semi合集-English.pdf - 第5799页
SEMI P23-0200 © SEMI 1993 , 2000 22 50 u m 50 u m De t a i l 1 u m 1 u m 7. 0 14. 0 3. 0 11. 0 7. 0 2. 0 1. 5 2. 0 G/ H/ K/ L / Q ; Film Pattern ; Defect Position Figure 17 Sub Cell Wiring (Type C)
SEMI P23-0200 © SEMI 1993, 200021
50 um
50 um
Detail
1 um
1 um
14.0
2.5
11.5
7.0
0.5
2.0
1.5
1.5
2.5
45.0 deg.
4.5
; Film Pattern
Figure 16
Sub Cell
Wiring (Type B)
SEMI P23-0200 © SEMI 1993, 2000 22
50 um
50 um
Detai l
1 um
1 um
7.0
14.0
3.0 11.0
7.0
2.0
1.5
2.0
G/ H/ K/ L/ Q
; Film Pattern
; Defect Position
Figure 17
Sub Cell
Wiring (Type C)
SEMI P23-0200 © SEMI 1993, 200023
50 um
50 um
Det ail
1 um
1 um
2.0
14.0
8.5 5.5
7.0
3.5
2.0
3.5
3.5
2.0
2.0
1.5
1.5
2.0
I/ J
; Film Pattern
; Defect Position
Figure 18
Sub Cell
Wiring (Type D)