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SEMI E54.3-0698 © SEMI 1998, 2004 17 Table 23 Sensor-A I-MF Object Behav i or State Transition Matrix # Current State Trigger New State Action Comments 4 NORMAL OPERATING Get Attribute, Set Attribute, Restore Defaults re…

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SEMI E54.3-0698 © SEMI 1998, 2004 16
Table 21 Sensor AI-MF Object Behavior State Transition Matrix
# Current State Trigger New State Action Comments
4 NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults request,
Perform Zero Offset request
(command ≠ 1)
NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults appropriate
response
Valid for all sub-
states of NORMAL
OPERATING.
13 NOT ZEROING Perform Zero Offset request
(command = 1)
ZEROING Run the ZEROING application
process. Set zeroing status to
Zeroing.
14 ZEROING Operate request or Perform
Zero Offset request
(command ≠ 1)
NOT ZEROING Resume the OPERATING
application process. Set zeroing
status to Not Zeroing. Report
appropriate service response.
The mechanism for
reporting is
network-specific.
15 ZEROING Perform Zero Offset request
(command = 1)
ZEROING Restart the ZEROING
application process.
8.4.3.5 Sensor-AI-MF AUTORANGING Application Process — The Sensor-AI-MF object instance supports the
additional behavior sub-states (defined in Figure 4) within the OPERATING state. Table 22 defines the additional
sub-states, and Table 23 defines the additional state transitions specified for this object.
8.4.3.5.1 The object instance is automatically selecting gas calibrations based on a manufacturer's specified method.
This method may include a determination based on the value of the value attribute and/or on the value of the
setpoint value attribute.
NOT
AUTORANGING
AUTORANGING
OPERATING
16
17
18
Figure 4
Sensor-AI-MF Object Behavior Additional Sub-States
Table 22 Sensor-AI-MF Object Behavior State Descriptions
State Description
NOT AUTORANGING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.
AUTORANGING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.
Additionally, the Sensor-AI-MF object instance is running the Sensor-AI-MF AUTORANGING
application process (defined above).
SEMI E54.3-0698 © SEMI 1998, 2004 17
Table 23 Sensor-AI-MF Object Behavior State Transition Matrix
# Current State Trigger New State Action Comments
4 NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults request,
Autorange request
(command = 0)
NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults appropriate
response
Valid for all sub-
states of
NORMAL
OPERATING.
16 NOT
AUTORANGING
Autorange request
Command = 1
AUTORANGING Run AUTORANGING
application process. Set
Autoranging status to
Autoranging.
17 AUTORANGING Autorange request
Command = 0
NOT
AUTORANGING
Halt the Autoranging application
process. Set Autoranging status to
Not Autoranging.
18 AUTORANGING Autorange request
Command = 1
AUTORANGING No change.
8.5 Sensor-AI-AT Object — The Sensor-AI-AT object is an Ambient Temperature object instance which inherits
attributes, services, and behavior from the Sensor-AI object as defined in SEMI E54.1. The Sensor-AI-AT object
instance is the device component responsible for retrieving a reading from a physical temperature sensor and making
the value available to the network.
8.5.1 Sensor-AI-AT Object Attributes — The inherited value attribute represents the ambient temperature
measurement. There are no additional attributes defined for this object in this document.
8.5.2 Sensor-AI-AT Object Services — There are no additional services defined for this object in this document.
8.5.3 Sensor-AI-AT Object Behavior — The behavior exhibited by the Sensor-AI-AT object instance is defined in
SEM E54.1. Additional specific behavior associated with the Sensor-AI-AT object is defined below.
8.5.3.1 Sensor-AI-AT OPERATING Application Process — A reading is retrieved from a physical temperature
sensor. This reading may be corrected with a manufacturer-specified algorithm. This corrected reading becomes the
input to the offset and gain formula to generate the value attribute as referenced in SEMI E54.1.
8.6 Assembly-MFM Object — The Assembly-MFM object inherits attributes, services, and behavior from the
Assembly object. The Assembly object instance is the device component which provides a mechanism of grouping
more than one attribute from one or more object instances into a single data structure for access over the network.
8.6.1 Assembly-MFM Object Attributes
Table 24 Assembly-MFM Object Attributes
Attribute Name
Attribute
Identifier
Access Network
Required
Form
Data A1 R Yes Structure as defined below.
8.6.1.1 Data — An attribute with the following list of attributes within its structure:
Table 25 Assembly-MFM Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 MFD3 A4 Sensor-AI-MF
Value
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8.7 Sensor-AI-Aux Object — The Sensor-AI-Aux object is an Auxiliary Input object instance which inherits
attributes, services, and behavior from the Sensor-AI object as defined in SEMI E54.1. The Sensor-AI-Aux object
instance is the device component responsible for retrieving a reading from a physical analog input and making the
value available to the network.
8.7.1 Sensor-AI-Aux Object Attributes — The attributes provided by the Sensor-AI-Aux object instance are defined
in SEMI E54.1. The value attribute represents the analog input measurement.
8.7.2 Sensor-AI-Aux Object Services — The services provided by the Sensor-AI object instance are defined in
SEMI E54.1.
8.7.3 Sensor-AI-Aux Object Behavior — The behavior exhibited by the Sensor-AI-Aux object instance is defined in
SEMI E54.1. Additional specific behavior associated with the Sensor-AI-Aux object is defined below.
8.7.3.1 Sensor-AI-Aux OPERATING Application Process — A reading is retrieved from a physical analog input.
This reading may be corrected with a manufacturer-specified algorithm. This corrected reading becomes the input to
the offset and gain formula to generate the value attribute as referenced in SEMI E54.1.
8.8 Actuator-AO-MF Object — The Actuator-AO-MF object instance inherits from the Actuator-AO object
attributes, services, and behavior as defined in SEMI E54.1. The Actuator-AO-MF object instance is the component
responsible for driving the physical mass flow control valve of the device. Override attributes are available to
produce valve drives which either fully close or fully open the valve, irrespective of the value of the setting attribute.
8.8.1 Actuator-AO-MF Object Attributes
Table 26 Actuator-AO-MF Object Attributes
Attribute Name
Attribute
Identifier
Access Network
Required
Form
Valve Type A1 R No Enumerated Byte
Override A2 RW No Enumerated Byte
Reserved A3–A64 — — Reserved for future expansion.
Manufacturer-Specified > A64 — — Manufacturer-Specific attributes.
8.8.1.1 Valve Type (Optional) — An attribute which specifies the type of valve present in the device. This attribute
is an enumerated byte that can take on one of the following values:
0 = Solenoid
1 = Voice Coil
2 = Piezo Electric
3 = Thermal
4–63 = Reserved
64–255 = Manufacturer-Specified
8.8.1.2 Override (Optional) — An attribute which specifies an override to the controlled valve position derived
from the Controller object instance. This attribute is an enumerated byte that can take on one of the following
values:
0 = Normal — Normal control mode
1 = Flow Off — Valve Closed
2 = Purge — Valve Open
3 = Power Off — Valve to unpowered state
4–63 = Reserved
64–255 = Manufacturer-Specified