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SEMI E38-1296 © SEMI 1995 , 1996 1 SEMI E38-1296 CLUSTER TOOL MODULE COMM UNICATIONS (CTMC) 1 Purpose 1.1 Cluster tools fulfill a n eed for m o d ularity and flexibility in semiconductor manufacturin g equipment. This st…

SEMI E37.2-95 © SEMI 1995, 2003 5

RELATED INFORMATION 1

APPLICATION NOTES

NOTICE: This related information is not an official part of SEMI E37.2 and is not intended to modify or supercede the official

standard. Publication was authorized by full letter ballot procedures. Determination of the suitability of the material is solely the

responsibility of the user.

R1-1 Supporting Both HSMS-GS and HSMS-SS

Simultaneously

R1-1.1 In certain applications, the equipment

manufacturer may be faced with a requirement of

providing both HSMS-GS and HSMS-SS

communications interfaces. For example, a cluster tool

may use HSMS-GS as the intra-tool communications

and HSMS-SS as a GEM interface to the factory.

However, implementing a communications facility that

is simultaneously HSMS-SS- and HSMS-GS-

compliant is straightforward.

R1-1.2 Assuming that one has implemented an HSMS-

GS, a simple test can be added to the first Select.req

received by the equipment. If it is a Select for any

particular SessionID, then operate as HSMS-GS. If its

value is a -1, then copy the contents of the Session

Entity List corresponding TCP/IP IP address and port

number into the Selected Entity List. The Selection

Counter would be set to a special value, such as -1, to

indicate selection in this manner. The Separate would

provide the reverse function. If the passive entity is

implemented as an HSMS-SS node and the active entity

is an implementation that supports both modes of

operation, it must be explicitly configured to initiate the

Select with a Session ID of -1 and must have a Session

Entity List containing the Device IDs of all the

available sub-devices within the passive mode entity.

R1-1.3 In the local API for the case where the

equipment must originate the select, a configuration

parameter for the equipment could indicate which mode

to use for a particular remote target.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproductio

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consent of SEMI.

SEMI E38-1296 © SEMI 1995, 19961

SEMI E38-1296

CLUSTER TOOL MODULE COMMUNICATIONS (CTMC)

1 Purpose

1.1 Cluster tools fulfill a need for modularity and

flexibility in semiconductor manufacturing equipment.

This standard addresses the communications with and

among modules within a cluster tool for automated

control.

1.2 The module communications services defined here

will enable standard interoperability of modules from

independent suppliers. Together with other cluster tool

standards, this is intended to result in the emergence of

standards-compliant interoperable sub-systems. They

should allow applications software to be developed

which can assume the existence of these services and

allow software products to be developed to offer them.

1.3 The adoption of the standards described will

greatly reduce the effort required to integrate cluster

tool components from independent suppliers.

Compliance requires support of a minimal, but specific,

set of standard services.

2 Scope

2.1 Cluster tool module communications address only

communications with and among modules within a

cluster tool and not the communications between the

cluster tool and the factory. It is the modules and their

interrelations which are modeled and not the cluster

tool seen as a single equipment.

2.2 This standard does not specify cluster controller

functionality (e.g., scheduling, human machine

interface, cluster tool recipe editing, and management)

but will enable development of standards in this area.

The cluster controller is included only to the extent that

it represents the entity or entities responsible for

supervisory control of the modules in a cluster tool.

2.3 This standard identifies the communications

services necessary to achieve automated control of

independent transport, process, and cassette modules in

a cluster tool. It defines the essential module

architecture and the concepts and models on which the

communications services are based.

2.4 The scope includes primary control services for

material processing in process modules, material

movement within the cluster tool, and material

input/output with the factory. Support services also

exist to enable recipe handling, resolution of exception

conditions, event reporting, and data access.

2.5 A reliable communications environment is

required for distributed control and is specified in

supplementary standards.

2.6 This standard specifies the application of more

general service standards as required within a cluster

tool. This includes the limitations imposed by the

cluster tool architecture and the fundamental

functionality needed for compliance. The details of the

general services, protocols, and communication

environment elements are defined in the corresponding

standards documents referenced.

2.7 This version of the standard is provisional because

a number of the general services on which it relies are

not yet standardized. The sections referring to these

services have been omitted until they have become

standards. These sections will be balloted separately

with the corresponding general services and

incorporated into this provisional standard.

2.8 The communication between the cluster tool as a

single equipment and the factory is beyond the scope of

cluster tool module communications standardized here

and should follow the applicable SEMI standards

(GEM, MMMS).

2.9 These standards place no restriction on where,

within the cluster tool control architecture, this specific

set of definitions is implemented. However, to have

complete compliance to the standards in the area of the

communications interface definitions, the entire layered

structure as outlined in this document must be

implemented.

3 Referenced Documents

3.1 SEMI Standards

SEMI E21 — Cluster Tool Module Interface:

Mechanical Interface and Wafer Transport Standard

SEMI E22 — Cluster Tool Module Interface: Transport

Module End Effector Exclusion Volume Standard

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E32 — Material Movement Management

Standard

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

SEMI E38-1296 © SEMI 1995, 1996 2

4 Terminology

4.1 The following terms are those that are appropriate

for describing the overall structure of cluster tools.

These terms, in addition to the more specific terms

located in the individual service, protocol, and

communications environment standards, complete the

glossary of terms required.

4.1.1 agent — an intelligent system within a factory

that provides one or more service resources and uses

the services of other agents. A generalization of host,

equipment, cell, cluster, cluster module, station

controller, work station. Agents are associated with a

physical system or a collection of physical systems,

including computer platforms.

4.1.2 alarm — an alarm is related to any abnormal

situation on the equipment that may endanger people,

equipment, or material being processed. [SEMI E30]

4.1.3 atomic transfer — the basic unit of movement.

The transfer of a single material between two partners

where only one change in ownership occurs.

4.1.4 attached module — any component of a cluster

tool which mechanically attaches to the transport

module at an interface flange. Specifically, the cassette,

process, and docking modules are all attached modules.

The attached module can be isolated from the transport

module by an isolation valve controlled by the transport

module. In addition, the attached module may also

possess an additional isolation valve. The point of

separation between the isolation valve on the transport

module and the attached module is called the interface

plane.

4.1.5 am transfer job — a material transfer job for an

attached module specifying all criteria for receiving the

material from, or sending the material to, a transport

module.

4.1.6 carrier (material) — a device for the holding of

material for various processing steps in semiconductor

manufacturing. [SEMI E1]

4.1.7 cassette module — an attached module which

provides the means of exchanging material between the

intertool environment and the intratool environment of

a particular cluster. There is no requirement that the

material interface to the intertool environment with the

use of cassettes.

4.1.8 cm input/output transfer job — a material

transfer job for a cassette module, specifying all criteria

for receiving the material from, or sending the material

to, the factory.

4.1.9 cluster controller — the entity or entities

responsible for supervisory control within a cluster tool,

achieved through communicating with the various

modules. The form of the cluster controller is not

dictated. It may be a single platform, distributed, or

incorporated with one or more modules.

4.1.10 cluster tool — an integrated, environmentally

isolated, manufacturing system consisting of process,

transport, and cassette modules mechanically linked

together. There is no requirement that the modules

come from the same supplier. [SEMI E21]

4.1.11 decision authority — an entity requiring to be

notified of significant exception condition changes and

which decides how to proceed to resolve abnormal

situations related to recoverable error conditions. The

decision authority may be represented by a supervisory

controller interacting with an operator who may

ultimately choose the recovery action.

4.1.12 docking module — a component for allowing

the exchange, within a cluster tool, of material between

multiple transport modules. The docking module

presents an attached module interface to both transport

modules and is modeled as a multi-port process module

for intra-cluster tool communications.

4.1.13 end effector — a physical location attached to a

transfer resource capable of holding material during an

end-to-end material transfer.

4.1.14 error condition — an exception condition

which is not an alarm and which may support recovery

actions requested by a decision authority.

4.1.15 exception condition — a managed condition for

reporting on and providing recovery from an abnormal

situation in the equipment.

4.1.16 factory — entities outside the control domain of

the cluster tool and from which material is received for

processing and returned upon process completion. Also

considered to be the intertool environment.

4.1.17 factory transport resource — n operator or a

piece of equipment specialized in the transport of

material from one equipment to another.

4.1.18 form — type of data representing information

contained in an object attribute or service message

parameter. The data types are detailed in Section 4.2.

4.1.19 fundamental requirements — the requirement

for information and behavior that must be satisfied for

compliance to a standard. Fundamental requirements

apply to specific areas of application, objects, or

services.

4.1.20 handoff micro move — an operation requested

by an attached module and performed by a transport

module to achieve all or part of a material handoff

between them.