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SEMI F48-0600 © SEMI 2000 8 17 Report For m 17.1 S a mpl e Information Test Date(s ): ____________ ____ 17.1.1 Pers on/Company Requesting A n a l ysis: ________ ____________ _________ ___________ 17.1.2 Met hod of Obtain…

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SEMI F48-0600 © SEMI 20007
larger component and delivered to the laboratory),
operator and laboratory performing the test, type of
material (e.g., PFA pellets, injection molded PVDF
valve, perfluoroelastomer O-ring), material supplier,
material model and lot number(s), date sample was
obtained and if the sample is a prototype or production
material.
14.2 Methods
14.2.1 Provide the method of cleaning the sample as
well as indicating if the sample arrived pre-cleaned
from the requester or if it was cleaned in the laboratory
performing the test.
14.2.2 Check the applicable box for the type of
digestion. Complete as well the information regarding
the conditions.
14.3 Results
14.3.1 Use Table 1, Trace Metals in Bulk Polymer
Worksheet in Section 17.3 to report the results of the
analysis along with detection limits and recovery rates
for all elements required in the samples.
NOTE 13: For this document, the detection limit is defined as
the concentration equivalent to three standard deviations of
the results of the procedural blanks (see Section 13.1.2).
NOTE 14: The procedural blanks should be averaged and
then subtracted from each sample (see Columns 3 and 4 of
Table 1).
NOTE 15: If multiple samples of the same polymer material
are evaluated, an average and standard deviation must be
reported.
15 Precision and Bias
15.1 Expected variations in the blank are due to
environmental and instrument variation.
15.2 Expected variation in the samples is 20–30% and
is due to environmental, instrumental, and ashing or
digestion variations.
15.3 This test does not give an indication of the
variations found in the polymer sample material.
15.3.1 Analyze multiple samples of the same polymer
material to determine the variation.
15.3.2 Refer to ASTM D4375 for information
regarding sample populations to determine differences
between materials.
16 Related Documents
16.1 References Pertaining to ICP–MS
Dams, R. F. J., Goossens, J., Moens, L. “Spectral and
Non-Spectral Interferences in Inductively Coupled
Plasma Mass Spectrometry” Microchim. Acta 119
(1995):277-286.
Evans, E. H., Giglio, J. J., “Interferences in Inductively
Coupled Plasma Mass Spectrometry” J Anal. Atom.
Spectrom. 8 (1993):1-18.
Jarvis, K. E., Gray, A. L., Houk, R. S. “Handbook of
Inductively Coupled Plasma mass Spectrometry”
Blackie, Glasgow 1992 (USA: Chapman and Hall, New
York).
Shao, Y. and G. Horlick. “Recognition of Mass Spectral
Interferences in Inductively Coupled Plasma–Mass
Spectrometry.” Applied Spectroscopy 45 (1991):143.
16.2 References Pertaining to ICP–AES
Garbarino, J.R., B.E. Jones, G.P. Stein, W.T. Belser,
and H.E. Taylor. “Statistical Evaluation of an ICP–AES
Method for Routine Water Quality Testing.” Applied
Spectroscopy 39 (1985):535.
Winge, R.K., V.S.Fassel, R.N. Kniseley, E. De Kalb,
and W.J. Haas Jr. “ICP as an Analytical Source.”
Spectrochimica Acta 32B (1977):327
16.3 References Pertaining to Microwave Digestion
Kingston, H. M. Skip and Haswell, Steve, Eds.,
Microwave Enhanced Chemistry: Fundamentals,
Sample Preparation, and Applications, ACS
Professional Reference Book Series, American
Chemical Society, Washington, DC, 1997.
16.4 U.S. EPA Documents
3
U.S. EPA Method 3052 –– Microwave Assisted Acid
Digestion of Siliceous and Organically Based Matrices
U.S. EPA RCRA SW-846 –– Chapter 3, sections on
clean chemistry and microwave decomposition.
16.5 SEMATECH Documents
4
SEMASPEC #92010956B–STD –– SEMATECH
Provisional Test Method for Analyzing the Plastic
Surface Composition and Chemical Bonding of
Components of UPW Distribution Systems (ESCA
Method)
SEMASPEC #92010936B–STD –– SEMATECH
Provisional Test Method for the Determination of
Leachable Trace Inorganics from UPW Distribution
System Components
3 Environmental Protection Agency, 401 M St., SW, Washington, DC
20460, USA
4 SEMATECH, 2706 Montopolis Dr., Austin TX 78741
SEMI F48-0600 © SEMI 2000 8
17 Report Form
17.1 Sample Information Test Date(s): ________________
17.1.1 Person/Company Requesting Analysis: ________________________________________
17.1.2 Method of Obtaining Sample: _______________________________________________
17.1.3 Operator and Laboratory Performing Test: _____________________________________
17.1.4 Sample Material: ________________ Sample Supplier: ___________________
17.1.5 Model/Lot Number: _________________ Date of Sample: ____________________
17.1.6 Circle one: Pre-Production Material or Final Production Material
17.2 Methods
17.2.1 Sample Cleaning Technique (SEMI F40 or other): _______________________________
17.2.2 Digestion Technique (check one)
Dry Ashing Closed Vessel
Type of Crucible: _______ Vessel Material: _____________
Temperature of Ashing: _____°C Reaction Conditions: _______________________
Time of Ashing: _________ hours _______________________________
17.3 Results
Table 1 Trace Metals in Bulk Polymer Worksheet
Element Detection Limit
(µ
g/g)
Procedural Blank
(µ
g/g)
Result with Blank
Subtraction
(µ
g/g)
% Recovery
Aluminum
Barium
Calcium
Chromium
Cobalt
Copper
Iron
Lead
Lithium
Molybdenum
Magnesium
Manganese
Nickel
Potassium
Sodium
Strontium
Tin
Titanium
Zinc
Zirconium
SEMI F48-0600 © SEMI 20009
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