semi合集-English.pdf - 第6535页

SEMI G81-0703 © SEMI 2000, 2003 10 0 Y X Type: ‘Botto mLeft’ 0 Y X Type : ‘TopLeft’ 0 X Y Type: ‘TopRight’ 0 X Y Type: ‘Botto mRight’ 0 X Y Type: ‘Center’ Figure A1-8 Wafer Coordinate to Ad dress Devices (Ori ginLocatio …

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SEMI G81-0703 © SEMI 2000, 2003 9
FRAME ID
WAFER ID
FILM FRAME
WAFER
Figure A1-5
Example of WaferID and FrameID Position
ORIGIN
Column
Row
0
1234
0
1
2
3
4
Map Axis Origin Position
Figure A1-6
(Ex.) Map Coordinates System (OriginLocation = Top Left Top Side)
+Y
+X
x
y
Figure A1-7
Chip Size Coordinates
SEMI G81-0703 © SEMI 2000, 2003 10
0
Y
X
Type: ‘BottomLeft’
0
Y
X
Type: ‘TopLeft’
0
X
Y
Type: ‘TopRight’
0
X
Y
Type: ‘BottomRight’
0
X
Y
Type: ‘Center’
Figure A1-8
Wafer Coordinate to Address Devices (OriginLocation)
SEMI G81-0703 © SEMI 2000, 2003 11
APPENDIX 2
STRIP MAP
NOTICE: The material in this appendix is an official part of SEMI G81 and was approved by full letter ballot
procedures on August 27, 2001.
A2-1 This appendix shows how the map data items may be applied to strips as well as some additional information
specific to this substrate type.
A2-2 The StripID shall follow the SEMI T9 specification, when applicable, or may be user definable by the factory.
A2-3 For any given process there must be a way to ensure correct orientation of the strip. The end user is
responsible for providing a master manufacturing drawing showing the top side of the strip. This drawing must show
any special markings or patterns that are needed to reliably flip and rotate a physical strip until it is oriented the
same as the drawing. Figure A2-1 defines what is meant by top side and hence bottom side. It also defines what is
meant by upper, lower and left and right.
A2-4 Each strip type will have a factory defined value for OriginLocation. This is the origin reference for the row 1,
column 1 location on the strip. The factory origin, OriginLocation is selected as one of four corners by the factory
host system. The row and column index will be referenced from the selected reference. This information will be
provided to the equipment by the host in each strip map download scenario.
1 = Upper right (UR) top side
2 = Upper left (UL) top side
3 = Lower left (LL) top side
4 = Lower right (LR) top side
6 = Upper right (UR) bottom side
7 = Upper left (UL) bottom side
8 = Lower left (LL) bottom side
9 = Lower right (LR) bottom side
Row Row
Column
Row Row
Column Column
Column
Std Process Direction
12
34
Top Side
Row Row
Column
Row Row
Column Column
Column
Std Process Direction
67
89
Bottom Side
Figure A2-1
Factory Origin Settings