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SEMI E58-0703 © SEMI 1997, 2003 16 alternative text strings. Th is provides the consistency, across diffe rent equipm ent, that is importa nt to the user. PRODUCTIVE 1000 “PRD” ( d efault p roductive c ode) 1100 “PRD/R e…

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SEMI E58-0703 © SEMI 1997, 2003 15
1.14.7 Both models cover all time, twenty-four hours
each day. The ARAMS State Model describes how the
equipment is used in the factory. The General
Equipment Operations Model describes the
equipment’s activities, including the time when it has
no power and is completely inactive.
1.14.7.1 The General Equipment Operations Model is
provided to clarify two specific areas of relationship:
• The transitions related to powerup (#2),
powerdown (#3), soft re-boot (#5), and reset (#6).
• The IDLE and BUSY activity states.
1.14.7.2 The term “reset” is used in this document to
collectively represent both the soft re-boot and the
hardware reset where no powerdown occurs.
1.14.7.3 Requirements related to powerup,
powerdown, re-boot, and reset are specified in Section
16.
NOTE 15: Although the equipment is unable to detect a
condition of no power, it is able to detect when the
INITIALIZING state has been entered and is able to
differentiate between a hard reset (Transition 6) and a soft re-
boot (Transition 5).
8.4.1 IDLE and BUSY — By definition, the equipment
is not in the IDLE state and in the PRODUCTIVE state
at the same time, and it is not intended to be in the
BUSY state while in STANDBY. The PRODUCTIVE
and STANDBY states correspond to implicit substates
of the BUSY and IDLE states only for the time the
equipment is within the MANUFACTURING
superstate — that is, it is scheduled for manufacturing
(non-engineering factory operations) and is in a
condition to perform its intended function.
1.14.7.4 Occasional exceptions may occur due to
improper timing of a user request to change to a
manufacturing state before the equipment completes a
non-processing activity started in another state. For
example, the equipment may be performing an
automatic calibration during routine maintenance in a
downtime state. In this case, the equipment determines
that its production criteria are not satisfied and shall
transition to STANDBY, as it is busy performing a
function other than its intended function.
8.4.2 Non-Manufacturing States — The equipment
may be in any of the POWER-OFF, INITIALIZING,
IDLE, or BUSY states in the General Equipment
Operations Model while in any of the non-
manufacturing states: ENGINEERING,
UNSCHEDULED DOWNTIME, SCHEDULED
DOWNTIME, or NON-SCHEDULED TIME. For
example, it may be powered off while being installed
(NON-SCHEDULED TIME) or repaired
(SCHEDULED or UNSCHEDULED DOWNTIME). It
may be required to perform its normal processing cycle
(its intended function) in ENGINEERING, NON-
SCHEDULED TIME or in a downtime state.
9 ARAMS Substate Codes
1.15 This section defines the format for ARAMS
Substate Codes and a set of reserved values for generic
substates based on the descriptions in SEMI E10. The
format is defined specifically to allow further resolution
of the six basic SEMI E10 equipment states by both the
factory and equipment supplier.
1.15.1 An ARAMS Substate Code consists of four
ordered alphanumeric text characters, where the first
two characters are reserved digits. The first character
indicates the primary ARAMS state as follows:
1. PRODUCTIVE
2. STANDBY
3. ENGINEERING
4. SCHEDULED DOWNTIME
5. UNSCHEDULED DOWNTIME
6. NON-SCHEDULED TIME
1.15.2 The second character of the code, if non-zero,
indicates a substate of the primary state. A zero in the
second position indicates no substate has been selected.
This may also be referred to as a substate of “default”.
1.15.3 Codes of the form “n000” indicate no substates
of a basic state have been selected. This is the “default
code” for that basic state. For example, a code of
“1000” indicates the PRODUCTIVE state with no
substates.
1.15.4 Descriptive formatted text is defined to
correspond to each ARAMS code. The first three
characters of this text represent the basic state. If the
next character is a forward slash “/”, then subsequent
text represents a substate of the basic state.
9.1 Reserved Codes — States and substates referenced
by the reserved text in this section are based on SEMI
E10 specifications. For further definition of
terminology, see SEMI E10.
1.15.5 The following ARAMS Substate Codes, and
the corresponding descriptive text strings for the
English language (delimited by quotes), are reserved.
Descriptive text with a substate of “Reserved” indicates
the corresponding code is reserved for future expansion
by this standard.
1.15.6 In the future, text strings in other languages
may also be reserved. Equipment supporting other
languages shall provide a method for the user to define
SEMI E58-0703 © SEMI 1997, 2003
16
alternative text strings. This provides the consistency,
across different equipment, that is important to the user.
PRODUCTIVE
1000 “PRD” (default productive code)
1100 “PRD/Regular production”
1200 “PRD/Work for third parties”
1300 “PRD/Rework”
1400 “PRD/Engineering runs”
1500 “PRD/Reserved*”
1600 “PRD/Reserved”
1700 “PRD/Reserved”
1800 “PRD/Reserved”
1900 “PRD/Reserved”
STANDBY
2000 “SBY” (default standby code)
2100 “SBY/No operator”
2200 “SBY/No product”
2300 “SBY/No support tool”*
2400 “SBY/Associated cluster module down”
2500 “SBY/No host”
2600 “SBY/Reserved”
2700 “SBY/Reserved”
2800 “SBY/Reserved”
2900 “SBY/Reserved”
* NOTE: A support tool is a mechanical device used by, but
not part of, the equipment. This includes cassettes, probe
cards, etc.
ENGINEERING
3000 “ENG” (default engineering code)
3100 “ENG/Process experiments”
3200 “ENG/Equipment experiments”
3300 “ENG/Reserved”
3400 “ENG/Reserved”
3500 “ENG/Reserved”
3600 “ENG/Reserved”
3700 “ENG/Reserved”
3800 “ENG/Reserved”
3900 “ENG/Reserved”
SCHEDULED DOWNTIME
4000 “SDT” (default scheduled downtime code)
4100 “SDT/User maintenance delay”
4200 “SDT/Supplier maintenance delay”
4300 “SDT/Preventive maintenance”
4400 “SDT/Change of consumables”
4500 “SDT/Setup”
4600 “SDT/Production test”
4700 “SDT/Facilities-related”
4800 “SDT/Reserved”
4900 “SDT/Reserved”
UNSCHEDULED DOWNTIME
5000 “UDT” (default unscheduled downtime
code)
5100 “UDT/User maintenance delay”
5200 “UDT/Supplier maintenance delay”
5300 “UDT/Repair”
5400 “UDT/Out-of-spec input material”
5500 “UDT/Change of consumables”
5600 “UDT/Facilities-related”
5700 “UDT/Reserved”
5800 “UDT/Reserved”
5900 “UDT/Reserved”
NON-SCHEDULED TIME
6000 “NST” (default non-scheduled
downtime code)
6100 “NST/Unworked shifts”
6200 “NST/Equipment installation”
6300 “NST/Equipment modifications” (modify,
rebuild, upgrade)
6400 “NST/Off-line training”
6500 “NST/Shutdown/startup”
6600 “NST/Reserved”
6700 “NST/Reserved”
6800 “NST/Reserved”
6900 “NST/Reserved”
9.2 Additional Codes — Additional codes may be
defined by both the user and supplier, subject to the
following constraints:
SEMI E58-0703 © SEMI 1997, 2003 17
• The new code defines a refinement of a primary
ARAMS state, as defined in Section 9, through use
of the characters in the third and fourth positions.
•
Alphabetic characters are permitted in the third and
fourth positions. For purposes of sorting, these
characters are assumed to be case-sensitive. All
characters other than alphanumeric are prohibited.
• The third character is used to differentiate between
codes defined by the user (factory) and those
defined by the equipment supplier. If the third
character is a digit, then the code is user defined.
Otherwise, the code is supplier-defined. The user is
free to assign values between “01” and “9z” as the
third and fourth characters, while the supplier may
assign values between “A0” and “zz”.
* NOTE: Additional reserved codes may be added to Section
9.2 in the future.
1.15.7 Code definitions are exchanged as ARAMS
Substate Tables, described in Section 10.3.
9.3 Valid ARAMS Substate Code — A valid ARAMS
Substate Code is defined as any code with four
alphanumeric characters where the first character is a
digit between 1 and 6 and the second character is a digit
between 0 and 9.
9.4 Manufacturing Code — A user request for the
equipment to go to manufacturing specifies a special
code of “0000”. The code “0000” is not itself an
ARAMS Substate Code and shall not be used as a code
representing the current ARAMS state/substate in the
variable ARAMSState.
10 ARAMS Tables
1.16 The information in this section is not required
unless the equipment supports one or both of the two
ARAMS Tables defined in Sections 10.3 and 10.4
respectively.
1.16.1 ARAMS defines two sets of data that are to be
exchanged between equipment and host. These sets of
data are transferred as “tables”. A table is a vehicle for
exchanging information and is independent of actual
storage mechanisms.
1.16.2 This section introduces the concept and
definitions of a generic table and defines the two
specific types of tables required by ARAMS, the
ARAMS Substate Table, and the ARAMS Symptom
Table.
10.1 Definition of Tables — A table represents a
general way of exchanging sets of data arranged in a
tabular format. A table consists of one or more ordered
sets of data, called rows, where the format and
interpretation of each element of data within a row
depends upon its relative position within the row, called
column. Tables are transferred by providing:
• An ordered list of predefined text strings, called
column headers, that identify the data element at
the corresponding column position within each
row,
• one or more rows of data, where each row is an
ordered set of individual data elements, presented
in the order specified by the column headers, and
• a set of information (attributes) about the table as a
whole.
10.1.1 Table Types and Identifiers — Each instance of
a table has a formally defined table type and a table
identifier. This allows definition of general-purpose
services for exchanging tables. It also allows multiple
instances of a specific type of table to be referenced.
OSS-compliant applications consider a table as a type
of object, and a table type as a specialization of a table.
1.16.2.1 The table type definition includes
specification of a reserved text string that begins with
the string “Table”. Table services (Section 15) and OSS
services (SEMI E39) use the reserved text string as the
ObjType attribute of the table object. The general table
definition does not specify requirements for assigning
identifiers to individual tables.
1.16.2.2 The table identifier is a text string that
conforms to the requirements for an object identifier
(ObjID) as specified in SEMI E39, which prohibits
specific characters in ASCII. The identifier is used to
identify a specific instance of a given table type and
shall be unique for all tables of a given type.
1.16.2.3 A column in a table refers to all data elements
at a given position across all rows of the table. Column
headers are pre-defined text strings that identify the
individual elements used and their relative order within
each row.
1.16.3 Table Row Definition — A formal table type
requires definition of the individual data elements
within a row of the table and the specification of the
column header. This information is provided in Table 3.
Table 3 Table 3 Definition for Table Row Format
Column Header Data Element Definition Form