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SEMI E54.3-0698 © SEMI 1998, 2004 7 8.4.1 Sensor-A I-MF Object Attributes Table 7 Sensor-A I-MF Object A ttributes Attribute Name Attribute Identifier Access Network Required Form Flow Totalizer A1 RW No REAL Flow Hours …

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8.2.2.1 Device Type — An attribute which uniquely identifies the type of the device on the network. The device
type attribute is assigned as follows:
Mass Flow Controller Device = “MFC”
Mass Flow Meter Device = “MFM”
8.2.2.2 Exception Detail Alarm (Optional) — An attribute which identifies the detailed alarm status of the device.
Table 4 defines the bit assignments associated with the alarm exception detail.
Table 4 Exception Detail Alarm Bit Assignments
Bit Device-Specific Alarm [0]
0 Reserved
1 Indicated Flow High
2 Indicated Flow Low
3 Flow Controller
4 Flow Valve Actuator
5 Reserved
6 Reserved
7 Reserved
8.2.2.3 Exception Detail Warning (Optional) — An attribute which identifies the detailed warning status of the
device. Table 5 defines the bit assignments associated with the warning exception detail.
Table 5 Exception Detail Warning Bit Assignments
Bit Device-Specific Warning [0]
0 Reserved
1 Indicated Flow High
2 Indicated Flow Low
3 Flow Controller
4 Flow Valve Actuator
5 Reserved
6 Reserved
7 Reserved
8.2.2.4 Initial and Default Values
Table 6 DM Object Attribute Initial and Default Values
Attribute Initial Value Default Value Comment
Device Type MFC, MFM MFC, MFM MFM = Mass Flow Meter Device
MFC = Mass Flow Controller Device
Exception Detail Alarm 0 0
Exception Detail Warning 0 0
8.3 Sensor Actuator Controller Object (SAC) — The Sensor Actuator Controller object instance is the device
component responsible for coordinating the interaction of the mass flow device with the sensory/actuation/control
environment as specified in SEMI E54.1.
8.4 Sensor-AI-MF Object — The Sensor-AI-MF object inherits the attributes, services, and behavior of the Sensor-
AI as defined in SEMI E54.1. The Sensor-AI-MF object instance is the device component responsible for retrieving
a reading from a physical flow sensor, optionally correcting the reading with a manufacturer-specified algorithm, or
algorithms, then making the value available to feed the Controller object instance via a Local Link object instance.
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8.4.1 Sensor-AI-MF Object Attributes
Table 7 Sensor-AI-MF Object Attributes
Attribute Name
Attribute
Identifier
Access Network Required Form
Flow Totalizer A1 RW No REAL
Flow Hours A2 R No ULINT
Zero Offset Mode A5 RW No Enumerated Byte
Zeroing Status A6 R No Enumerated Byte
Autorange Status A7 R No Enumerated Byte
Reserved A8–A64 — — Reserved for future expansion
Manufacturer-Specified > A64 — — Manufacturer-Specific attributes
8.4.1.1 Flow Totalizer (Optional) — An attribute that maintains the volume of gas in standard cubic centimeters
(SCC) that has flowed through the device since the last time the flow totalizer attribute value was set to zero.
8.4.1.2 Flow Hours (Optional) — An attribute which identifies the number of hours that the device has been
flowing gas since the last time the flow hours attribute value was set to zero, as specified by the manufacturer. The
attribute is an unsigned long integer with a resolution of 1 hour.
8.4.1.3 Zero Offset Mode (Optional) — An attribute which specifies the zero offset formula to be applied to
produce the value attribute. This attribute is an enumerated byte that can take on one of the following values:
0 = Disable
1 = Enable Application of Formula
2 = Enable Automatic Zeroing
3–63 = Reserved
64–255 = Manufacturer-Specified
8.4.1.4 Zeroing Status (Optional) — An attribute which specifies whether the object is in the ZEROING substate.
This attribute is an enumerated byte that can take on one of the following values:
0 = Not Zeroing
1 = Zeroing
8.4.1.5 Autorange Status (Optional) — An attribute which specifies whether the object is in the AUTORANGING
sub-state. This attribute is an enumerated byte that can take on one of the following values:
0 = Not Autoranging
1 = Autoranging
8.4.1.6 Initial and Default Values
Table 8 Sensor-AI-MF Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Flow Totalizer LVV 0
Flow Hours LVV 0
Zero Offset Mode LVV Disable
Zeroing Status Not Zeroing Not Zeroing
Autorange Status LVV Not Autoranging
8.4.2 Sensor-AI-MF Object Services — The services provided by the Sensor-AI-MF object instance are defined in
SEMI E54.1. The Sensor-AI-MF object supports the additional services listed below.
8.4.2.1 All Gas Correction services are optional. Gas correction may be handled within the device as a pre-assigned
gas calibration or may not be implemented at all. If these services are available, it is manufacturer-specific as to
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whether the device supports references to gas standard number, gas standard symbol, or both. It is strongly
recommended that, if a device supports only one method of referencing gas types, it should be gas standard number.
8.4.2.2 A device may support any of these services, in whole or in part, as specified by the manufacturer. A
manufacturer may specify a subset of the service parameter values which is supported. The following table lists the
services sup-ported by the Sensor-AI-MF object instance:
Table 9 Sensor-AI-MF Object Services
Service Service Identifier Type Description
Perform Zero Offset S1 R Used to instruct the object to perform an automatic zeroing
operation.
Query-Supported Gas Types S2 R Used to query the device to determine whether a specific gas
calibration is supported.
Selected Programmed Gas
Type
S3 R Used to select the gas type and associated data to be used as
the current programmed gas calibration.
Insert Gas Type S4 R Used to add a gas type to the list of available gas types.
Delete Gas Type S5 R Used to remove a gas type from the list of available gas types.
Get Gas Calibration Data
Value
S6 R Used to request the value of a specific gas calibration data
value.
Set Gas Calibration Data
Value
S7 R Used to set the value of a specific gas calibration data value.
Autorange S8 R Used to enter the AUTORANGING state.
Reserved S9–S64 — Reserved for future expansion.
Manufacturer-Specified > S64 — Manufacturer-Specific services
8.4.2.3 Perform Zero Offset (Optional) — This service is used to instruct the Sensor-AI-MF object instance to
perform a one-time automatic zeroing operation on the device or to reset the offset attribute value to zero. This serv-
ice causes the automatic zeroing of the Sensor-AI-MF object instance value attribute by modifying the value of the
offset attribute in order to yield a value of zero for the value attribute. Table 10 describes the parameters specified
for this service.
Table 10 Perform Zero Service Parameter Definitions
Parameter
R
equest/Indicati
on
Response/
Confirmation
Data Type
Description
Command M — Byte Enumerated Byte:
0 = Set offset attribute to zero
1 = Calculate offset
2 = Cancel Zeroing
3–63 = Reserved
64–255 = Manufacturer-Specified
8.4.2.4 Query-Supported Gas Types Service (Optional) — This service is used to query the device to determine
whether a specific gas type, range, and units is supported. Supported, in this context, implies that the device contains
suitable gas calibration correction data or methods to correct the flow measurement for the specified gas type, range,
and units. The query can be made by referencing either gas standard number or gas standard symbol (see Section 5
for a definition of “gas standard number” and “gas standard symbol”). The entire list of supported gas standard
numbers or gas standard symbols (with ranges and units) can also be requested. The following table describes the
parameters specified for this service: