semi合集-English.pdf - 第7119页
SEMI S22-1103a © SEMI 2003, 2005 4 4.6 ANSI Standards 5 ANSI/IPC 222 1 Generic Standar d on Printed Board Desi gn ANSI/ISA S84.01 Application of Safety Inst rumented Systems for the Process Industries 4.7 ISOSt andards 6…
SEMI S22-1103a © SEMI 2003, 2005 3
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 Safety Guidelines for Heated Chemical Baths
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Safety Guideline for Operation and Maintenance Manuals Used with Semiconductor Manufacturing
Equipment
SEMI 14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing
Equipment
4.2 IEC Standards
1
IEC 60112 Method for determining the comparative and the proof tracking indices of solid insulating materials
under moist conditions
IEC 60204-1 — Safety of Machinery - Electrical Equipment of Machines, Part 1: General Requirements
IEC 60417 — Graphical Symbols for Use on Equipment
IEC 60707 — Flammability of solid non-metallic materials when exposed to flame sources - List of test methods
IEC 60950 Safety of Information Technology Equipment
IEC 61010-1 — Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use —
Part 1: General Requirements
IEC 61346-1 Industrial systems, installations and equipment and industrial products - Structuring principles and
reference designations
4.3 European Documents
2
4.3.1 CENELEC Standards
EN 60529 Degrees of Protection Provided by Enclosures
EN 61508 Functional Safety of Electrical/electronic/programmable Electronic Safety-related Systems
4.3.2 European Commission Directives
89/336/EEC Directive on Electromagnetic Compatibility
4.4 NFPA Standards
3
NFPA 70 — National Electrical Code
NFPA 79 Electrical Standard for Industrial Machinery
4.5 UL Standards
4
UL 94 Tests for Flammability of Plastic Materials for Parts in Devices and Appliances
UL 943 — Standard for Ground-Fault Circuit- Interrupters
1 International Electrotechnical Commission 3, rue de Varembé, Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00
2 European Union http://europa.eu.int/
3 National Fire Protection Association, 1 Batterymarch Park, PO Box 9101, Quincy, MA 02269-9101
4 Underwriters Laboratories Inc., 333 Pfingsten Rd, Northbrook, IL 60062
SEMI S22-1103a © SEMI 2003, 2005 4
4.6 ANSI Standards
5
ANSI/IPC 2221 Generic Standard on Printed Board Design
ANSI/ISA S84.01 Application of Safety Instrumented Systems for the Process Industries
4.7 ISOStandards
6
ISO 13849-1 Safety of Machinery – Safety-related Parts of Control Systems – Part 1: General Principles For
Design
NOTICE: Unless otherwise indicated, all documents cited should be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 access — a means of approaching or touching.
5.1.2 accessible — having or allowing access, see definition of access.
5.1.3 accredited testing laboratory — an independent organization dedicated to the testing of components, devices,
or systems; competent to perform evaluations based on established safety standards; and recognized by a
government or regulatory body.
5.1.4 ampacity — the current, in amperes, that a conductor can carry continuously under the conditions of use,
without exceeding the design limits for the temperature rating of the insulation, the conductor and the wire
termination.
5.1.5 basic insulation — provides a single layer of protection against electric shock.
5.1.6 bonding (bonded) — the permanent joining of metallic parts to form an electrically conductive path that
ensures electrical continuity and the capacity to conduct safely any current likely to be imposed. See protective
earthing system.
5.1.7 clearance distance — the shortest path between two conductive parts normally carrying current, or between a
conductive part normally carrying current and a conductive part that is connected to the protective earthing system,
measured through air.
5.1.8 Comparative Tracking Index (CTI) — the value obtained in accordance with Method A of IEC 60112 which
determines the Material Group of a printed wiring board. Where the CTI or material group is not known, Material
Group IIIb should be used.
5.1.9 conduit — a part of a closed wiring system of circular or non-circular cross-section for insulated conductors
and/or cables in electrical installations, allowing them to be drawn in and/or replaced.
5.1.10 control device (of a machine) — a device connected into the control circuit and used for controlling the
operation of the machine (e.g. position sensor, manual control switch, relay, magnetically operated valve, etc.).
5.1.11 convenience receptacle — an electrical outlet provided on the equipment, which does not have any load
connected to it during the normal operation of the equipment, but is intended by the equipment manufacturer to be
used to power a piece of maintenance or service equipment.
5.1.12 cord connected equipment — equipment that is intended to be electrically connected to an electric supply by
means of a flexible supply cord and attachment plug.
5.1.13 creepage distance — the shortest path between two conductive parts normally carrying current or between a
conductive part normally carrying current and a conductive part that is bonded to the protective earthing system,
measured along the surface of the insulation.
5 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023, Website:
www.ansi.org
6 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: /www.iso.ch
SEMI S22-1103a © SEMI 2003, 2005 5
5.1.14 disconnecting means — a device, or group of devices, or other means by which the conductors of a circuit
are intended to be disconnected from their source of supply.
5.1.15 door — a hinged enclosure panel.
5.1.16 double insulation — comprised of both supplementary insulation and basic insulation combined.
5.1.17 duct — an enclosed channel designed expressly for holding and protecting electrical conductors, cables, and
bus bars. Conduits, wireways and under-floor channels are types of ducts.
5.1.18 earthing — see protective earthing system.
5.1.19 electrical enclosure — a panel, compartment, or other defined area housing electrical components used to
enhance the safety of the equipment containing those components.
5.1.20 electrical feed — (referenced from the equipment) a facility supply conductor that provides electrical energy
to a piece of equipment.
NOTE 4: Electrical wiring from enclosure to enclosure, routed through the facility, but provided with the equipment to power
subsystems, are not considered electrical feeds.
5.1.21 energized — electrically connected to a source of voltage.
5.1.22 equipment — a specific piece of machinery, apparatus, process module, or device used to execute an
operation. The term “equipment” does not apply to any product (e.g., substrates, semiconductors).
5.1.23 exposed (as applied to energized parts) — capable of being inadvertently touched or approached nearer than
a safe distance by a person. It is applied to parts that are not suitably guarded, isolated, or insulated.
5.1.24 fail-safe — designed so that a failure does not result in an increased risk.
NOTE 5: For example, a fail-safe temperature limiting device would indicate an out-of-control temperature if it were to fail.
This might interrupt a process, but would be preferable to the device indicating that the temperature is within the control limits,
regardless of the actual temperature, in case of a failure.
5.1.25 Fail-to-safe equipment control system (FECS) — a safety-related programmable system of control circuits
designed and implemented for safety functions in accordance with recognized standards such as ISO 13849-1 (EN
954-1) or IEC 61508, ANSI SP 84. These systems (e.g. safety Programmable Logic Controller (PLC), safety-related
Input and output (I/O) modules) diagnose internal and external faults and react upon detected faults in a controlled
manner in order to bring the equipment to a safe state.
NOTE 6: A FECS is a subsystem to a (PES) Programmable Electronic System as defined in IEC61508 –4.
5.1.26 failure — the termination of the ability to perform an intended function. Failure is an event, as distinguished
from “fault,” which is a state.
5.1.27 fault — the state of an item characterized by the inability to perform its intended function; excludes the
inability to perform required functions during preventive maintenance or other planned actions, or due to lack of
external resources.
5.1.28 fault-tolerant — designed so that a reasonably foreseeable single point failure does not result in an unsafe
condition.
5.1.29 ground fault — an unintentional, electrically conducting connection between an ungrounded or grounded
conductor of an electrical circuit and the normally non-current-carrying conductors, metallic enclosures, metallic
raceways, or metallic equipment.
5.1.30 Ground-Fault-Circuit-Interrupter (GFCI) — a device intended for the protection of personnel that functions
to de-energize a circuit or portion thereof within an established period of time when a current to ground exceeds a
value in the range of 4 mA to 6 mA (for further information, see UL 943, Standard for Ground-Fault Circuit-
Interrupters).
5.1.31 grounding — see protective earthing system.
5.1.32 hazard — a condition that is a prerequisite to a mishap.
5.1.33 hazardous voltage — voltages greater than 30 Volts RMS, 42.4 Volts peak, or 60 Volts DC.