semi合集-English.pdf - 第404页

SEMI E52-0703 © SEMI 1995, 2003 40 MIXED GAS NAME SYMBOL CODE 10% DISILANE/ARGON 10% Si2H6/Ar 0670 10% DISILANE/HELIUM 10% Si2H6/He 0647 10% DISILANE/HYDROGEN 10% Si2H6/H2 0731 10% ETHYLENE/HELIUM 10% C2H4/He 0718 10% FL…

100%1 / 7923
SEMI E52-0703 © SEMI 1995, 2003 39
MIXED GAS NAME SYMBOL CODE
1%DIBORANE/HYDROGEN 1%B2H6/H2 0557
1%DIBORANE/NITROGEN 1%B2H6/N2 0558
1%FLUORINE/NEON 1%F2/Ne 0733
1%GERMANE/HYDROGEN 1%GeH4/H2 0898
1%GERMANE/NITROGEN 1%GeH4/N2 0658
1%HYDROGEN SELENIDE/HYDROGEN 1%H2Se/H2 0645
1%HYDROGEN SULFIDE/HYDROGEN 1%H2S/H2 0644
1%HYDROGEN SULFIDE/NITROGEN 1%H2S/N2 0806
1%HYDROGEN/NITROGEN 1%H2/N2 0561
1%METHANE/49.5%CARBON DIOXIDE/ARGON 1%CH4/49.5%CO2/Ar 0807
1%METHYLSILANE (MONO)/HYDROGEN 1%CH6Si/H2 0899
1%NITROGEN DIOXIDE/AIR 1%NO2/Air 0808
1%NITROGEN DIOXIDE/NITROGEN 1%NO2/N2 0781
1%NITROGEN/HYDROGEN 1%N2/H2 0871
1%OXYGEN/NITROGEN 1%O2/N2 0562
1%PHOSPHINE/ARGON 1%PH3/Ar 0537
1%PHOSPHINE/HELIUM 1%PH3/He 0546
1%PHOSPHINE/HYDROGEN 1%PH3/H2 0563
1%PHOSPHINE/NITROGEN 1%PH3/N2 0514
1%PHOSPHINE/SILANE 1%PH3/SiH4 0531
1%SILANE/DIBORANE 1%SiH4/B2H6 0684
1%SILANE/HELIUM 1%SiH4/He 0745
1%SULFUR DIOXIDE/ARGON 1%SO2/Ar 0809
1%SULFUR DIOXIDE/NITROGEN 1%SO2/N2 0782
1%TRIMETHYLBORATE(TMB)/HYDROGEN 1%(CH3O)3B/H2 0526
1.5%ARSINE/HYDROGEN 1.5%AsH3/H2 0564
1.5%GERMANE/HYDROGEN 1.5%GeH4/H2 0775
1.5%PHOSPHINE/SILANE 1.5%PH3/SiH4 0533
1.5%SILANE/ARGON 1.5%SiH4/Ar 0810
1.6%PHOSPHINE/21%SILANE/ARGON 1.6%PH3/21%SiH4/Ar 0515
1.65%ACETYLENE/70%ETHYLENE/NITROGEN 1.65%C2H2/70%C2H4/N2 0873
1.8%SILANE/NITROGEN 1.8%SiH4/N2 0811
1.9%SILANE/NITROGEN 1.9%SiH4/N2 0812
10%AMMONIA/NITROGEN 10%NH3/N2 0668
10%ARSINE/HYDROGEN 10%AsH3/H2 0504
10%ARSINE/NITROGEN 10%AsH3/N2 0907
10%CARBON DIOXIDE/10%OXYGEN/NITROGEN 10%CO2/10%O2/N2 0735
10%CARBON DIOXIDE/ARGON 10%CO2/Ar 0813
10%CARBON DIOXIDE/NITROGEN 10%CO2/N2 0783
10%CARBON MONOXIDE/AIR 10%CO/Air 0730
10%CARBON MONOXIDE/CARBON DIOXIDE 10%CO/CO2 0729
10%CYCLOPROPANE/HELIUM 10%C3H6-a)/He 0716
10%DIBORANE/ARGON 10%B2H6/Ar 0881
10%DIBORANE/HYDROGEN 10%B2H6/H2 0701
10%DIBORANE/NITROGEN 10%B2H6/N2 0666
SEMI E52-0703 © SEMI 1995, 2003 40
MIXED GAS NAME SYMBOL CODE
10%DISILANE/ARGON 10%Si2H6/Ar 0670
10%DISILANE/HELIUM 10%Si2H6/He 0647
10%DISILANE/HYDROGEN 10%Si2H6/H2 0731
10%ETHYLENE/HELIUM 10%C2H4/He 0718
10%FLUORINE/ARGON 10%F2/Ar 0754
10%FLUORINE/HELIUM 10%F2/He 0566
10%FLUORINE/NITROGEN 10%F2/N2 0759
10%FLUORINE/OXYGEN 10%F2/O2 0814
10%GERMANE/ARGON 10%GeH4/Ar 0698
10%GERMANE/HELIUM 10%GeH4/He 0704
10%GERMANE/HYDROGEN 10%GeH4/H2 0509
10%HELIUM/HYDROGEN 10%He/H2 0749
10%HYDROGEN SELENIDE/HYDROGEN 10%H2Se/H2 0511
10%HYDROGEN/NITROGEN 10%H2/N2 0532
10%METHANE/ARGON 10%CH4/Ar 0710
10%METHANE/HELIUM 10%CH4/He 0744
10%METHANE/HYDROGEN 10%CH4/H2 0815
10%METHYLSILANE/HYDROGEN 10%CH6Si/H2 0689
10%NITROGEN TRIFLUORIDE/OXYGEN 10%NF3/O2 0570
10%NITROGEN/ARGON 10%N2/Ar 0576
10%OXYGEN/30%CARBON DIOXIDE/ARGON 10%O2/30%CO2/Ar 0816
10%OXYGEN/HELIUM 10%O2/He 0649
10%OZONE/NITROGEN 10%O3/N2 0817
10%OZONE/OXYGEN 10%O3/O2 0571
10%PHOSPHINE/ARGON 10%PH3/Ar 0538
10%PHOSPHINE/HELIUM 10%PH3/He 0674
10%PHOSPHINE/HYDROGEN 10%PH3/H2 0516
10%PHOSPHINE/NITROGEN 10%PH3/N2 0527
10%PHOSPHINE/SILANE 10%PH3/SiH4 0572
10%SILANE/ARGON 10%SiH4/Ar 0565
10%SILANE/HELIUM 10%SiH4/He 0573
10%SILANE/HYDROGEN 10%SiH4/H2 0575
10%SILANE/NITROGEN 10%SiH4/N2 0646
10%SULFUR DIOXIDE/NITROGEN 10%SO2/N2 0818
10%TRIMETHYSILANE/HYDROGEN 10%(CH3)3SiH/H2 0739
10%WATER VAPOR/NITROGEN 10%H2O/N2 0568
11%OZONE/OXYGEN 11%O3/O2 0868
12%HYDROGEN/NITROGEN 12%H2/N2 0819
12%OZONE/OXYGEN 12%O3/O2 0651
13%DISELENIUM DICHLORIDE/HYDROGEN 13%Se2Cl2/H2 0894
13%HYDROGEN CHLORIDE/1.32%XENON/NEON 13%HCI/1.32%Xe/Ne 0512
13%HYDROGEN/NITROGEN 13%H2/N2 0643
13%TRICHLOROSILANE/HYDROGEN 13%SiHCI3/H2 0682
15%ARGON/PHOSPHINE 15%Ar/PH3 0578
15%ARSINE/HYDROGEN 15%AsH3/H2 0579
SEMI E52-0703 © SEMI 1995, 2003 41
MIXED GAS NAME SYMBOL CODE
15%CARBON DIOXIDE/NITROGEN 15%CO2/N2 0778
15%DIBORANE/ARGON 15%B2H6/Ar 0697
15%DIBORANE/HYDROGEN 15%B2H6/H2 0820
15%DIBORANE/NITROGEN 15%B2H6/N2 0580
15%GERMANIUM TETRACHLORIDE/OXYGEN 15%GeCl4/O2 0787
15%HYDROGEN/ARGON 15%H2/Ar 0694
15%HYDROGEN/NITROGEN 15%H2/N2 0545
15%NITRIC OXIDE/NITROGEN 15%NO/N2 0652
15%OZONE/OXYGEN 15%O3/O2 0641
15%PHOSPHINE/15%SILANE/NITROGEN 15%PH3/15%SiH4/N2 0581
15%PHOSPHINE/ARGON 15%PH3/Ar 0582
15%PHOSPHINE/HYDROGEN 15%PH3/H2 0583
15%PHOSPHINE/NITROGEN 15%PH3/N2 0500
15%PHOSPHINE/SILANE 15%PH3/SiH4 0584
15%SILANE/ARGON 15%SiH4/Ar 0821
15%SILANE/HELIUM 15%SiH4/He 0864
15%SILANE/NITROGEN 15%SiH4/N2 0519
16%CARBON DIOXIDE/NITROGEN 16%CO2/N2 0543
17%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 17%O2/CF4 0585
17.4%GERMANIUM TETRACHLORIDE/HYDROGEN 17.4%GeCl4/H2 0891
18.4%PHOSPHORUS OXYCHLORIDE/OXYGEN 18.4%POCl3/O2 0893
2%ARSINE/HYDROGEN 2%AsH3/H2 0703
2%ARSINE/NITROGEN 2%AsH3/N2 0586
2%ARSINE/SILANE 2%AsH3/SiH4 0663
2%DIBORANE/ARGON 2%B2H6/Ar 0587
2%DIBORANE/NITROGEN 2%B2H6/N2 0695
2%DISILANE/HELIUM 2%Si2H6/He 0764
2%GERMANE/ARGON 2%GeH4/Ar 0740
2%HYDROGEN SULFIDE/NITROGEN 2%H2S/N2 0903
2%HYDROGEN/NITROGEN 2%H2/N2 0588
2%METHYSILANE/HYDROGEN 2%CH6Si/H2 0717
2%NITRIC OXIDE/NITROGEN 2%NO/N2 0822
2%NITROGEN DIOXIDE/NITROGEN 2%NO2/N2 0904
2%NITROGEN/3%CARBON MONOXIDE/17%CARBON
DIOXIDE/HYDROGEN 2%N2/3%CO/17%CO2/H2 0788
2%OXYGEN/ARGON 2%O2/Ar 0863
2%OZONE/OXYGEN 2%O3/O2 0569
2%PHOSPHINE/ARGON 2%PH3/Ar 0539
2%PHOSPHINE/NITROGEN 2%PH3/N2 0640
2%PHOSPHINE/SILANE 2%PH3/SiH4 0696
2%SILANE/ARGON 2%SiH4/Ar 0823
2%SILANE/HELIUM 2%SiH4/He 0589
2%SILANE/HYDROGEN 2%SiH4/H2 0544
2%SILANE/NITROGEN 2%SiH4/N2 0653
2%SULFUR DIOXIDE/NITROGEN 2%SO2/N2 0824