semi合集-English.pdf - 第748页
SEMI E100-1104 © SEMI 2000, 2004 11 Symbol Used Figure Value Spe cified Reference Measured From Feature Measured To y 139 1 140 ± 1 mm (5.512 ± 0.039 in.) facial reference plane surface of ID lab el y 140 9 108 mm (4.252…
SEMI E100-1104 © SEMI 2000, 2003 10
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
x131 6, 8 102 ± 0.5 mm
(4.016 ± 0.020 in.)
bilateral reference plane center of info pads C and D
x134 3 140.25 ± 1 mm
(5.522 ± 0.039 in.)
bilateral reference plane bottom edge of side handling flange
x135 None 0 ± 3 mm
(0 0.118 in.)
bilateral reference plane bisecting plane through reticle
x136 3 134.5 mm (5.295 in.)
maximum
bilateral reference plane edge of side handling exclusion
volume
x140 9 138.2 mm (5.441 in.)
maximum
bilateral reference plane edge of conveyor rail surface
x141 9 140.5 ± 1 mm
(5.531 ± 0.039 in.)
bilateral reference plane edge of conveyor rail surface
x142 9 103 mm (4.055 in.)
minimum
bilateral reference plane end of conveyor rail surface
x147 1 57 mm (2.244 in.)
minimum
bilateral reference plane edge of carrier ID exclusion volume
y41 1 30 ± 1 mm
(1.181 ± 0.039 in.)
facial reference plane center of orientation notch
y44 1 53 mm (2.087 in.)
maximum
facial reference plane edge of robotic handling flange
column
y45 1 65.3 ± 1 mm
(2.571 ± 0.039 in.)
facial reference plane orientation notch tip
y46 1 71 ± 1 mm
(2.795 ± 0.039 in.)
facial reference plane edge of robotic handling flange
y47 1 58 mm (2.283 in.)
minimum
facial reference plane edge of robotic handling flange
corner beveling
y106 1 92.5 mm (3.642 in.)
minimum
facial reference plane edge of recess
y125 1 146.25 mm (5.758
in.) maximum
facial reference plane side of pod
y126 1 71.1 ± 0.5 mm
(2.799 ± 0.020 in.)
facial reference plane depth of side handles
y127 1 61.9 ± 0.5 mm
(2.437 ± 0.020 in.)
facial reference plane side handle chamfers
y131 6, 8 70 ± 0.5 mm
(2.756 ± 0.020 in.)
facial reference plane center of info pads A and B
y132 6, 8 50 ± 0.5 mm
(1.969 ± 0.020 in.)
facial reference plane center of info pads C and D
y133 None 0 ± 1 mm
(0 ± 0.039 in.)
facial reference plane bisecting plane through reticle
y135 None 0 ± 3 mm
(0 0.118 in.)
facial reference plane bisecting plane through reticle
y137 1 134 mm (5.276 in.)
maximum
facial reference plane edge of carrier ID exclusion volume
y138 1 147 mm (5.787 in.)
minimum
facial reference plane edge of carrier ID exclusion volume
SEMI E100-1104 © SEMI 2000, 2004 11
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
y139 1 140 ± 1 mm
(5.512 ± 0.039 in.)
facial reference plane surface of ID label
y140 9 108 mm (4.252 in.)
minimum
facial reference plane end of conveyor rail surface
y141 9 143 mm (5.630 in.)
maximum
facial reference plane edge of conveyor rail surface
y142 9 145.5 ± 1 mm
(5.728 ± 0.039 in.)
facial reference plane edge of conveyor rail surface
z2 None 2 mm (0.079 in.)
maximum
horizontal reference plane surface of info pads (when down)
z26 None 9 mm (0.354 in.)
minimum
horizontal reference plane surface of info pads (when up)
z50 5 5 mm (0.197 in.)
minimum
bottom of circular recess midpoint of circular recess
z149 3, 5 8 mm (0.315 in.)
maximum
bottom surface of robotic
handling flange
height of robotic handling flange
z154 3 55.6 mm (2.189 in.)
maximum
horizontal reference plane top surface of dome recess
z155 3 58.1 mm (2.287 in.)
maximum
horizontal reference plane top surface of dome
z156 3, 5 73.1 ± 0.5 mm
(2.878 ± 0.020 in.)
horizontal reference plane bottom surface of robotic handling
flange
z157 3 50.6 ± 0.5 mm
(1.992 ± 0.020 in.)
horizontal reference plane bottom edge of side handles
z158 3 58.1 mm (2.287 in.)
maximum
horizontal reference plane top surface of side handles
z159 4, 7 39.3 ± 0.5 mm
(1.547 ± 0.020 in.)
horizontal reference plane bottom surface of reticle
z160 4, 7 20.3 mm (0.799 in.)
maximum
horizontal reference plane edge of end-effector exclusion
volume
z161 4, 7 20.3 mm (0.799 in.)
maximum
horizontal reference plane edge of pellicle exclusion volume
z162 4, 7 42.3 ± 0.5 mm
(1.665 ± 0.020 in.)
horizontal reference plane reticle capture height
z163 None 20.3 mm (0.799 in.)
minimum
horizontal reference plane edge of transverse pellicle exclusion
volume
z166 3 30.6 mm (1.205 in.)
maximum
horizontal reference plane edge of side handling exclusion
volume
z167 4, 7 30 mm (1.181 in.)
maximum
horizontal reference plane edge of safety rail exclusion volume
z171 None 0.5 mm (0.020 in.)
maximum
horizontal datum plane conveyor rail surface
z180 3 27 mm (1.063 in.)
maximum
horizontal reference plane bottom edge of carrier ID exclusion
volume
z181 3 58.1 mm (2.287 in.)
minimum
horizontal reference plane top edge of carrier ID exclusion
volume
SEMI E100-1104 © SEMI 2000, 2003 12
Table 3 Internal Dimensions Unique to the 230 mm RSP
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
x115 4 75.5 mm (2.972 in.)
minimum
bilateral reference plane edge of pellicle exclusion volume
x116 4 107.5 mm (4.232 in.)
minimum
bilateral reference plane edge of end-effector exclusion
volume
x132 4 84 mm (3.307 in.)
maximum
bilateral reference plane edge of end-effector exclusion
volume
x137 4 124 mm (4.882 in.)
maximum
bilateral reference plane edge of safety rail exclusion
volume
x144 4, 6 115 mm (4.528 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
x146 4, 6 124 mm (4.881 in.)
minimum
facial reference plane edge of end-effector exclusion
volume
y129 6 75.5 mm (2.972 in.)
minimum
facial reference plane edge of transverse pellicle
exclusion volume
y136 6 124 mm (4.882 in.)
minimum
facial reference plane edge of end effector exclusion
volume
y144 6 105 mm (4.134 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
z164 4 48.3 mm (1.902 in.)
maximum
horizontal reference plane top of reticle supports
Table 4 Internal Dimensions Unique to the 6 inch RSP
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
x118
7
71.2 mm (2.803 in.)
minimum
bilateral reference plane edge of end-effector exclusion
volume
x119
7
64.5 mm (2.539 in.)
minimum
bilateral reference plane edge of pellicle exclusion volume
x138 7 85 mm (3.346 in.)
maximum
bilateral reference plane edge of safety rail exclusion
volume
x143 7, 8 76.2 mm (3.000 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
x145 7, 8 85 mm (3.346 in.)
minimum
facial reference plane edge of end-effector exclusion
volume
y130 8 64.5 mm (2.539 in.)
minimum
facial reference plane edge of transverse pellicle
exclusion volume
y143 8 70.2 mm (2.764 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
z165 7 45.6 mm (1.795 in.)
maximum
horizontal reference plane top of reticle supports