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SEMI E102-0600 © SEMI 2000 54 MTSC AMHS Equipmen t Controllers Durable Management Factory Operations 29: Transfer Command Complete (StockerS EM) 30: Transfer Command to Oht1 (carrier bbb, src. Stk. 9/Bay_Out, dest . Eq5 …

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SEMI E102-0600 © SEMI 200053
R1-2.12 Scenario 12 — Tool to Tool Delivery
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
MTSC reserves and manages AMHS Equipment Capactiy(internal)
MTSC determines AMHS route(internal)
10: Transfer Command to Agt1(carrier bbb, src. eq.3 Port 1, dest. Stk. 8/Bay_In)(IBSEM)
11: Transfer Command Updates from Agt2 (IBSEM)
14: Transfer Command Complete (IBSEM)
17: Transfer Command to Stk. 2 (carrier bbb, src. Stk. 8/Bay_In, dest. Stk.8 Bay_Out)(StockerSEM)
18: Transfer Command Updates from Stk. 8 (Stocker SEM)
19: Transfer Command Complete (StockerSEM)
20: Transfer Command to Ohs2(carrier bbb, src. Stk. 8/Bay_Out, dest. Stk. 9/Bay_In)(IBSEM)
21: Transfer Command Updates from Ohs2 (IBSEM)
24: Transfer Command Complete (IBSEM)
27: Transfer Command to Stk.4 (carrier bbb, src Stk.9/Bay_In, dest. Stk. 9/Bay_Out) (StockerSEM)
28: Transfer Command Updates from Stk. 9 (StockerSEM)
7: makeInTransit()
12: setMaterialTrackingLocation( MaterialTrackingLocation Agt2)
15: setMaterialTrackingLocation( MaterialTrackingLocation Stk.8)
22: setMaterialTrackingLocation( MaterialTrackingLocation Ohs2)
25: setMaterialTrackingLocation(MaterialTrackingLocation Stk.9)
2: requestJob(Jobtype Transport, Priority 1, Deadline time1, container bbb, SourceMachine eq. 3, SourcePort 1, DestinationMachine eq. 5, Destination Port 1)
3: Return Job Handle TrJob1
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
13: DurableLocationChangedEvent
16: DurableLocationChangedEvent
23: DurableLocationChangedEvent
26: DurableLocationChangedEvent
8: MaterialLocationStateChangedEvent
MTSC determines relay
priorty(internal)
1: setUnit(unitbvalue)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
Figure R1-24
Scenario Case 12
SEMI E102-0600 © SEMI 2000 54
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
29: Transfer Command Complete (StockerSEM)
30: Transfer Command to Oht1 (carrier bbb, src. Stk. 9/Bay_Out, dest. Eq5 Port 1)(IBSEM)
31: Transfer Command Updates from Oht1 (IBSEM)
34: Transfer Command Complete (IBSEM)
32: setMaterialTrackingLocation(MaterialTrackingLocation Oht1)
35: setMaterialTrackingLocation(MaterialTrackingLocation Eq5)
40: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
33: DurableLocationChangedEvent
36: DurableLocationChangedEvent
38: MaterialLocationStateChangedEvent
37: makeProcessing()
39: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
41: removeFinishedJob()
42: JobStateChangedEvent(..previousState JobExecuting, newState JobUndefined)
Figure R1-25
Scenario Case 12 (continued)
SEMI E102-0600 © SEMI 200055
R1-2.13 Scenario 13 — Interactions at an Individual Interface Level (including capacity reservation)
2: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationMachine stk9)
3: returns Job Handle TrJob1
7: makeInTransit()
22: setMaterialTrackingLocation(materialTrackingLocation Ohs2)
23: DurableLocationChangedEvent
27: setMaterialTrackingLocation(materialTrackingLocation stk9MTL1)
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
12: Transfer (aaa, Bay_Out) (Internal Interface)
13: Transfer Command to Stk4 (src Stk4, dest st4/Bay_Out) (Stocker SEM)
14: Transfer Command Updates (Stocker SEM)
15: Transfer Command Complete (Stocker SEM)
16: Transfer complete (Internal Interface)
18: Transfer (aaa, stk4/Bay_Out, stk9/Bay_In) (Internal Interface)
19: Transfer Command to Ohs2 (src stk4/Bay_Out, dest stk9/Bay_In) (IBSEM)
20: Transfer Command Update (IBSEM)
21: Transfer Update (Internal Interface)
25: Transfer Command Complete (IBSEM)
26: Transfer Complete (Internal Interface)
29: Transfer (carrier aaa, src Bay_In, dest shelf) (Internal Interface)
30: Transfer Command to stk9 (src Bay/In, dest shelf) (Stocker SEM)
31: Transfer Command Updates (Stocker SEM)
8: MaterialContainerStateChangedEvent
MTSC determines AMHS Route (Internal Service)
9: getUnit()
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, NewState JobExecuting)
17: removeMaterial(MaterialContainer aaa)
24: addMaterialToTrack(MaterialContainer aaa)
1: setUnit( unitvalue)
10: getMaterialTrackingLocation(unitvalue)
11: reserveCapacity(MaterialContainer aaa)
28: DurableLocationChangedEvent
Factory
Operations
Material
Container aaa
Material
TransportManager
Job TrJob1 AMHS Equipment
Controllers
MaterialTracking
Location ohs2MTL
MaterialTracking
Location stk4MTL
MaterialTracking
Location stk9MTL1
Storage
Machine stk9
Transport
Machine Ohs2
Storage
Machine stk4
Figure R1-26
Scenario Case 13