the
handoff sequence, and the TM will keep the cluster
controller informed of its transfer progress. The
transport module informs the process module that it is
proceeding with the "getting" of the wafer.
PM TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM1",HODir=G
ET,MID="Wafer1")
The process module informs the transport module to
use the PICK sequence to get the wafer.
PM1 TM
>>------------------------------------->>
HOPick.Req(Port=Port1,AmID="PM1")
PM1 TM
<<-------------------------------------<<
HOPick.Rsp (Port=Port1,AmID="PM1",
Status=OK)
When the getting of the wafer has been successful, the
process module informs the transport module with a
verify sequence.
PM1 TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="PM1")
PM1 TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="PM1",
Status=OK)
Process module #1 then informs the cluster controller of
its current status.
CC PM1
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob4,TimeStamp,
Status=OK)
The cluster controller is informed that the processing
job performed in PM1 is complete.
CC PM1
<<-------------------------------------<<
PRJobComplete.Req(JobID=PM1Job1,
TimeStamp,Status=OK)
13. TM TO PM2 WAFER HANDOFF
The TM informs the cluster controller that it is
proceeding with the transfer of the wafer. The TM
informs the PM that it is proceeding with the putting of
the wafer.
PM2 TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM2",HODir=P
UT,MID="Wafer1")
The process module informs the TM to use the
EXTEND scenario as the put operation.
PM2 TM
>>------------------------------------->>
HOExtend.Req(Port=Port1,AmID="PM2")
PM2 TM
<<-------------------------------------<<
HOExtend.Rsp(Port=Port1,AmID="PM2",
Status=OK)
During this particular handoff, an exception is
generated stating that the pins in the process module
failed to come up and receive the wafer from the end
effector. The cluster controller is given three recovery
options to select from in attempting to resume operation
in the presence of this exception.
CC PM2
<<-------------------------------------<<
EXPost.Req(EXID=Error1, EXType=Error,
EXMessage="pins failed to raise",
EXRecoveryList=
{"Abort","Retry","Continue"}, TimeStamp)