semi合集-English.pdf - 第5677页
SEMI P10-0705 © SEMI 1990, 2005 172 SURF_INSP_PATTERN_SIDE .75 ! ! INSPECT_THROUGH_PELLICLE T ! START_DEFECT_DEFINITION 2 DIE_TO_DIE_INSPECTION T DEFECT_SIZE 1.50 DEFECT_COUNT 0 DATABASE_INSPECTION T END_DEFECT_DEFINITIO…
SEMI P10-0705 © SEMI 1990, 2005 171
TITLE_JUSTIFICATION L
TITLE_LOCATION 14400, 80500
ROTATE_TITLE 90
END_TITLE 2
!
START_TITLE 3
TITLE_TEXT CUSTOMER PROPRIETARY
TITLE_TYPE AUXILIARY
TITLE_JUSTIFICATION L
TITLE_LOCATION 14700, 20000
ROTATE_TITLE 90
END_TITLE 3
!
START_BARCODE 1
BARCODE_TYPE ASM
BARCODE_TEXT BARCODE TEXT
BARCODE_LOCATION 63000,32000
BARCODE_ROTATION 0
END_BARCODE 1
!
START_BARCODE 2
BARCODE_TYPE CANON
BARCODE_TEXT BARCODE TEXT
BARCODE_LOCATION -62222,-22000
BARCODE_ROTATION 0
END_BARCODE 2
!
MIRROR_MASK T
BLANK_SIZE 6/250
BLANK_TYPE ULTE
BLANK_FLATNESS 2.0
MASK_COATING LOW_REFLECTIVE_CHROME
RESIST_TYPE POSITIVE
!
TOP_PELLICLE_TYPE PELLICLE PART NUMBER1
TOP_PELLICLE_TYPE PELLICLE PART NUMBER2
!
START_REGISTR 1
REGISTR_ERROR 10
REGISTR_REF_METHOD_REQD PTB
REGISTR_ALGORITHIM MULTI-POINT
MASK_REGISTR_MARK 0,0
MEASURE_FILE_NAME MEASURE FILENAME
END_REGISTR 1
!
MIN_MASK_FEATURE_SIZE .25
!
START_DEFECT_DEFINITION 1
VISUAL_INSPECTION_REQD F
AUTO_INSPECTION_REQD T
DEFECT_SIZE 0.85
DEFECT_COUNT 0
!
INSPECTION_AREA -59388, -57388, 51994, 53053
DATABASE_INSPECTION T
END_DEFECT_DEFINITION 1
!
!
SURF_INSP_METHOD LASER
SURF_INSP_PELL_TOP 1.0
SURF_INSP_PELL_BOTTOM 1.0
SURF_INSP_GLASS_SIDE 2.0
SEMI P10-0705 © SEMI 1990, 2005 172
SURF_INSP_PATTERN_SIDE .75
!
!
INSPECT_THROUGH_PELLICLE T
!
START_DEFECT_DEFINITION 2
DIE_TO_DIE_INSPECTION T
DEFECT_SIZE 1.50
DEFECT_COUNT 0
DATABASE_INSPECTION T
END_DEFECT_DEFINITION 2
!
QUALITY_GROUP_ID Q1
PACKAGE COMPACT PART NUMBER
!
END_MASK M222
!
!
CELL_ID TC
END_CELL_OPTIONS TC
!
PATTERN_GROUP_INSTANCE PRIMARY
START_PLACEMENT 1
LOCATION 0.000, 0.000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT 1
END_PATTERN_GROUP_INSTANCE PRIMARY
!
PATTERN_GROUP_INSTANCE CLEAR_BOX
START_PLACEMENT CBP1
LOCATION 33000, -33000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT CBP1
!
START_PLACEMENT CBP2
LOCATION -33000, 33000
STEPPING_DISTANCE 0, 0
END_PLACEMENT CBP2
STEPPING_COUNT 1, 1
END_PATTERN_GROUP_INSTANCE CLEAR_BOX
!
PATTERN_GROUP_INSTANCE FID
START_PLACEMENT FP1
LOCATION 60000, 60000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT FP1
END_PATTERN_GROUP_INSTANCE FID
!
END_CELL TC
!
!
PATTERN_GROUP_ID PRIMARY
END_PATTERN_GROUP_OPTIONS PRIMARY
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.01
START_PATTERN_OPTIONS 1PPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
SEMI P10-0705 © SEMI 1990, 2005 173
!
START_CD 1
CD_DATA 1.250
CD_DIGITIZED T
CD_TONE_CLEAR T
CD_TARGET 1.300
CD_ORIENTATION HORIZONTAL
CD_REFERENCE_ONLY F
CD_TOLERANCE .12
CD_RANGE .12
NUMBER_OF_CDS 4
CD_LOCATION -53448.100, -43783.375
CD_LOCATION -53448.100, 55576.625
CD_LOCATION -49070.125, -53343.000
CD_LOCATION -49070.125, 47017.000
CD_FEATURE TUNING FORK
END_CD 1
END_PATTERN_OPTIONS 1PPO
END_PATTERN_DEFINITION M111
!
LEVEL_ID M222
PATTERN_NAME FILESNAME.02
START_PATTERN_OPTIONS 2PPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK T
!
START_CD 1
CD_DATA 2.25
CD_DIGITIZED T
CD_TONE_CLEAR T
CD_TARGET 2.30
CD_ORIENTATION HORIZONTAL
CD_REFERENCE_ONLY F
CD_TOLERANCE .12
CD_RANGE .12
NUMBER_OF_CDS 4
CD_LOCATION -33448.100, -53783.375
CD_LOCATION -33448.100, 45576.625
CD_LOCATION -39070.125, -13343.000
CD_LOCATION -39070.125, 27017.000
CD_FEATURE L BAR
END_CD 1
END_PATTERN_OPTIONS 2PPO
END_PATTERN_DEFINITION M222
!
END_PATTERN_GROUP PRIMARY
!
!
PATTERN_GROUP_ID CLEAR_BOX ! Only for Mask M111
END_PATTERN_GROUP_OPTIONS CLEAR_BOX
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.03
START_PATTERN_OPTIONS 1CPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS 1CPO
END_PATTERN_DEFINITION M111
!
END_PATTERN_GROUP CLEAR_BOX
!
PATTERN_GROUP_ID FID