semi合集-English.pdf - 第7907页
SEMI T14-1104 © SEMI 2004 4 Nominal Dim ensions (µ m) R1 = 92.00 ± 6% C2 = 98.00 ± 6% R2 = 98.00 ± 6% C1 = 92.00 ± 6% 16 cells per row C1 C2 R1 R2 16 cells per column C L C L C L C L 16 cells per row C1 C2 R1 R2 16 cells…
SEMI T14-1104 © SEMI 2004 3
5.2.3 The length of each dot mark along the surface of the article to be marked should be 6.0 µm + 10% – 20%. (As
shown in Figure 3.)
5.3 Border Rows and Columns
5.3.1 One border row and one border column shall contain a dot in each cell. These are identified as the primary
border row and the primary border column. They are used by the code reader to determine the orientation of the
matrix.
5.3.2 The opposing (secondary) border row and column shall contain dots in alternating cells.
5.3.3 The reference point shall be the physical center point of corner cell common to the primary border row and
the primary border column. (As shown in Figure 4.)
5.3.4 The maximum dot misalignment within a cell is 1.4 µm. This ensures that a minimum size dot covers a cell
central area of radius 1 µm.
5.4 Content of the Data Matrix Code Symbol
5.4.1 Each square data matrix code symbol shall contain 16 message characters, together with the error checking
and correcting (ECC200) code characters, encoded in accordance with ISO/IEC ISS 16022.
5.4.2 The message characters shall include the following: A–Z, 0–9, and dash (–).
5.5 Location of the Data Matrix Code Symbol
5.5.1 With the wafer positioned front surface up and with the primary fiducial (notch) toward the operator, the
origin of the data matrix code symbol shall be located as specified below. (As shown in Figure 5.)
5.5.1.1 Circular position — the reference point shall be located along the perimeter by 3.0 ± 0.1° counterclockwise
from the axis of the notch fiducial bisector. (As shown in Figure 5.)
5.5.1.2 Radial position — the mark position of Micro ID is decided by the responsibility of Device Manufacturers
on the bevel area where the Micro ID is survived even after the CMP processing and the backside grind. (Related
Information in Figure R1-2.)
5.5.2 The primary border row of the data matrix code symbol shall be placed toward the periphery of the wafers,
and the primary border column of the data matrix code symbol shall be placed toward the center of the wafers,
originating from the reference point.
SEMI T14-1104 © SEMI 2004 4
Nominal Dimensions (µm)
R1 = 92.00 ± 6%
C2 = 98.00 ± 6% R2 = 98.00 ± 6%
C1 = 92.00 ± 6%
16
cells per row
C1
C2
R1
R2
16
cells per
column
C
L
C
L
C
L
C
L
16
cells per row
C1
C2
R1
R2
16
cells per
column
C
L
C
L
C
L
C
L
C
L
C
L
C
L
C
L
Figure 1
Data Matrix Field Dimensions
ECC200 - 16 rows × 16 columns
6.25 µ m
6.25
µ
m
Figure 2
Cell Spacing
SEMI T14-1104 © SEMI 2004 5
6.0 µm
+10%
-20%
+10%
-20%
Figure 3
Dot Shape Circle (Projected Sectional Area)
To Wafer Center
Reference Point
The Primary Border Row
The Primary Border Column
Figure 4
Data Matrix Code Fields
ECC200 - 16 rows × 16 columns