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SEMI E109-0305 © SEMI 2001, 2005 47 18.4.2 Bind 18.4.2.1 The Bind service is used to a ssoci ate a PodID with a load port. The Bi nd can contain a PropertiesList of pod object attributes that are sup plied by the host. A…

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SEMI E109-0305 © SEMI 2001, 2005 46
Parameter Name Form Description
OutputPortID Integer
0, 101 to 255.
ID number of a load port where the Pod will be presented for
removal. The OutputPortID number should be the same as the
load port number. When the value of the OutputPortID = zero,
the Pod will be delivered to the internal buffer.
PortID Integer
1-n.
ID number of a load port. The PortID number should be the
same as the load port number.
PortList List
1-n items.
List of n items
PortID
1
.
.
n PortID
n
PodPropertiesList List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticlePlacement-
Instruction
Enumerated:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
The instructions for placing reticles in pod slot.
ReticlePropertiesList List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticleLocation-
PropertiesList
List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticleRemoval-
Instruction
Enumerated:
0 = REMOVE
1 = PASS BY
The instructions for removing reticles from a pod slot.
ServiceStatus Enumerated:
IN SERVICE,
or OUT OF SERVICE.
The desired transfer service status of the specified load port.
SourceLocation LocationID. The source location from which to move a reticle.
Status A list of ErrorCode/ErrorText pairs. Reports any errors found.
18.4 Fundamental Service Message Definitions
18.4.1 The following tables specify the allowable/required parameters for each service. The column marked
“REQ/OPT”, specifies which parameters are required to be supported for RPMS compliance (R = Required, O =
Optional).
SEMI E109-0305 © SEMI 2001, 2005 47
18.4.2 Bind
18.4.2.1 The Bind service is used to associate a PodID with a load port. The Bind can contain a PropertiesList of
pod object attributes that are supplied by the host. A pod object is instantiated when this service is used
successfully. The Bind service will be rejected if the pod specified has already been instantiated through the Bind or
PodNotification service, or a PodID read. The Bind service also triggers a transition in the Load Port Reservation
state model from NOT RESERVED to RESERVED.
Table 23 Bind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The PortID where a pod is expected.
PodID M — The expected PodID.
PodPropertiesList C — A list of name value pairs providing attributes for the
pod object being instantiated with the Bind service.
CMStatus — M Information concerning the result of the service.
18.4.3 CancelBind
18.4.3.1 The CancelBind request is used to cancel the association between a port and a PodID. The pod object is
destroyed when this service is used successfully. The CancelBind service also triggers a transition in the Load Port
Reservation state model from RESERVED to NOT RESERVED.
Table 24 CancelBind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which to cancel the load port to pod association.
Either PortID or PodID must be specified.
PodID C — The PodID for which to cancel the load port to pod association.
Either PortID or PodID must be specified.
CMStatus — M Information concerning the result of the service.
18.4.4 CancelPod
18.4.4.1 The CancelPod request is used to stop a reticle pod. If the reticle pod is at a reticle pod load port, then it
shall be made ready for unload. The production equipment shall reject this service if issued after reticles have been
removed for processing.
Table 25 CancelPod Service Parameters
Parameter Name Req/Opt Rsp/Conf Description
PodID M — The PodID to cancel.
CMStatus — M Information concerning the result of the service.
PortID C — The PortID where the pod object is located. This parameter is not
required if the pod object has been previously instantiated.
18.4.5 CancelPodAtPort
18.4.5.1 CancelPodAtPort is used to abort any pod at a designated port. This service can be used when the podID
of the pod at the designated port is unknown.
SEMI E109-0305 © SEMI 2001, 2005 48
Table 26 CancelPodAtPort Service Parameters
Parameter Name Req/Ind Rsp/Conf Description
PortID M — Any pod that exists on the load port specified shall be made ready for
unloading.
CMStatus — M Information concerning the result of the service.
18.4.6 CancelPodNotification
18.4.6.1 The CancelPodNotification is used by the host to request the equipment cancel a previous PodNotification
service. This service shall cause the equipment to destroy the pod object specified.
Table 27 CancelPodNotification Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod object to destroy.
CMStatus — M Information concerning the result of the service.
18.4.7 ChangeAccess
18.4.7.1 The ChangeAccess message requests a change of access mode for the load ports specified in the PortList.
Table 28 ChangeAccess Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
AccessMode M — The new desired access mode.
PortList C — The list of ports to use the new access mode.
CMStatus — M Information concerning the result of the service.
18.4.8 ChangeServiceStatus
18.4.8.1 The ChangeServiceStatus service is used to request the production equipment change a load port service
state.
Table 29 ChangeServiceStatus Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
ServiceStatus M — The new service state.
CMStatus — M Information concerning the result of the service.
18.4.9 OktoUseReticle
18.4.9.1 The OktoUseReticle service is sent by the host to indicate that the reticle may be used for processing. The
equipment should change the reticle state model RETICLE AT EQUIPMENT status to QUALIFIED.
Table 30 OktoUseReticle Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — ReticleID to designate the RETICLE AT EQUIPMENT status.
RPMStatus — M Information concerning the result of the service.